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SMC Vacuum Valves（Type：Manual Vacuum Valve）
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Aluminum High Vacuum Angle Valve, Manual Type, Bellows Seal, XLH Series
SMC
A high vacuum angle valve with a pressure-balanced structure that enables an unrestricted exhaust direction.
[Features]
· Bellows type is particulate-free and cleaned.
· Low actuation torque (0.5 N·m or less).
· Spring provides a standard sealing load.
· Handle height remains the same regardless of whether valve is open or closed.
· Equipped as standard with an indicator for confirming if the valve is open or closed.
· Its low outgassing enables use with a smaller pump capacity and helps reduce exhaust time.
· Does not contain heavy metals such as Ni (nickel) or Cr (chrome).
· Low sputtering yield minimizes heavy metal contamination of wafers.Days to Ship: 5 Day(s) or more -
Stainless Steel High Vacuum Angle Valves / In-Line Valves, XMH/XYH Series (Manual/Bellows Seal)
SMC
A vacuum valve with a pressure-balanced structure that enables an unrestricted exhaust direction.
[Features]
· Bellows type is particulate-free and cleaned.
· Low actuation torque (0.5 N·m or less).
· Spring provides a standard sealing load.
· Handle height remains the same regardless of whether valve is open or closed.
· Equipped as standard with an indicator for confirming if the valve is open or closed.
· Body material: SCS13 (SUS304 equivalent).
· Precision-cast single-piece structure which helps prevent gas accumulation.
· The XM Series is interchangeable with XL Series aluminum high vacuum angle valves.Days to Ship: 5 Day(s) or more -
Smooth Vent Valve (Supply Line) XVD2-02S, XVD2-02V
SMC
A smooth vent valve with an adjustable flow rate for both the initial and main air supplies.
[Features]
· An integrated valve and needle valve structure that requires on 1/4 the piping space of previous models.
· Uses a metal diaphragm for the seat section, greatly reducing the generation of particulate matter.
· Valve type: Normally closed (pressurize to open, spring seal).
Fluids: Nitrogen, air, inert gas.
· Operating temperature: 5 to 60°C (baking temperature, 150°C or less).
· Weight: 0.5 kg.Standard Price: MYR 4,642.31- Days to Ship: 10 Day(s) or more
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| Number of Ports |
| Solenoid Type |
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| Connecting Tube Diameter |
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| Brand | SMC | SMC | SMC |
| Product Series | Aluminum High Vacuum Angle Valve, Manual Type, Bellows Seal, XLH Series | Stainless Steel High Vacuum Angle Valves / In-Line Valves, XMH/XYH Series (Manual/Bellows Seal) | |
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| Days to Ship | 5 Day(s) or more | 5 Day(s) or more | 10 Day(s) or more |
| Type | Manual Vacuum Valve | Manual Vacuum Valve | Manual Vacuum Valve |
| Application | Single Use | Single Use | Single Use |
| Mounting Orientation | Direct | Direct | Direct |
| Number of Ports | 2-Port Valve | 2-Port Valve | 2-Port Valve |
| Solenoid Type | - | - | - |
| Switching Type | 2-Position Normally Closed | 2-Position Normally Closed | 2-Position Normally Closed |
| Driving Type | - | - | - |
| Effective Sectional Area(mm2) | - | - | 4.6 |
| Pipe Port Type | Flange | Flange | Swaged Sleeve Fittings |
| Plumbing Thread Nominal | - | - | 1/4 |
| Connecting Tube Diameter | - | - | - |
| Flange Type | KF | KF / CF | - |
| Flange Nominal | 16 / 25 / 40 / 50 | 16 / 25 / 40 / 50 | - |
| CV Value | - | - | 84.87 |
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