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SMC Vacuum Valves
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Vacuum Assist Valve ZP2V Series
SMC
A vacuum valve which inhibits drops in vacuum pressure, even when no workpiece is present.
[Features]
· Keeps hold of workpieces when multiple vacuum pads are used by a single vacuum generator.
· Protects against drops in vacuum pressure, even when some pads are not suctioning.
· Single-action fitting models now also available.
· No need for switching the operation when changing out workpieces.
· Allows the simplification of control circuits when workpieces have different shapes.
· Fixed orifice size: 0.3 mm, 0.5 mm, 0.7 mm, 1 mm.Days to Ship: 3 Day(s) or more -
Aluminum High Vacuum Angle Valves, Normally Closed, Bellows Seal, XLA Series
SMC
Vacuum regulator with low outgassing.
[Features]
· Aluminum body.
· Replaceable bellows.
· Uniform baking temperature.
· Lightweight and compact.
· Little heavy metal contamination.Days to Ship: 3 Day(s) or more -
Normally Closed Type High Vacuum Solenoid Valve XSA Series (XSA1/XSA2/XSA3)
SMC
A normally closed type high vacuum solenoid valve with reduced particulate matter and improved sealing performance.
[Features]
・ Flame-retardant (UL94 V-0 compliant)
・ Two types of fittings (face seal fittings / compression fittings) and female threads (Rc, NPT) are available
・ By moving the spring from the sliding part of the armature to the body part, dust generation due to contact with the spring has been reduced
・ Securely seals with a large spring force
・ Power consumption *: 4.5 W (size 1) / 7 W (size 2) / 10.5 W (Size 3) (* For DC specifications / B type. )
・ Operating temperature range: 5 to 60℃Standard Price: MYR 1,106.16- Days to Ship: 3 Day(s) or more -
Aluminum High Vacuum Angle Valve, XLDV Series, Air-Operated Type With Solenoid Valve
SMC
A high vacuum angle (L-shaped) valve for preventing pumps from running when overloaded.
[Features]
· Initial exhaust valve and main exhaust valve are integrated (two-step flow rate control valve).
· Allows for compact system designs and reduced piping.
· Prevents dust turbulence inside the chamber when exhausting.
· Adjustable flow rate for initial exhaust valve.
· Air-operated type with solenoid valve.
· Its low outgassing enables use with a smaller pump capacity and helps reduce exhaust time.
· Does not contain heavy metals such as Ni (nickel) or Cr (chrome).
· Low sputtering yield minimizes heavy metal contamination of wafers.Days to Ship: 23 Day(s) or more -
Aluminum High Vacuum Angle Valve, Manual Type, Bellows Seal, XLH Series
SMC
A high vacuum angle valve with a pressure-balanced structure that enables an unrestricted exhaust direction.
[Features]
· Bellows type is particulate-free and cleaned.
· Low actuation torque (0.5 N·m or less).
· Spring provides a standard sealing load.
· Handle height remains the same regardless of whether valve is open or closed.
· Equipped as standard with an indicator for confirming if the valve is open or closed.
· Its low outgassing enables use with a smaller pump capacity and helps reduce exhaust time.
· Does not contain heavy metals such as Ni (nickel) or Cr (chrome).
· Low sputtering yield minimizes heavy metal contamination of wafers.Days to Ship: 5 Day(s) or more -
Aluminum High Vacuum Angle Valve XLS Series (Electromagnetic Type, Bellows Pressure Balance)
SMC
A high vacuum angle valve that requires no air to drive, enabling use in portable equipment.
[Features]
· Uses no sliding metal parts, minimizing particulate matter.
· The pressure balance mechanism allows an unrestricted exhaust direction.
· A control power supply circuit for solenoid valve drive is now standard.
· Its low outgassing enables use with a smaller pump capacity and helps reduce exhaust time.
· Does not contain heavy metals such as Ni (nickel) or Cr (chrome).
· Low sputtering yield minimizes heavy metal contamination of wafers.Standard Price: MYR 1,953.90- Days to Ship: 5 Day(s) or more -
SMC
Vacuum valve with precision-cast single-piece structure which helps prevent gas accumulation.
[Features]
· Bellows type is particulate-free and cleaned.
· Pressure balanced structure.
· Body material: SCS13 (SUS304 equivalent).
· The XM Series is interchangeable with XL Series aluminum high vacuum angle valves.Days to Ship: 3 Day(s) or more -
SMC
A vacuum valve with a pressure balanced structure.
[Features]
· Body material: SCS13 (SUS304 equivalent). Made of stainless steel.
· Precision-cast single-piece structure which helps prevent gas accumulation.
· Interchangeable with XL Series aluminum high-vacuum angle valves.
· Bellows type is particulate-free and cleaned.Days to Ship: 3 Day(s) or more -
Aluminum High Vacuum Angle Valves, Normally Closed, O-Ring Seal, XLF Series
SMC
[Features]
· Aluminum body
· Uniform baking temperature
· Lightweight and compact
· Low outgassing
· Little heavy metal contamination
· Resistant to fluorine corrosion
· Replaceable bellows (bellows-seal type)Days to Ship: 3 Day(s) or more -
SMC
A high vacuum angle (L-shaped) valve for preventing pumps from running when overloaded.
[Features]
· Initial exhaust valve and main exhaust valve are integrated (two-step flow rate control valve)
・ Achieves system compactness and piping savings
・ Prevents dust from rolling up in the chamber when exhausting
・ Adjustable initial exhaust valve flow rate
・ Air operated type / with solenoid valve
・ Since there is little outgas, the pump capacity can be small and the exhaust time can be shortened
・ It does not contain heavy metals such as Ni (nickel) and Cr (chromium), and the sputtering rate is low, so there is little heavy metal contamination on the wafer
・ Strong against fluorine
· Uniform baking temperature. Good thermal conductivity, uniform temperature throughout the body, drastically reducing product adhesion
· Lightweight and compactDays to Ship: 3 Day(s) or more -
SMC
A vacuum valve for preventing pumps from running when overloaded.
[Features]
· Initial exhaust valve and main exhaust valve are integrated (two-step flow rate control valve)
· Allows for compact system designs and reduced piping.
· Prevents dust turbulence inside the chamber when exhausting.
· Adjustable flow rate for initial exhaust valve.
· Body material: SCS13 (SUS304 equivalent).
· Precision-cast single-piece structure which helps prevent gas accumulation.
· The XM Series is interchangeable with XL Series aluminum high vacuum angle valves.Days to Ship: 10 Day(s) or more -
Aluminum High Vacuum Angle Valves, Normally Closed, Bellows Seal, XLAV Series
SMC
A vacuum regulator with little heavy metal contamination.
[Features]
· Aluminum body.
· Replaceable bellows.
· Uniform baking temperature.
· Lightweight and compact.
· Low outgassing.Standard Price: MYR 2,253.84- Days to Ship: 23 Day(s) or more -
Aluminum High Vacuum Angle Valve, Double Acting / Bellows Seal, XLC Series
SMC
[Features]
· Aluminum body
· Uniform baking temperature
· Lightweight and compact
· Low outgassing
· Little heavy metal contamination
· Resistant to fluorine corrosion
· Replaceable bellows (bellows-seal type)Days to Ship: 3 Day(s) or more -
SMC
[Features]
· Aluminum body
· Uniform baking temperature
· Lightweight and compact
· Low outgassing
· Little heavy metal contamination
· Resistant to fluorine corrosion
· Replaceable bellows (bellows-seal type)Standard Price: MYR 2,214.40- Days to Ship: 3 Day(s) or more -
Aluminum High Vacuum Angle Valves, Double Acting, O-Ring Seal, XLG Series
SMC
[Features]
· Aluminum body
· Uniform baking temperature
· Lightweight and compact
· Low outgassing
· Little heavy metal contamination
· Resistant to fluorine corrosion
· Replaceable bellows (bellows-seal type)Days to Ship: 10 Day(s) or more -
Stainless Steel High Vacuum Angle Valves / In-Line Valves, XMH/XYH Series (Manual/Bellows Seal)
SMC
A vacuum valve with a pressure-balanced structure that enables an unrestricted exhaust direction.
[Features]
· Bellows type is particulate-free and cleaned.
· Low actuation torque (0.5 N·m or less).
· Spring provides a standard sealing load.
· Handle height remains the same regardless of whether valve is open or closed.
· Equipped as standard with an indicator for confirming if the valve is open or closed.
· Body material: SCS13 (SUS304 equivalent).
· Precision-cast single-piece structure which helps prevent gas accumulation.
· The XM Series is interchangeable with XL Series aluminum high vacuum angle valves.Days to Ship: 5 Day(s) or more -
Smooth Vent Valve (Supply Line) XVD2-02S, XVD2-02V
SMC
A smooth vent valve with an adjustable flow rate for both the initial and main air supplies.
[Features]
· An integrated valve and needle valve structure that requires on 1/4 the piping space of previous models.
· Uses a metal diaphragm for the seat section, greatly reducing the generation of particulate matter.
· Valve type: Normally closed (pressurize to open, spring seal).
Fluids: Nitrogen, air, inert gas.
· Operating temperature: 5 to 60°C (baking temperature, 150°C or less).
· Weight: 0.5 kg.Standard Price: MYR 4,642.31- Days to Ship: 10 Day(s) or more -
Aluminum High Vacuum L-Type Valve XLA, XLC, XLF, XLG Series Maintenance Parts
SMC
These are maintenance parts for aluminum high vacuum L-type valves, XLA, XLC, XLF, and XLG series.
Days to Ship: Quote
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| Mounting Orientation |
| Number of Ports |
| Solenoid Type |
| Switching Type |
| Driving Type |
| Effective Sectional Area(mm2) |
| Pipe Port Type |
| Plumbing Thread Nominal |
| Connecting Tube Diameter |
| Flange Type |
| Flange Nominal |
| CV Value |
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| Brand | SMC | SMC | SMC | SMC | SMC | SMC | SMC | SMC | SMC | SMC | SMC | SMC | SMC | SMC | SMC | SMC | SMC | SMC |
| Product Series | Aluminum High Vacuum Angle Valves, Normally Closed, Bellows Seal, XLA Series | Normally Closed Type High Vacuum Solenoid Valve XSA Series (XSA1/XSA2/XSA3) | Aluminum High Vacuum Angle Valve, XLDV Series, Air-Operated Type With Solenoid Valve | Aluminum High Vacuum Angle Valve, Manual Type, Bellows Seal, XLH Series | Aluminum High Vacuum Angle Valve XLS Series (Electromagnetic Type, Bellows Pressure Balance) | Aluminum High Vacuum Angle Valves, Normally Closed, O-Ring Seal, XLF Series | Aluminum High Vacuum Angle Valves, Normally Closed, Bellows Seal, XLAV Series | Aluminum High Vacuum Angle Valve, Double Acting / Bellows Seal, XLC Series | Aluminum High Vacuum Angle Valves, Double Acting, O-Ring Seal, XLG Series | Stainless Steel High Vacuum Angle Valves / In-Line Valves, XMH/XYH Series (Manual/Bellows Seal) | Aluminum High Vacuum L-Type Valve XLA, XLC, XLF, XLG Series Maintenance Parts | |||||||
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| Days to Ship | 3 Day(s) or more | 3 Day(s) or more | 3 Day(s) or more | 23 Day(s) or more | 5 Day(s) or more | 5 Day(s) or more | 3 Day(s) or more | 3 Day(s) or more | 3 Day(s) or more | 3 Day(s) or more | 10 Day(s) or more | 23 Day(s) or more | 3 Day(s) or more | 3 Day(s) or more | 10 Day(s) or more | 5 Day(s) or more | 10 Day(s) or more | Quote |
| Type | Air-Actuated Vacuum Valve | Air-Actuated Vacuum Valve | High Vacuum Solenoid | High Vacuum Solenoid | Manual Vacuum Valve | Solenoid Valve | Pilot Vacuum Valve | Air-Actuated Vacuum Valve | Pilot Vacuum Valve | Air-Actuated Vacuum Valve | Pilot Vacuum Valve | High Vacuum Solenoid | Pilot Vacuum Valve | High Vacuum Solenoid | Pilot Vacuum Valve | Manual Vacuum Valve | Manual Vacuum Valve | Related Components |
| Application | Single Use | Single Use | Single Use | Single Use | Single Use | Single Use | Single Use | Single Use | Single Use | Single Use | Single Use | Single Use | Single Use | Single Use | Single Use | Single Use | Single Use | - |
| Mounting Orientation | Direct | Direct | Direct | Direct | Direct | Direct | Direct | Direct | Direct | Direct | Direct | Direct | Direct | Direct | Direct | Direct | Direct | - |
| Number of Ports | 2-Port Valve | 3-Port Valve | 2-Port Valve | 2-Port Valve | 2-Port Valve | 2-Port Valve | 2-Port Valve | 2-Port Valve | 2-Port Valve | 2-Port Valve | 2-Port Valve | 3-Port Valve | 2-Port Valve | 2-Port Valve | 2-Port Valve | 2-Port Valve | 2-Port Valve | - |
| Solenoid Type | - | Single | Single | Single | - | Single | - | - | - | - | - | Single | - | Single | - | - | - | - |
| Switching Type | 2-Position Normally Closed | 2-Position Normally Closed | 2-Position Normally Closed | 2-Position Normally Closed | 2-Position Normally Closed | 2-Position Normally Closed | 2-Position Normally Closed | 2-Position Normally Closed | 2-Position Normally Closed | 2-Position Normally Closed | 2-Position Normally Closed | 2-Position Normally Closed | 2-Position Normally Closed | 2-Position Normally Closed | 2-Position Normally Closed | 2-Position Normally Closed | 2-Position Normally Closed | - |
| Driving Type | - | - | Directly Operated | Directly Operated | - | Directly Operated | - | - | - | - | - | Air Pilot | - | Directly Operated | - | - | - | - |
| Effective Sectional Area(mm2) | 0.07 ～ 0.78 | - | - | - | - | - | - | - | - | - | - | - | - | - | - | - | 4.6 | - |
| Pipe Port Type | M / Rc / NPT / One-Touch Plumbing | Flange | Rc / NPT / Face Seal Fitting / Compression Fitting | Flange | Flange | Flange | Flange | Flange | Flange | Flange | Flange | Flange | Flange | Flange | Flange | Flange | Swaged Sleeve Fittings | - |
| Plumbing Thread Nominal | M5 / 1/8 / M6 / M8 | - | 1/8 / 1/4 / 3/8 | - | - | - | - | - | - | - | - | - | - | - | - | - | 1/4 | - |
| Connecting Tube Diameter | Ø4 / Ø6 | - | - | - | - | - | - | - | - | - | - | - | - | - | - | - | - | - |
| Flange Type | - | NW / Others | - | KF / K | KF | KF | KF / K / CF / Others | NW / Others | KF / K | KF / K | KF / K / CF | NW / Others | KF / K | KF / K | KF / K | KF / CF | - | - |
| Flange Nominal | - | 16 / 25 / 40 / 50 / 63 / 80 | - | 25 / 40 / 50 / 63 / 80 | 16 / 25 / 40 / 50 | 16 / 25 | 16 / 25 / 40 / 50 / 63 / 80 | 16 / 25 / 40 / 50 / 63 / 80 | 16 / 25 / 40 / 50 / 63 / 80 | 25 / 40 / 50 / 63 / 80 | 25 / 40 / 50 / 63 / 80 | 16 / 25 / 40 / 50 / 63 / 80 | 16 / 25 / 40 / 50 / 63 / 80 | 16 / 25 / 40 / 50 / 63 / 80 | 16 / 25 / 40 / 50 / 63 / 80 | 16 / 25 / 40 / 50 | - | - |
| CV Value | 0.0037940379 ～ 0.0422764228 | - | - | - | - | - | - | - | - | - | - | - | - | - | - | - | 84.87 | - |
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Configure
Specification/Dimensions
-
Type
- Solenoid Valve
- High Vacuum Solenoid
- Manual Vacuum Valve
- Mechanically-Operated Vacuum Valve
- Pilot Vacuum Valve
- Air-Actuated Vacuum Valve
- Related Components
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Application
- Single Use
- Multi-Port
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Mounting Orientation
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Number of Ports
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Solenoid Type
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Switching Type
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2-Position Normally Open
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2-Position Normally Closed
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Others
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2-Position Normally Open
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Driving Type
- Directly Operated
- External Pilot Shape
- Air Pilot
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Effective Sectional Area(mm2)
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Pipe Port Type
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Plumbing Thread Nominal
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Connecting Tube Diameter
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Flange Type
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Flange Nominal
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CV Value
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