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SMC Vacuum Valves（Type：Air-Actuated Vacuum Valve）
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Vacuum Assist Valve ZP2V Series
SMC
A vacuum valve which inhibits drops in vacuum pressure, even when no workpiece is present.
[Features]
· Keeps hold of workpieces when multiple vacuum pads are used by a single vacuum generator.
· Protects against drops in vacuum pressure, even when some pads are not suctioning.
· Single-action fitting models now also available.
· No need for switching the operation when changing out workpieces.
· Allows the simplification of control circuits when workpieces have different shapes.
· Fixed orifice size: 0.3 mm, 0.5 mm, 0.7 mm, 1 mm.Days to Ship: 3 Day(s) or more -
Aluminum High Vacuum Angle Valves, Normally Closed, Bellows Seal, XLA Series
SMC
Vacuum regulator with low outgassing.
[Features]
· Aluminum body.
· Replaceable bellows.
· Uniform baking temperature.
· Lightweight and compact.
· Little heavy metal contamination.Days to Ship: 3 Day(s) or more -
SMC
A vacuum valve with a pressure balanced structure.
[Features]
· Body material: SCS13 (SUS304 equivalent). Made of stainless steel.
· Precision-cast single-piece structure which helps prevent gas accumulation.
· Interchangeable with XL Series aluminum high-vacuum angle valves.
· Bellows type is particulate-free and cleaned.Days to Ship: 3 Day(s) or more -
SMC
A high vacuum angle (L-shaped) valve for preventing pumps from running when overloaded.
[Features]
· Initial exhaust valve and main exhaust valve are integrated (two-step flow rate control valve)
・ Achieves system compactness and piping savings
・ Prevents dust from rolling up in the chamber when exhausting
・ Adjustable initial exhaust valve flow rate
・ Air operated type / with solenoid valve
・ Since there is little outgas, the pump capacity can be small and the exhaust time can be shortened
・ It does not contain heavy metals such as Ni (nickel) and Cr (chromium), and the sputtering rate is low, so there is little heavy metal contamination on the wafer
・ Strong against fluorine
· Uniform baking temperature. Good thermal conductivity, uniform temperature throughout the body, drastically reducing product adhesion
· Lightweight and compactDays to Ship: 3 Day(s) or more
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| Type |
| Application |
| Mounting Orientation |
| Number of Ports |
| Solenoid Type |
| Switching Type |
| Driving Type |
| Effective Sectional Area(mm2) |
| Pipe Port Type |
| Plumbing Thread Nominal |
| Connecting Tube Diameter |
| Flange Type |
| Flange Nominal |
| CV Value |
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| Brand | SMC | SMC | SMC | SMC |
| Product Series | Aluminum High Vacuum Angle Valves, Normally Closed, Bellows Seal, XLA Series | |||
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| Days to Ship | 3 Day(s) or more | 3 Day(s) or more | 3 Day(s) or more | 3 Day(s) or more |
| Type | Air-Actuated Vacuum Valve | Air-Actuated Vacuum Valve | Air-Actuated Vacuum Valve | Air-Actuated Vacuum Valve |
| Application | Single Use | Single Use | Single Use | Single Use |
| Mounting Orientation | Direct | Direct | Direct | Direct |
| Number of Ports | 2-Port Valve | 3-Port Valve | 2-Port Valve | 2-Port Valve |
| Solenoid Type | - | Single | - | - |
| Switching Type | 2-Position Normally Closed | 2-Position Normally Closed | 2-Position Normally Closed | 2-Position Normally Closed |
| Driving Type | - | - | - | - |
| Effective Sectional Area(mm2) | 0.07 ～ 0.78 | - | - | - |
| Pipe Port Type | M / Rc / NPT / One-Touch Plumbing | Flange | Flange | Flange |
| Plumbing Thread Nominal | M5 / 1/8 / M6 / M8 | - | - | - |
| Connecting Tube Diameter | Ø4 / Ø6 | - | - | - |
| Flange Type | - | NW / Others | NW / Others | KF / K |
| Flange Nominal | - | 16 / 25 / 40 / 50 / 63 / 80 | 16 / 25 / 40 / 50 / 63 / 80 | 25 / 40 / 50 / 63 / 80 |
| CV Value | 0.0037940379 ～ 0.0422764228 | - | - | - |
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Specification/Dimensions
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Type
- Solenoid Valve
- High Vacuum Solenoid
- Manual Vacuum Valve
- Mechanically-Operated Vacuum Valve
- Pilot Vacuum Valve
- Air-Actuated Vacuum Valve
- Related Components
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Application
- Single Use
- Multi-Port
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Mounting Orientation
- Direct
- Manifold Base
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Number of Ports
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Solenoid Type
- Single
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Switching Type
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Driving Type
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Effective Sectional Area(mm2)
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Pipe Port Type
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Plumbing Thread Nominal
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Connecting Tube Diameter
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Flange Type
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Flange Nominal
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CV Value
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