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Vacuum Pad, Standard Small Type, VPMB, One-touch Fitting Type

Small vacuum pad ideal for use in semiconductor manufacturing equipment, *CAD data currently being revised for this series. This will be available as soon as modifications are complete.

Part Number

Configured Part Number is shown.

Product Specifications
Part Numbers
Catalog

Dimensions

Standard table

Model code	Tube O.D. øD	Pad O.D. ød	B	L	Tube end C	E	Connection config. code
VPMB0.7RM[5]-180J	1.8	0.7	15	4	8.4	12	-T4
VPMB0.7RM[5]-4J[9]	4	0.7			10.9	15
VPMB1RM[5]-180J	1.8	1			8.4	12
VPMB1RM[5]-4J[9]	4	1			10.9	15
VPMB1.5RM[5]-180J	1.8	1.5			8.4	12
VPMB1.5RM[5]-4J[9]	4	1.5			10.9	15
VPMB2RM[5]-180J	1.8	2			8.4	12
VPMB2RM[5]-4J[9]	4	2			10.9	15
VPMB3RM[5]-180J	1.8	3			8.4	12
VPMB3RM[5]-4J[9]	4	3			10.9	15
VPMB4RM[5]-180J	1.8	4			8.4	12
VPMB4RM[5]-4J[9]	4	4			10.9	15
VPMB6R[5]-180J	1.8	6	19.5	7	8.4	12.5	-T8
VPMB6RM[5]-4J[9]	4	6	19.5	7	10.9	15.5
VPMB8R[5]-180J	1.8	8	18	5.5	8.4	12.5
VPMB8RM[5]-4J[9]	4	8	18	5.5	10.9	15.5
VPMB10R[5]-180J	1.8	10	27	8	8.4	13.7	-M4
VPMB10R[5]-4J[9]	4	10	27	8	10.9	17.5
VPMB15R(A)[5]-180J	1.8	15	28(29)	9(10)	8.4	13.7
VPMB15R(A)[5]-4J[9]	4	15	28(29)	9(10)	10.9	17.5
VPMB20R(A)[5]-180J	1.8	20	31.2(32.2)	10(11)	8.4	13.7	-M6
VPMB20R(A)[5]-4J[9]	4	20	31.2(32.2)	10(11)	10.9	17.5
VPMB25R(A)[5]-180J	1.8	25	32.2(33.2)	11(12)	8.4	13.7
VPMB25R(A)[5]-4J[9]	4	25	32.2(33.2)	11(12)	10.9	17.5
VPMB30R(A)[5]-180J	1.8	30	32.2(35.2)	11(14)	8.4	13.7
VPMB30R(A)[5]-4J[9]	4	30	32.2(35.2)	11(14)	10.9	17.5
VPMB40R(A)[5]-180J	1.8	40	35.2(38.7)	14(17.5)	8.4	13.7
VPMB40R(A)[5]-4J[9]	4	40	35.2(38.7)	14(17.5)	10.9	17.5
VPMB50R(A)[5]-180J	1.8	50	36.2(39.2)	15(18)	8.4	13.7
VPMB50R(A)[5]-4J[9]	4	50	36.2(39.2)	15(18)	10.9	17.5

Units: mm

*Value in ( ) is the dimension of a deep type pad.
*[5]: Replaced with Pad rubber material code. Refer to the catalog for details.
*[9]: Replaced with "-S3" for -S3 spec. (Copper alloy free material for metal parts and FKM or HNBR for sealing parts).
*Pad material N, NE, and G are not suitable for use under ozone environment.

: 30; 45; 60

Part Number
VPMB0.7RMF-3J
VPMB0.7RMF-180J
VPMB1RMF-3J
VPMB1RMF-180J
VPMB1.5RMF-3J
VPMB1.5RMF-180J
VPMB2RMF-3J
VPMB2RMF-180J
VPMB3RMF-3J
VPMB3RMF-180J
VPMB4RMF-3J
VPMB4RMF-180J
VPMB6RF-3J
VPMB6RF-180J
VPMB8RF-3J
VPMB8RF-180J
VPMB10RF-3J
VPMB10RF-4J
VPMB10RF-4J-S3
VPMB15AF-3J
VPMB15AF-4J
VPMB15RF-3J
VPMB15RF-4J
VPMB20AF-4J
VPMB20RF-4J
VPMB25AF-4J
VPMB25RF-4J
VPMB30AF-4J
VPMB30RF-4J

Standard Unit Price	Minimum order quantity	Days to Ship	RoHS	Pad Shape	Mounting Method	Rubber Type Material	Usage Environment	Color	Outer Diameter d (φ)	Height L1 (mm)	Full length B (mm)	Mount Connection Screw	Vacuum Outlet Tube Outer Diameter (φ)	Metal parts material
MYR 78.40	1 Piece(s)	9 Day(s) or more	-	Small	Recessed Type	Fluorine Rubber	Standard	Gray	0.7	4	15	M3 × 0.5	3	Standard Specifications
MYR 78.40	1 Piece(s)	9 Day(s) or more	-	Small	Recessed Type	Fluorine Rubber	Standard	Gray	0.7	4	15	M3 × 0.5	1.8	Standard Specifications
MYR 78.40	1 Piece(s)	9 Day(s) or more	-	Small	Recessed Type	Fluorine Rubber	Standard	Gray	1	4	15	M3 × 0.5	3	Standard Specifications
MYR 78.40	1 Piece(s)	9 Day(s) or more	-	Small	Recessed Type	Fluorine Rubber	Standard	Gray	1	4	15	M3 × 0.5	1.8	Standard Specifications
MYR 78.40	1 Piece(s)	9 Day(s) or more	-	Small	Recessed Type	Fluorine Rubber	Standard	Gray	1.5	4	15	M3 × 0.5	3	Standard Specifications
MYR 78.40	1 Piece(s)	9 Day(s) or more	-	Small	Recessed Type	Fluorine Rubber	Standard	Gray	1.5	4	15	M3 × 0.5	1.8	Standard Specifications
MYR 78.40	1 Piece(s)	9 Day(s) or more	-	Small	Recessed Type	Fluorine Rubber	Standard	Gray	2	4	15	M3 × 0.5	3	Standard Specifications
MYR 78.40	1 Piece(s)	9 Day(s) or more	-	Small	Recessed Type	Fluorine Rubber	Standard	Gray	2	4	15	M3 × 0.5	1.8	Standard Specifications
MYR 78.40	1 Piece(s)	9 Day(s) or more	-	Small	Recessed Type	Fluorine Rubber	Standard	Gray	3	4	15	M3 × 0.5	3	Standard Specifications
MYR 78.40	1 Piece(s)	9 Day(s) or more	-	Small	Recessed Type	Fluorine Rubber	Standard	Gray	3	4	15	M3 × 0.5	1.8	Standard Specifications
MYR 78.40	1 Piece(s)	9 Day(s) or more	-	Small	Recessed Type	Fluorine Rubber	Standard	Gray	4	4	15	M3 × 0.5	3	Standard Specifications
MYR 78.40	1 Piece(s)	9 Day(s) or more	-	Small	Recessed Type	Fluorine Rubber	Standard	Gray	4	4	15	M3 × 0.5	1.8	Standard Specifications
MYR 82.02	1 Piece(s)	9 Day(s) or more	-	Small	Recessed Type	Fluorine Rubber	Standard	Gray	6	7	19.5	M4 × 0.7	3	Standard Specifications
MYR 82.02	1 Piece(s)	9 Day(s) or more	-	Small	Recessed Type	Fluorine Rubber	Standard	Gray	6	7	19.5	M4 × 0.7	1.8	Standard Specifications
MYR 84.93	1 Piece(s)	9 Day(s) or more	-	Small	Recessed Type	Fluorine Rubber	Standard	Gray	8	5.5	18	M4 × 0.7	3	Standard Specifications
MYR 84.93	1 Piece(s)	9 Day(s) or more	-	Small	Recessed Type	Fluorine Rubber	Standard	Gray	8	5.5	18	M4 × 0.7	1.8	Standard Specifications
MYR 91.07	1 Piece(s)	9 Day(s) or more	-	Small	Pad Screw Fixed	Fluorine Rubber	Standard	Gray	10	8	27	M5 × 0.8	3	Standard Specifications
MYR 92.56	1 Piece(s)	9 Day(s) or more	-	Small	Pad Screw Fixed	Fluorine Rubber	Standard	Gray	10	8	27	M5 × 0.8	4	Standard Specifications
MYR 144.26	1 Piece(s)	10 Day(s) or more	-	Small	Pad Screw Fixed	Fluorine Rubber	Standard	Gray	10	8	27	M5 × 0.8	4	Copper-free specification
MYR 99.02	1 Piece(s)	9 Day(s) or more	-	Deep Type	Pad Screw Fixed	Fluorine Rubber	Standard	Gray	15	10	29	M5 × 0.8	3	Standard Specifications
MYR 100.51	1 Piece(s)	9 Day(s) or more	-	Deep Type	Pad Screw Fixed	Fluorine Rubber	Standard	Gray	15	10	29	M5 × 0.8	4	Standard Specifications
MYR 99.02	1 Piece(s)	9 Day(s) or more	-	Small	Pad Screw Fixed	Fluorine Rubber	Standard	Gray	15	9	28	M5 × 0.8	3	Standard Specifications
MYR 100.51	1 Piece(s)	9 Day(s) or more	-	Small	Pad Screw Fixed	Fluorine Rubber	Standard	Gray	15	9	28	M5 × 0.8	4	Standard Specifications
MYR 107.75	1 Piece(s)	9 Day(s) or more	-	Deep Type	Pad Screw Fixed	Fluorine Rubber	Standard	Gray	20	11	32.2	M5 × 0.8	4	Standard Specifications
MYR 107.75	1 Piece(s)	9 Day(s) or more	-	Small	Pad Screw Fixed	Fluorine Rubber	Standard	Gray	20	10	31.2	M5 × 0.8	4	Standard Specifications
MYR 107.75	1 Piece(s)	9 Day(s) or more	10	Deep Type	Pad Screw Fixed	Fluorine Rubber	Standard	Gray	25	12	33.2	M5 × 0.8	4	Standard Specifications
MYR 107.75	1 Piece(s)	9 Day(s) or more	-	Small	Pad Screw Fixed	Fluorine Rubber	Standard	Gray	25	11	32.2	M5 × 0.8	4	Standard Specifications
MYR 107.75	1 Piece(s)	9 Day(s) or more	-	Deep Type	Pad Screw Fixed	Fluorine Rubber	Standard	Gray	30	14	35.2	M5 × 0.8	4	Standard Specifications
MYR 107.75	1 Piece(s)	9 Day(s) or more	-	Small	Pad Screw Fixed	Fluorine Rubber	Standard	Gray	30	11	32.2	M5 × 0.8	4	Standard Specifications

Basic Information

Pad Type	Standard / Holder Set	Material	Rubber-based	Mounting Fitting	Fixed Type
Vacuum Outlet Direction	Horizontal	Fall Prevention Valve	None	Direct Attached Filter	None

Configure

29 Part Numbers

View Part Numbers

Configure Remaining Specifications

Completed

Specification/Dimensions

Pad Shape
- Deep Type
- Small
Clear
Mounting Method
- Recessed Type
- Pad Screw Fixed
Clear
Usage Environment
- Standard
- Static electricity diffusion
Clear
Color
- Black
- Gray
- White
  - White
- Blue
Clear
Outer Diameter d(φ)
0.7

1

1.5

2

3

4

6

8

10

15

20

25

30
Clear
Height L1(mm)
4

5.5

7

8

9

10

11

12

14
Clear
Full length B(mm)
15

18

19.5

27

28

29

31.2

32.2

33.2

35.2
Clear
Mount Connection Screw
- M3 × 0.5
- M4 × 0.7
- M5 × 0.8
Clear
Vacuum Outlet Tube Outer Diameter(φ)
- 1.8
- 3
- 4
Clear
Metal parts material
- Copper-free specification
- Standard Specifications
Clear
type
- VPMB
Clear
Rubber Type Material
- Nitrile Rubber
  - Nitrile Rubber
- NBR which conforms to Food Sanitation Law
- Silicon Rubber
  - Silicone Rubber
  - Silicone Rubber +Carbon
- Urethane Rubber
- Fluorine Rubber
Clear
CAD
- 2D
- 3D
Clear

Days to Ship

All

9 Day(s) or Less

10 Day(s) or Less
Clear

Specify Alterations

The specifications and dimensions of some parts may not be fully covered. For exact details, refer to manufacturer catalogs .

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Vacuum Pad, Standard Small Type, VPMB, One-touch Fitting Type

Dimensions

Standard table

Basic Information

Configure

Specification/Dimensions

Pad Shape

Mounting Method

Usage Environment

Color

Outer Diameter d(φ)

Height L1(mm)

Full length B(mm)

Mount Connection Screw

Vacuum Outlet Tube Outer Diameter(φ)

Metal parts material

type

Rubber Type Material

CAD

Days to Ship

Specify Alterations

Additional Products in this Category

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