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SMC Vacuum Valves（Pipe Port Type：Flange）
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Aluminum High Vacuum Angle Valves, Normally Closed, Bellows Seal, XLA Series
SMC
Vacuum regulator with low outgassing.
[Features]
· Aluminum body.
· Replaceable bellows.
· Uniform baking temperature.
· Lightweight and compact.
· Little heavy metal contamination.Days to Ship: 3 Day(s) or more -
Aluminum High Vacuum Angle Valve, XLDV Series, Air-Operated Type With Solenoid Valve
SMC
A high vacuum angle (L-shaped) valve for preventing pumps from running when overloaded.
[Features]
· Initial exhaust valve and main exhaust valve are integrated (two-step flow rate control valve).
· Allows for compact system designs and reduced piping.
· Prevents dust turbulence inside the chamber when exhausting.
· Adjustable flow rate for initial exhaust valve.
· Air-operated type with solenoid valve.
· Its low outgassing enables use with a smaller pump capacity and helps reduce exhaust time.
· Does not contain heavy metals such as Ni (nickel) or Cr (chrome).
· Low sputtering yield minimizes heavy metal contamination of wafers.Days to Ship: 23 Day(s) or more -
Aluminum High Vacuum Angle Valve, Manual Type, Bellows Seal, XLH Series
SMC
A high vacuum angle valve with a pressure-balanced structure that enables an unrestricted exhaust direction.
[Features]
· Bellows type is particulate-free and cleaned.
· Low actuation torque (0.5 N·m or less).
· Spring provides a standard sealing load.
· Handle height remains the same regardless of whether valve is open or closed.
· Equipped as standard with an indicator for confirming if the valve is open or closed.
· Its low outgassing enables use with a smaller pump capacity and helps reduce exhaust time.
· Does not contain heavy metals such as Ni (nickel) or Cr (chrome).
· Low sputtering yield minimizes heavy metal contamination of wafers.Days to Ship: 5 Day(s) or more -
Aluminum High Vacuum Angle Valve XLS Series (Electromagnetic Type, Bellows Pressure Balance)
SMC
A high vacuum angle valve that requires no air to drive, enabling use in portable equipment.
[Features]
· Uses no sliding metal parts, minimizing particulate matter.
· The pressure balance mechanism allows an unrestricted exhaust direction.
· A control power supply circuit for solenoid valve drive is now standard.
· Its low outgassing enables use with a smaller pump capacity and helps reduce exhaust time.
· Does not contain heavy metals such as Ni (nickel) or Cr (chrome).
· Low sputtering yield minimizes heavy metal contamination of wafers.Standard Price: MYR 1,953.90- Days to Ship: 5 Day(s) or more -
SMC
Vacuum valve with precision-cast single-piece structure which helps prevent gas accumulation.
[Features]
· Bellows type is particulate-free and cleaned.
· Pressure balanced structure.
· Body material: SCS13 (SUS304 equivalent).
· The XM Series is interchangeable with XL Series aluminum high vacuum angle valves.Days to Ship: 3 Day(s) or more -
SMC
A vacuum valve with a pressure balanced structure.
[Features]
· Body material: SCS13 (SUS304 equivalent). Made of stainless steel.
· Precision-cast single-piece structure which helps prevent gas accumulation.
· Interchangeable with XL Series aluminum high-vacuum angle valves.
· Bellows type is particulate-free and cleaned.Days to Ship: 3 Day(s) or more -
Aluminum High Vacuum Angle Valves, Normally Closed, O-Ring Seal, XLF Series
SMC
[Features]
· Aluminum body
· Uniform baking temperature
· Lightweight and compact
· Low outgassing
· Little heavy metal contamination
· Resistant to fluorine corrosion
· Replaceable bellows (bellows-seal type)Days to Ship: 3 Day(s) or more -
SMC
A high vacuum angle (L-shaped) valve for preventing pumps from running when overloaded.
[Features]
· Initial exhaust valve and main exhaust valve are integrated (two-step flow rate control valve)
・ Achieves system compactness and piping savings
・ Prevents dust from rolling up in the chamber when exhausting
・ Adjustable initial exhaust valve flow rate
・ Air operated type / with solenoid valve
・ Since there is little outgas, the pump capacity can be small and the exhaust time can be shortened
・ It does not contain heavy metals such as Ni (nickel) and Cr (chromium), and the sputtering rate is low, so there is little heavy metal contamination on the wafer
・ Strong against fluorine
· Uniform baking temperature. Good thermal conductivity, uniform temperature throughout the body, drastically reducing product adhesion
· Lightweight and compactDays to Ship: 3 Day(s) or more -
SMC
A vacuum valve for preventing pumps from running when overloaded.
[Features]
· Initial exhaust valve and main exhaust valve are integrated (two-step flow rate control valve)
· Allows for compact system designs and reduced piping.
· Prevents dust turbulence inside the chamber when exhausting.
· Adjustable flow rate for initial exhaust valve.
· Body material: SCS13 (SUS304 equivalent).
· Precision-cast single-piece structure which helps prevent gas accumulation.
· The XM Series is interchangeable with XL Series aluminum high vacuum angle valves.Days to Ship: 10 Day(s) or more -
Aluminum High Vacuum Angle Valves, Normally Closed, Bellows Seal, XLAV Series
SMC
A vacuum regulator with little heavy metal contamination.
[Features]
· Aluminum body.
· Replaceable bellows.
· Uniform baking temperature.
· Lightweight and compact.
· Low outgassing.Standard Price: MYR 2,253.84- Days to Ship: 23 Day(s) or more -
Aluminum High Vacuum Angle Valve, Double Acting / Bellows Seal, XLC Series
SMC
[Features]
· Aluminum body
· Uniform baking temperature
· Lightweight and compact
· Low outgassing
· Little heavy metal contamination
· Resistant to fluorine corrosion
· Replaceable bellows (bellows-seal type)Days to Ship: 3 Day(s) or more -
SMC
[Features]
· Aluminum body
· Uniform baking temperature
· Lightweight and compact
· Low outgassing
· Little heavy metal contamination
· Resistant to fluorine corrosion
· Replaceable bellows (bellows-seal type)Standard Price: MYR 2,214.40- Days to Ship: 3 Day(s) or more -
Aluminum High Vacuum Angle Valves, Double Acting, O-Ring Seal, XLG Series
SMC
[Features]
· Aluminum body
· Uniform baking temperature
· Lightweight and compact
· Low outgassing
· Little heavy metal contamination
· Resistant to fluorine corrosion
· Replaceable bellows (bellows-seal type)Days to Ship: 10 Day(s) or more -
Stainless Steel High Vacuum Angle Valves / In-Line Valves, XMH/XYH Series (Manual/Bellows Seal)
SMC
A vacuum valve with a pressure-balanced structure that enables an unrestricted exhaust direction.
[Features]
· Bellows type is particulate-free and cleaned.
· Low actuation torque (0.5 N·m or less).
· Spring provides a standard sealing load.
· Handle height remains the same regardless of whether valve is open or closed.
· Equipped as standard with an indicator for confirming if the valve is open or closed.
· Body material: SCS13 (SUS304 equivalent).
· Precision-cast single-piece structure which helps prevent gas accumulation.
· The XM Series is interchangeable with XL Series aluminum high vacuum angle valves.Days to Ship: 5 Day(s) or more
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| CAD |
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| Type |
| Application |
| Mounting Orientation |
| Number of Ports |
| Solenoid Type |
| Switching Type |
| Driving Type |
| Effective Sectional Area(mm2) |
| Pipe Port Type |
| Plumbing Thread Nominal |
| Connecting Tube Diameter |
| Flange Type |
| Flange Nominal |
| CV Value |
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| Brand | SMC | SMC | SMC | SMC | SMC | SMC | SMC | SMC | SMC | SMC | SMC | SMC | SMC | SMC |
| Product Series | Aluminum High Vacuum Angle Valves, Normally Closed, Bellows Seal, XLA Series | Aluminum High Vacuum Angle Valve, XLDV Series, Air-Operated Type With Solenoid Valve | Aluminum High Vacuum Angle Valve, Manual Type, Bellows Seal, XLH Series | Aluminum High Vacuum Angle Valve XLS Series (Electromagnetic Type, Bellows Pressure Balance) | Aluminum High Vacuum Angle Valves, Normally Closed, O-Ring Seal, XLF Series | Aluminum High Vacuum Angle Valves, Normally Closed, Bellows Seal, XLAV Series | Aluminum High Vacuum Angle Valve, Double Acting / Bellows Seal, XLC Series | Aluminum High Vacuum Angle Valves, Double Acting, O-Ring Seal, XLG Series | Stainless Steel High Vacuum Angle Valves / In-Line Valves, XMH/XYH Series (Manual/Bellows Seal) | |||||
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| Days to Ship | 3 Day(s) or more | 23 Day(s) or more | 5 Day(s) or more | 5 Day(s) or more | 3 Day(s) or more | 3 Day(s) or more | 3 Day(s) or more | 3 Day(s) or more | 10 Day(s) or more | 23 Day(s) or more | 3 Day(s) or more | 3 Day(s) or more | 10 Day(s) or more | 5 Day(s) or more |
| Type | Air-Actuated Vacuum Valve | High Vacuum Solenoid | Manual Vacuum Valve | Solenoid Valve | Pilot Vacuum Valve | Air-Actuated Vacuum Valve | Pilot Vacuum Valve | Air-Actuated Vacuum Valve | Pilot Vacuum Valve | High Vacuum Solenoid | Pilot Vacuum Valve | High Vacuum Solenoid | Pilot Vacuum Valve | Manual Vacuum Valve |
| Application | Single Use | Single Use | Single Use | Single Use | Single Use | Single Use | Single Use | Single Use | Single Use | Single Use | Single Use | Single Use | Single Use | Single Use |
| Mounting Orientation | Direct | Direct | Direct | Direct | Direct | Direct | Direct | Direct | Direct | Direct | Direct | Direct | Direct | Direct |
| Number of Ports | 3-Port Valve | 2-Port Valve | 2-Port Valve | 2-Port Valve | 2-Port Valve | 2-Port Valve | 2-Port Valve | 2-Port Valve | 2-Port Valve | 3-Port Valve | 2-Port Valve | 2-Port Valve | 2-Port Valve | 2-Port Valve |
| Solenoid Type | Single | Single | - | Single | - | - | - | - | - | Single | - | Single | - | - |
| Switching Type | 2-Position Normally Closed | 2-Position Normally Closed | 2-Position Normally Closed | 2-Position Normally Closed | 2-Position Normally Closed | 2-Position Normally Closed | 2-Position Normally Closed | 2-Position Normally Closed | 2-Position Normally Closed | 2-Position Normally Closed | 2-Position Normally Closed | 2-Position Normally Closed | 2-Position Normally Closed | 2-Position Normally Closed |
| Driving Type | - | Directly Operated | - | Directly Operated | - | - | - | - | - | Air Pilot | - | Directly Operated | - | - |
| Effective Sectional Area(mm2) | - | - | - | - | - | - | - | - | - | - | - | - | - | - |
| Pipe Port Type | Flange | Flange | Flange | Flange | Flange | Flange | Flange | Flange | Flange | Flange | Flange | Flange | Flange | Flange |
| Plumbing Thread Nominal | - | - | - | - | - | - | - | - | - | - | - | - | - | - |
| Connecting Tube Diameter | - | - | - | - | - | - | - | - | - | - | - | - | - | - |
| Flange Type | NW / Others | KF / K | KF | KF | KF / K / CF / Others | NW / Others | KF / K | KF / K | KF / K / CF | NW / Others | KF / K | KF / K | KF / K | KF / CF |
| Flange Nominal | 16 / 25 / 40 / 50 / 63 / 80 | 25 / 40 / 50 / 63 / 80 | 16 / 25 / 40 / 50 | 16 / 25 | 16 / 25 / 40 / 50 / 63 / 80 | 16 / 25 / 40 / 50 / 63 / 80 | 16 / 25 / 40 / 50 / 63 / 80 | 25 / 40 / 50 / 63 / 80 | 25 / 40 / 50 / 63 / 80 | 16 / 25 / 40 / 50 / 63 / 80 | 16 / 25 / 40 / 50 / 63 / 80 | 16 / 25 / 40 / 50 / 63 / 80 | 16 / 25 / 40 / 50 / 63 / 80 | 16 / 25 / 40 / 50 |
| CV Value | - | - | - | - | - | - | - | - | - | - | - | - | - | - |
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Configure
Specification/Dimensions
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Type
- Solenoid Valve
- High Vacuum Solenoid
- Manual Vacuum Valve
- Mechanically-Operated Vacuum Valve
- Pilot Vacuum Valve
- Air-Actuated Vacuum Valve
- Related Components
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Application
- Single Use
- Multi-Port
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Mounting Orientation
- Direct
- Manifold Base
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Number of Ports
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Solenoid Type
- Single
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Switching Type
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Driving Type
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Effective Sectional Area(mm2)
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Pipe Port Type
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Plumbing Thread Nominal
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Connecting Tube Diameter
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Flange Type
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Flange Nominal
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CV Value
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