[Announcement] MISUMI Malaysia website new user interface. Clearer navigation, easy product search and more. Explore now! May contact us at (60) 3 7890 6399 for any inquiries.

How can we improve?

How can we improve?

Comments

Name (Optional)

E-mail Address (Optional)

Tel (Optional)

While we are not able to respond directly to comments submitted in this form, the information will be reviewed for future improvement.
Customer Privacy Policy

Thank you for your cooperation.

While we are not able to respond directly to comments submitted in this form, the information will be reviewed for future improvement.
Please use the inquiry form.

Customer Privacy Policy

Aluminum High Vacuum Angle Valve XLS Series (Electromagnetic Type, Bellows Pressure Balance)

A high vacuum angle valve that requires no air to drive, enabling use in portable equipment.
[Features]
· Uses no sliding metal parts, minimizing particulate matter.
· The pressure balance mechanism allows an unrestricted exhaust direction.
· A control power supply circuit for solenoid valve drive is now standard.
· Its low outgassing enables use with a smaller pump capacity and helps reduce exhaust time.
· Does not contain heavy metals such as Ni (nickel) or Cr (chrome).
· Low sputtering yield minimizes heavy metal contamination of wafers.

(i)Caution

■ SMC Product Line
Webpages for products currently without individual pages on this site will be released on an ad-hoc basis.

■ Products Planned for Online Release
Air cylinder-related product pages will be released on this site on an ad-hoc basis.
CQ2/MG types, etc., are already available.
*Vacuum equipment, FRLs, solenoid valves, etc., will also be released on dedicated pages on this site on an ad-hoc basis.
*The information above is correct as of December 2018.
The product images may be representative images only. Refer to the manufacturer's catalog for shape details.

Part Number

Configured Part Number is shown.

Product Specifications
Part Numbers
Catalog

Aluminum High Vacuum Angle Valve, Electromagnetic Type, Bellows Pressure Balance, XLS Series Specifications

XLS Series (no control power supply) external appearance

XLS Series (with control power supply) external appearance

Model		XLS-16	XLS-25	XLS-16-P□G	XLS-25-P□G
Valve Type		Normally closed (N.C.)
Fluids		Inert gas vacuum
Operating Temperature (°C)		5 to 40
Operating Pressure Pa (abs)		0.1 MPa (G) to 1 × 10^-6 (abs)
Conductance L/s ^{Note 1:}		5	8	5	8
Amount of leakage Pa·m³/s	Internal	1.3 × 10 ^-8, values at normal temperature and excluding gas permeation
Amount of leakage Pa·m³/s	External	1.3 × 10 ^-11, values at normal temperature and excluding gas permeation
Flange Type and Size		KF16	KF25	KF16	KF25
Main Material ^{Note 2:}		Main body: aluminum alloy, Main parts: stainless steel, PFA, FKM (standard sealing material)
Surface Treatment		External: hard anodized aluminum, Internal: base material
Control Power Supply Yes/No		None		Yes
Operating Power Supply Voltage		24/6, 48/12, 100/24 V DC		24 V DC, 100/200 V AC
Allowable Voltage Fluctuation %		±10
Electrical Entry		G, C, D, T types		G type only
Lead Wire		AWG20, outer diameter: 2.63 mm		VCTF2 × 0.75, outer diameter: 2.3 mm, Sheath outer diameter: 6.6 mm
Coil Insulation Type		Class B
Maximum Operating Frequency (Hz)		0.17
Weight (kg)		0.4	0.7	0.7	1.0

Note 1: Conductance is the same as that of an elbow with the same dimensions.
Note 2: A coating of vacuum grease (Y-VAC3) has been applied to the valve seat section of the vacuum part.

Product Power/Current (When Applying Rated Voltage)

Model			Startup		Holding
Model			Power (W)	Current (A)	Power (W)	Current (A)
XLS-16-	□G/C/D/T, P5G		36	1.5	4.8	0.38
	P1G	50 Hz	30.5	0.47	14.8	0.35
	P1G	60 Hz	30.5	0.47	10	0.27
	P2G	50 Hz	30	0.24	4.9	0.11
	P2G	60 Hz	30	0.24	2.3	0.10
XLS-25-	□G/C/D/T, P5G		47	2.0	5.3	0.5
	P1G	50 Hz	42	0.62	20	0.46
	P1G	60 Hz	42	0.62	13.5	0.36
	P2G	50 Hz	45	0.35	6.7	0.15
	P2G	60 Hz	45	0.35	3.0	0.12

Product Drawing

XLS no control power supply

(Unit: mm)

Grommet (G) dimensional drawing

Conduit (C) dimensional drawing

Terminal (T) dimensional drawing

DIN terminal (D) dimensional drawing

XLS with control power supply

(Unit: mm)

Grommet (G) dimensional drawing

Model	A	B	C	D	E	F	G	J	K	L	M
XLS-16-□G	40	104	113	38	30	35	17	23	-	-	25.5
XLS-16-□C		96							41	-	-
XLS-16-□D									60	48	-
XLS-16-□T			129						95	62	-
XLS-25-□G	50	128.5	138.5	48	40	40	26	25.5	-	-	28
XLS-25-□C		121.5							43	-	-
XLS-25-□D		120.5							63	51	-
XLS-25-□T		121.5	154.5						97	66	-
XLS-16-P□G	40	96	113	38	30	35	17	23	87	66.5	-
XLS-25-P□G	50	121.5	138.5	48	40	40	26	25.5	89.5	69	-

Product Structure/Operation

XLS Series diagram

*Refer to p. 465 of the manufacturer's catalog for maintenance parts.

Working Principle

XLS-□-□□ (no control power supply)
Applying the starting voltage across the coil assembly for approx. 0.15 to 0.2 s opens valve (9). Thereafter, this is held at 25% of the starting voltage. Do not apply the starting voltage for more than 0.3 s as doing so may cause coil burnout. When power to the coil assembly is stopped, valve (9) closes.
XLS-□-P□G (with control power supply)
Applying the rated voltage across the coil assembly opens valve (9). When power to the coil assembly is stopped, valve (9) closes.

*The pressure balance mechanism allows an unrestricted exhaust direction.

Notes

*The body material is A6063, the bellows material is SUS316L, the metal materials used for the other vacuum parts are 13Cr stainless steel, SUS304 and A2017 and the sealing material is FKM. The armature assembly part of the vacuum sections uses a fluorinated resin (PFA). A fluorinated grease coating has been applied to the valve in the vacuum section. Check that the fluid in use will not damage the selected material.
*When there is no operating power supply, the starting voltage is applied for only 0.15 to 0.2 s. After this, a holding voltage (25% of the starting voltage) should be applied. Failure to do this may cause coil burnout or fire.
*Be sure to install a fuse or an earth leakage circuit breaker in the power supply circuit.
*Use within the operating pressure range.
*Refer to the manufacturer's catalog for parts other than those detailed above.

: 30; 45; 60

Part Number
XLS-16-5C
XLS-16-5G
XLS-16-5G-Q
XLS-16-5T
XLS-16-P1G
XLS-16-P2G
XLS-16-P5G
XLS-25-5C
XLS-25-5C-Q
XLS-25-5G
XLS-25-5G-Q
XLS-25-5T
XLS-25-5T-Q
XLS-25-P1G
XLS-25-P2G
XLS-25-P5G

Standard Unit Price	Minimum order quantity	Days to Ship	Flange Nominal	Voltage	Sonic Speed Conductance	Electrical Entry Method	CE-marked	Control Power Supply Yes/No
MYR 1,973.91	1 Piece(s)	23 Day(s) or more	16	DC24V	5L/S	Conduit	None	None
MYR 1,953.90	1 Piece(s)	10 Day(s) or more	16	DC24V	5L/S	Grommet	None	None
MYR 1,977.74	1 Piece(s)	23 Day(s) or more	16	DC24V	5L/S	Grommet	CE-marked	None
MYR 2,009.04	1 Piece(s)	23 Day(s) or more	16	DC24V	5L/S	Terminal	None	None
MYR 2,340.68	1 Piece(s)	5 Day(s) or more	16	AC100V	5L/S	Grommet	None	With control power supply
MYR 2,482.38	1 Piece(s)	23 Day(s) or more	16	AC200V	5L/S	Grommet	None	With control power supply
MYR 2,447.05	1 Piece(s)	5 Day(s) or more	16	DC24V	5L/S	Grommet	None	With control power supply
MYR 2,082.36	1 Piece(s)	23 Day(s) or more	25	DC24V	8L/S	Conduit	None	None
MYR 2,084.62	1 Piece(s)	23 Day(s) or more	25	DC24V	8L/S	Conduit	CE-marked	None
MYR 2,051.42	1 Piece(s)	10 Day(s) or more	25	DC24V	8L/S	Grommet	None	None
MYR 2,064.50	1 Piece(s)	23 Day(s) or more	25	DC24V	8L/S	Grommet	CE-marked	None
MYR 2,106.62	1 Piece(s)	23 Day(s) or more	25	DC24V	8L/S	Terminal	None	None
MYR 2,119.65	1 Piece(s)	23 Day(s) or more	25	DC24V	8L/S	Terminal	CE-marked	None
MYR 2,433.05	1 Piece(s)	5 Day(s) or more	25	AC100V	8L/S	Grommet	None	With control power supply
MYR 2,545.97	1 Piece(s)	5 Day(s) or more	25	AC200V	8L/S	Grommet	None	With control power supply
MYR 2,400.54	1 Piece(s)	5 Day(s) or more	25	DC24V	8L/S	Grommet	None	With control power supply

Basic Information

Type	Solenoid Valve	Application	Single Use	Mounting Orientation	Direct
Number of Ports	2-Port Valve	Solenoid Type	Single	Switching Type	2-Position Normally Closed
Driving Type	Directly Operated	Pipe Port Type	Flange	Flange Type	KF
Seal Type	Bellows Seal

Configure

16 Part Numbers

View Part Numbers

Configure Remaining Specifications

Completed

Specification/Dimensions

Flange Nominal
- 16
- 25
Clear
Voltage
- DC24V
- AC100V
- AC200V
Clear
Sonic Speed Conductance
5L/S

8L/S
Clear
Electrical Entry Method
- Conduit
- DIN terminal
- Grommet
- Terminal
Clear
CE-marked
- CE-marked
- None
Clear
Control Power Supply Yes/No
- None
- With control power supply
Clear
type
- XLS
- XLS-16
Clear
CAD
- 2D
- 3D
Clear

Days to Ship

All

5 Day(s) or Less

10 Day(s) or Less

23 Day(s) or Less
Clear

Specify Alterations

The specifications and dimensions of some parts may not be fully covered. For exact details, refer to manufacturer catalogs .

Additional Products in this Category

Tech Support

: Technical Inquiry

How can we improve?

Aluminum High Vacuum Angle Valve XLS Series (Electromagnetic Type, Bellows Pressure Balance)

(i)Caution

Aluminum High Vacuum Angle Valve, Electromagnetic Type, Bellows Pressure Balance, XLS Series Specifications

Product Power/Current (When Applying Rated Voltage)

Product Drawing

XLS no control power supply

XLS with control power supply

Product Structure/Operation

Working Principle

Notes

Basic Information

Configure

Specification/Dimensions

Flange Nominal

Voltage

Sonic Speed Conductance

Electrical Entry Method

CE-marked

Control Power Supply Yes/No

type

CAD

Days to Ship

Specify Alterations

Additional Products in this Category

Tech Support

Payment Method

About MISUMI

About this Website

Useful Tools

Customer Service

Social Media

MISUMI Contact 9am – 6pm (Mon – Fri) * Order cut-off time is 5pm, 9am – 1pm(Sat) * Order cut-off time is 12pm