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SMC Vacuum Valves（Solenoid Type：Single）
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Aluminum High Vacuum Angle Valves, Normally Closed, Bellows Seal, XLA Series
SMC
Vacuum regulator with low outgassing.
[Features]
· Aluminum body.
· Replaceable bellows.
· Uniform baking temperature.
· Lightweight and compact.
· Little heavy metal contamination.Days to Ship: 3 Day(s) or more -
Normally Closed Type High Vacuum Solenoid Valve XSA Series (XSA1/XSA2/XSA3)
SMC
A normally closed type high vacuum solenoid valve with reduced particulate matter and improved sealing performance.
[Features]
・ Flame-retardant (UL94 V-0 compliant)
・ Two types of fittings (face seal fittings / compression fittings) and female threads (Rc, NPT) are available
・ By moving the spring from the sliding part of the armature to the body part, dust generation due to contact with the spring has been reduced
・ Securely seals with a large spring force
・ Power consumption *: 4.5 W (size 1) / 7 W (size 2) / 10.5 W (Size 3) (* For DC specifications / B type. )
・ Operating temperature range: 5 to 60℃Standard Price: MYR 1,106.16- Days to Ship: 3 Day(s) or more -
Aluminum High Vacuum Angle Valve, XLDV Series, Air-Operated Type With Solenoid Valve
SMC
A high vacuum angle (L-shaped) valve for preventing pumps from running when overloaded.
[Features]
· Initial exhaust valve and main exhaust valve are integrated (two-step flow rate control valve).
· Allows for compact system designs and reduced piping.
· Prevents dust turbulence inside the chamber when exhausting.
· Adjustable flow rate for initial exhaust valve.
· Air-operated type with solenoid valve.
· Its low outgassing enables use with a smaller pump capacity and helps reduce exhaust time.
· Does not contain heavy metals such as Ni (nickel) or Cr (chrome).
· Low sputtering yield minimizes heavy metal contamination of wafers.Days to Ship: 23 Day(s) or more -
Aluminum High Vacuum Angle Valve XLS Series (Electromagnetic Type, Bellows Pressure Balance)
SMC
A high vacuum angle valve that requires no air to drive, enabling use in portable equipment.
[Features]
· Uses no sliding metal parts, minimizing particulate matter.
· The pressure balance mechanism allows an unrestricted exhaust direction.
· A control power supply circuit for solenoid valve drive is now standard.
· Its low outgassing enables use with a smaller pump capacity and helps reduce exhaust time.
· Does not contain heavy metals such as Ni (nickel) or Cr (chrome).
· Low sputtering yield minimizes heavy metal contamination of wafers.Standard Price: MYR 1,953.90- Days to Ship: 5 Day(s) or more -
Aluminum High Vacuum Angle Valves, Normally Closed, Bellows Seal, XLAV Series
SMC
A vacuum regulator with little heavy metal contamination.
[Features]
· Aluminum body.
· Replaceable bellows.
· Uniform baking temperature.
· Lightweight and compact.
· Low outgassing.Standard Price: MYR 2,253.84- Days to Ship: 23 Day(s) or more -
SMC
[Features]
· Aluminum body
· Uniform baking temperature
· Lightweight and compact
· Low outgassing
· Little heavy metal contamination
· Resistant to fluorine corrosion
· Replaceable bellows (bellows-seal type)Standard Price: MYR 2,214.40- Days to Ship: 3 Day(s) or more
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| Plumbing Thread Nominal |
| Connecting Tube Diameter |
| Flange Type |
| Flange Nominal |
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| Brand | SMC | SMC | SMC | SMC | SMC | SMC |
| Product Series | Aluminum High Vacuum Angle Valves, Normally Closed, Bellows Seal, XLA Series | Normally Closed Type High Vacuum Solenoid Valve XSA Series (XSA1/XSA2/XSA3) | Aluminum High Vacuum Angle Valve, XLDV Series, Air-Operated Type With Solenoid Valve | Aluminum High Vacuum Angle Valve XLS Series (Electromagnetic Type, Bellows Pressure Balance) | Aluminum High Vacuum Angle Valves, Normally Closed, Bellows Seal, XLAV Series | |
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| Days to Ship | 3 Day(s) or more | 3 Day(s) or more | 23 Day(s) or more | 5 Day(s) or more | 23 Day(s) or more | 3 Day(s) or more |
| Type | Air-Actuated Vacuum Valve | High Vacuum Solenoid | High Vacuum Solenoid | Solenoid Valve | High Vacuum Solenoid | High Vacuum Solenoid |
| Application | Single Use | Single Use | Single Use | Single Use | Single Use | Single Use |
| Mounting Orientation | Direct | Direct | Direct | Direct | Direct | Direct |
| Number of Ports | 3-Port Valve | 2-Port Valve | 2-Port Valve | 2-Port Valve | 3-Port Valve | 2-Port Valve |
| Solenoid Type | Single | Single | Single | Single | Single | Single |
| Switching Type | 2-Position Normally Closed | 2-Position Normally Closed | 2-Position Normally Closed | 2-Position Normally Closed | 2-Position Normally Closed | 2-Position Normally Closed |
| Driving Type | - | Directly Operated | Directly Operated | Directly Operated | Air Pilot | Directly Operated |
| Effective Sectional Area(mm2) | - | - | - | - | - | - |
| Pipe Port Type | Flange | Rc / NPT / Face Seal Fitting / Compression Fitting | Flange | Flange | Flange | Flange |
| Plumbing Thread Nominal | - | 1/8 / 1/4 / 3/8 | - | - | - | - |
| Connecting Tube Diameter | - | - | - | - | - | - |
| Flange Type | NW / Others | - | KF / K | KF | NW / Others | KF / K |
| Flange Nominal | 16 / 25 / 40 / 50 / 63 / 80 | - | 25 / 40 / 50 / 63 / 80 | 16 / 25 | 16 / 25 / 40 / 50 / 63 / 80 | 16 / 25 / 40 / 50 / 63 / 80 |
| CV Value | - | - | - | - | - | - |
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Specification/Dimensions
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Type
- Solenoid Valve
- High Vacuum Solenoid
- Manual Vacuum Valve
- Mechanically-Operated Vacuum Valve
- Pilot Vacuum Valve
- Air-Actuated Vacuum Valve
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Application
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Mounting Orientation
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Solenoid Type
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Switching Type
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Driving Type
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Effective Sectional Area(mm2)
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Pipe Port Type
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Plumbing Thread Nominal
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Connecting Tube Diameter
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Flange Type
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Flange Nominal
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CV Value
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