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Small vacuum pad ideal for use in semiconductor manufacturing equipment, *The CAD data for this series is being revised. This will be available as soon as modifications are complete.
Japanese Only
Part Number
Configured Part Number is shown.




| Model code | Tube I.D. øD | Pad O.D. ød | B | L | E | C | Connection config. code |
|---|---|---|---|---|---|---|---|
| VPMB0.7RM5-3B[9] | 2 | 0.7 | 15 | 4 | 10.9 | 6 | -T4 |
| VPMB0.7RM5-4B[9] | 2.5 | 11.9 | 7 | ||||
| VPMB0.7RM5-6B[9] | 4 | ||||||
| VPMB1RM5-3B[9] | 2 | 1 | 10.9 | 6 | |||
| VPMB1RM5-4B[9] | 2.5 | 11.9 | 7 | ||||
| VPMB1RM5-6B[9] | 4 | ||||||
| VPMB1.5RM5-3B[9] | 2 | 1.5 | 10.9 | 6 | |||
| VPMB1.5RM5-4B[9] | 2.5 | 11.9 | 7 | ||||
| VPMB1.5RM5-6B[9] | 4 | ||||||
| VPMB2RM5-3B[9] | 2 | 2 | 10.9 | 6 | |||
| VPMB2RM5-4B[9] | 2.5 | 11.9 | 7 | ||||
| VPMB2RM5-6B[9] | 4 | ||||||
| VPMB3RM5-3B[9] | 2 | 3 | 10.9 | 6 | |||
| VPMB3RM5-4B[9] | 2.5 | 11.9 | 7 | ||||
| VPMB3RM5-6B[9] | 4 | ||||||
| VPMB4RM5-3B[9] | 2 | 4 | 10.9 | 6 | |||
| VPMB4RM5-4B[9] | 2.5 | 11.9 | 7 | ||||
| VPMB4RM5-6B[9] | 4 | ||||||
| VPMB6R[5]-3B[9] | 2 | 6 | 19.5 | 7 | 11.4 | 6 | -T8 |
| VPMB6R[5]-4B[9] | 2.5 | 12.4 | 7 | ||||
| VPMB6R[5]-6B[9] | 4 | ||||||
| VPMB8R[5]-3B[9] | 2 | 8 | 18 | 5.5 | 11.4 | 6 | |
| VPMB8R[5]-4B[9] | 2.5 | 12.4 | 7 | ||||
| VPMB8R[5]-6B[9] | 4 | ||||||
| VPMB10R[5]-3B[9] | 2 | 10 | 27 | 8 | 13.4 | 6 | -M4 |
| VPMB10R[5]-4B[9] | 2.5 | 14.9 | 7 | ||||
| VPMB10R[5]-6B[9] | 4 | ||||||
| VPMB15R(A)[5]-3B[9] | 2 | 15 | 28(29) | 9(10) | 13.4 | 6 | |
| VPMB15R(A)[5]-4B[9] | 2.5 | 14.9 | 7 | ||||
| VPMB15R(A)[5]-6B[9] | 4 | ||||||
| VPMB20R(A)[5]-3B[9] | 2 | 20 | 31.2(32.2) | 10(11) | 13.4 | 6 | -M6 |
| VPMB20R(A)[5]-4B[9] | 2.5 | 14.9 | 7 | ||||
| VPMB20R(A)[5]-6B[9] | 4 | ||||||
| VPMB25R(A)[5]-3B[9] | 2 | 25 | 32.2(33.2) | 11(12) | 13.4 | 6 | |
| VPMB25R(A)[5]-4B[9] | 2.5 | 14.9 | 7 | ||||
| VPMB25R(A)[5]-6B[9] | 4 | ||||||
| VPMB30R(A)[5]-3B[9] | 2 | 30 | 32.2(35.2) | 11(14) | 13.4 | 6 | |
| VPMB30R(A)[5]-4B[9] | 2.5 | 14.9 | 7 | ||||
| VPMB30R(A)[5]-6B[9] | 4 | ||||||
| VPMB40R(A)[5]-3B[9] | 2 | 40 | 35.2(38.7) | 14(17.5) | 13.4 | 6 | |
| VPMB40R(A)[5]-4B[9] | 2.5 | 14.9 | 7 | ||||
| VPMB40R(A)[5]-6B[9] | 4 | ||||||
| VPMB50R(A)[5]-3B[9] | 2 | 50 | 36.2(39.2) | 15(18) | 13.4 | 6 | |
| VPMB50R(A)[5]-4B[9] | 2.5 | 14.9 | 7 | ||||
| VPMB50R(A)[5]-6B[9] | 4 |
Units: mm
*Value in ( ) is the dimension of a deep type pad.
*[5]: Replaced with Pad rubber material code. Refer to the catalog for details.
*[9]: Replaced with "-S3" for -S3 spec. (Copper alloy free material for metal parts and FKM or HNBR for sealing parts).
*Pad material N, NE, and G are not suitable for use under ozone environment.
| Part Number | Standard Unit Price | Minimum order quantity | Volume Discount | Days to Ship | RoHS | Pad Shape | Mounting Method | Rubber Type Material | Usage Environment | Color | Outer Diameter d (φ) | Height L1 (mm) | Full length B (mm) | Mount Connection Screw | Vacuum Outlet Tube Outer Diameter (φ) |
|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|
MYR 71.56 | 1 Piece(s) | 9 Day(s) or more | 10 | Small | Recessed Type | Fluorine Rubber | Standard | Gray | 0.7 | 4 | 15 | M3 × 0.5 | 3 | ||
MYR 71.56 | 1 Piece(s) | 9 Day(s) or more | 10 | Small | Recessed Type | Fluorine Rubber | Standard | Gray | 0.7 | 4 | 15 | M3 × 0.5 | 4 | ||
MYR 43.70 | 1 Piece(s) | 9 Day(s) or more | 10 | Small | Recessed Type | NBR which conforms to Food Sanitation Law | Standard | Gray | 0.7 | 4 | 15 | M3 × 0.5 | 3 | ||
MYR 43.70 | 1 Piece(s) | 9 Day(s) or more | 10 | Small | Recessed Type | NBR which conforms to Food Sanitation Law | Standard | Gray | 0.7 | 4 | 15 | M3 × 0.5 | 4 | ||
MYR 40.79 | 1 Piece(s) | 9 Day(s) or more | 10 | Small | Recessed Type | [Nitrile Rubber] Nitrile Rubber | Standard | Black | 0.7 | 4 | 15 | M3 × 0.5 | 3 | ||
MYR 40.79 | 1 Piece(s) | 9 Day(s) or more | 10 | Small | Recessed Type | [Nitrile Rubber] Nitrile Rubber | Standard | Black | 0.7 | 4 | 15 | M3 × 0.5 | 4 | ||
MYR 46.22 | 1 Piece(s) | 9 Day(s) or more | 10 | Small | Recessed Type | [Silicon Rubber] Silicone Rubber | Standard | [White] White | 0.7 | 4 | 15 | M3 × 0.5 | 3 | ||
MYR 46.22 | 1 Piece(s) | 9 Day(s) or more | 10 | Small | Recessed Type | [Silicon Rubber] Silicone Rubber | Standard | [White] White | 0.7 | 4 | 15 | M3 × 0.5 | 4 | ||
MYR 46.22 | 1 Piece(s) | 9 Day(s) or more | 10 | Small | Recessed Type | [Silicon Rubber] Silicone Rubber +Carbon | Standard / Static electricity diffusion | Black | 0.7 | 4 | 15 | M3 × 0.5 | 3 | ||
MYR 46.22 | 1 Piece(s) | 9 Day(s) or more | 10 | Small | Recessed Type | [Silicon Rubber] Silicone Rubber +Carbon | Standard / Static electricity diffusion | Black | 0.7 | 4 | 15 | M3 × 0.5 | 4 | ||
MYR 57.08 | 1 Piece(s) | 9 Day(s) or more | 10 | Small | Recessed Type | Urethane Rubber | Standard | Blue | 0.7 | 4 | 15 | M3 × 0.5 | 3 | ||
MYR 57.08 | 1 Piece(s) | 9 Day(s) or more | 10 | Small | Recessed Type | Urethane Rubber | Standard | Blue | 0.7 | 4 | 15 | M3 × 0.5 | 4 | ||
MYR 71.56 | 1 Piece(s) | 9 Day(s) or more | 10 | Small | Recessed Type | Fluorine Rubber | Standard | Gray | 1 | 4 | 15 | M3 × 0.5 | 3 | ||
MYR 71.56 | 1 Piece(s) | 9 Day(s) or more | 10 | Small | Recessed Type | Fluorine Rubber | Standard | Gray | 1 | 4 | 15 | M3 × 0.5 | 4 | ||
MYR 43.70 | 1 Piece(s) | 9 Day(s) or more | 10 | Small | Recessed Type | NBR which conforms to Food Sanitation Law | Standard | Gray | 1 | 4 | 15 | M3 × 0.5 | 3 | ||
MYR 43.70 | 1 Piece(s) | 9 Day(s) or more | 10 | Small | Recessed Type | NBR which conforms to Food Sanitation Law | Standard | Gray | 1 | 4 | 15 | M3 × 0.5 | 4 | ||
MYR 40.79 | 1 Piece(s) | 9 Day(s) or more | 10 | Small | Recessed Type | [Nitrile Rubber] Nitrile Rubber | Standard | Black | 1 | 4 | 15 | M3 × 0.5 | 3 | ||
MYR 40.79 | 1 Piece(s) | 9 Day(s) or more | 10 | Small | Recessed Type | [Nitrile Rubber] Nitrile Rubber | Standard | Black | 1 | 4 | 15 | M3 × 0.5 | 4 | ||
MYR 46.22 | 1 Piece(s) | 9 Day(s) or more | 10 | Small | Recessed Type | [Silicon Rubber] Silicone Rubber | Standard | [White] White | 1 | 4 | 15 | M3 × 0.5 | 3 | ||
MYR 46.22 | 1 Piece(s) | 9 Day(s) or more | 10 | Small | Recessed Type | [Silicon Rubber] Silicone Rubber | Standard | [White] White | 1 | 4 | 15 | M3 × 0.5 | 4 | ||
MYR 46.22 | 1 Piece(s) | 9 Day(s) or more | 10 | Small | Recessed Type | [Silicon Rubber] Silicone Rubber +Carbon | Standard / Static electricity diffusion | Black | 1 | 4 | 15 | M3 × 0.5 | 3 | ||
MYR 46.22 | 1 Piece(s) | 9 Day(s) or more | 10 | Small | Recessed Type | [Silicon Rubber] Silicone Rubber +Carbon | Standard / Static electricity diffusion | Black | 1 | 4 | 15 | M3 × 0.5 | 4 | ||
MYR 57.08 | 1 Piece(s) | 9 Day(s) or more | 10 | Small | Recessed Type | Urethane Rubber | Standard | Blue | 1 | 4 | 15 | M3 × 0.5 | 3 | ||
MYR 57.08 | 1 Piece(s) | 9 Day(s) or more | 10 | Small | Recessed Type | Urethane Rubber | Standard | Blue | 1 | 4 | 15 | M3 × 0.5 | 4 | ||
MYR 71.56 | 1 Piece(s) | 9 Day(s) or more | 10 | Small | Recessed Type | Fluorine Rubber | Standard | Gray | 1.5 | 4 | 15 | M3 × 0.5 | 3 | ||
MYR 71.56 | 1 Piece(s) | 9 Day(s) or more | 10 | Small | Recessed Type | Fluorine Rubber | Standard | Gray | 1.5 | 4 | 15 | M3 × 0.5 | 4 | ||
MYR 43.70 | 1 Piece(s) | 9 Day(s) or more | 10 | Small | Recessed Type | NBR which conforms to Food Sanitation Law | Standard | Gray | 1.5 | 4 | 15 | M3 × 0.5 | 3 | ||
MYR 43.70 | 1 Piece(s) | 9 Day(s) or more | 10 | Small | Recessed Type | NBR which conforms to Food Sanitation Law | Standard | Gray | 1.5 | 4 | 15 | M3 × 0.5 | 4 | ||
MYR 40.79 | 1 Piece(s) | 9 Day(s) or more | 10 | Small | Recessed Type | [Nitrile Rubber] Nitrile Rubber | Standard | Black | 1.5 | 4 | 15 | M3 × 0.5 | 3 | ||
MYR 40.79 | 1 Piece(s) | 9 Day(s) or more | 10 | Small | Recessed Type | [Nitrile Rubber] Nitrile Rubber | Standard | Black | 1.5 | 4 | 15 | M3 × 0.5 | 4 | ||
MYR 46.22 | 1 Piece(s) | 9 Day(s) or more | 10 | Small | Recessed Type | [Silicon Rubber] Silicone Rubber | Standard | [White] White | 1.5 | 4 | 15 | M3 × 0.5 | 3 | ||
MYR 46.22 | 1 Piece(s) | 9 Day(s) or more | 10 | Small | Recessed Type | [Silicon Rubber] Silicone Rubber | Standard | [White] White | 1.5 | 4 | 15 | M3 × 0.5 | 4 | ||
MYR 46.22 | 1 Piece(s) | 9 Day(s) or more | 10 | Small | Recessed Type | [Silicon Rubber] Silicone Rubber +Carbon | Standard / Static electricity diffusion | Black | 1.5 | 4 | 15 | M3 × 0.5 | 3 | ||
MYR 46.22 | 1 Piece(s) | 9 Day(s) or more | 10 | Small | Recessed Type | [Silicon Rubber] Silicone Rubber +Carbon | Standard / Static electricity diffusion | Black | 1.5 | 4 | 15 | M3 × 0.5 | 4 | ||
MYR 57.08 | 1 Piece(s) | 9 Day(s) or more | 10 | Small | Recessed Type | Urethane Rubber | Standard | Blue | 1.5 | 4 | 15 | M3 × 0.5 | 3 | ||
MYR 57.08 | 1 Piece(s) | 9 Day(s) or more | 10 | Small | Recessed Type | Urethane Rubber | Standard | Blue | 1.5 | 4 | 15 | M3 × 0.5 | 4 | ||
MYR 71.56 | 1 Piece(s) | 9 Day(s) or more | 10 | Small | Recessed Type | Fluorine Rubber | Standard | Gray | 2 | 4 | 15 | M3 × 0.5 | 3 | ||
MYR 71.56 | 1 Piece(s) | 9 Day(s) or more | 10 | Small | Recessed Type | Fluorine Rubber | Standard | Gray | 2 | 4 | 15 | M3 × 0.5 | 4 | ||
MYR 43.70 | 1 Piece(s) | 9 Day(s) or more | 10 | Small | Recessed Type | NBR which conforms to Food Sanitation Law | Standard | Gray | 2 | 4 | 15 | M3 × 0.5 | 3 | ||
MYR 43.70 | 1 Piece(s) | 9 Day(s) or more | 10 | Small | Recessed Type | NBR which conforms to Food Sanitation Law | Standard | Gray | 2 | 4 | 15 | M3 × 0.5 | 4 | ||
MYR 40.79 | 1 Piece(s) | 9 Day(s) or more | 10 | Small | Recessed Type | [Nitrile Rubber] Nitrile Rubber | Standard | Black | 2 | 4 | 15 | M3 × 0.5 | 3 | ||
MYR 40.79 | 1 Piece(s) | 9 Day(s) or more | 10 | Small | Recessed Type | [Nitrile Rubber] Nitrile Rubber | Standard | Black | 2 | 4 | 15 | M3 × 0.5 | 4 | ||
MYR 46.22 | 1 Piece(s) | 9 Day(s) or more | 10 | Small | Recessed Type | [Silicon Rubber] Silicone Rubber | Standard | [White] White | 2 | 4 | 15 | M3 × 0.5 | 3 | ||
MYR 46.22 | 1 Piece(s) | 9 Day(s) or more | 10 | Small | Recessed Type | [Silicon Rubber] Silicone Rubber | Standard | [White] White | 2 | 4 | 15 | M3 × 0.5 | 4 | ||
MYR 46.22 | 1 Piece(s) | 9 Day(s) or more | 10 | Small | Recessed Type | [Silicon Rubber] Silicone Rubber +Carbon | Standard / Static electricity diffusion | Black | 2 | 4 | 15 | M3 × 0.5 | 3 | ||
MYR 46.22 | 1 Piece(s) | 9 Day(s) or more | 10 | Small | Recessed Type | [Silicon Rubber] Silicone Rubber +Carbon | Standard / Static electricity diffusion | Black | 2 | 4 | 15 | M3 × 0.5 | 4 | ||
MYR 57.08 | 1 Piece(s) | 9 Day(s) or more | 10 | Small | Recessed Type | Urethane Rubber | Standard | Blue | 2 | 4 | 15 | M3 × 0.5 | 3 | ||
MYR 57.08 | 1 Piece(s) | 9 Day(s) or more | 10 | Small | Recessed Type | Urethane Rubber | Standard | Blue | 2 | 4 | 15 | M3 × 0.5 | 4 | ||
MYR 71.56 | 1 Piece(s) | 9 Day(s) or more | 10 | Small | Recessed Type | Fluorine Rubber | Standard | Gray | 3 | 4 | 15 | M3 × 0.5 | 3 | ||
MYR 71.56 | 1 Piece(s) | 9 Day(s) or more | 10 | Small | Recessed Type | Fluorine Rubber | Standard | Gray | 3 | 4 | 15 | M3 × 0.5 | 4 | ||
MYR 43.70 | 1 Piece(s) | 9 Day(s) or more | 10 | Small | Recessed Type | NBR which conforms to Food Sanitation Law | Standard | Gray | 3 | 4 | 15 | M3 × 0.5 | 3 | ||
MYR 43.70 | 1 Piece(s) | 9 Day(s) or more | 10 | Small | Recessed Type | NBR which conforms to Food Sanitation Law | Standard | Gray | 3 | 4 | 15 | M3 × 0.5 | 4 | ||
MYR 40.79 | 1 Piece(s) | 9 Day(s) or more | 10 | Small | Recessed Type | [Nitrile Rubber] Nitrile Rubber | Standard | Black | 3 | 4 | 15 | M3 × 0.5 | 3 | ||
MYR 40.79 | 1 Piece(s) | 9 Day(s) or more | 10 | Small | Recessed Type | [Nitrile Rubber] Nitrile Rubber | Standard | Black | 3 | 4 | 15 | M3 × 0.5 | 4 | ||
MYR 46.22 | 1 Piece(s) | 9 Day(s) or more | 10 | Small | Recessed Type | [Silicon Rubber] Silicone Rubber | Standard | [White] White | 3 | 4 | 15 | M3 × 0.5 | 3 | ||
MYR 46.22 | 1 Piece(s) | 9 Day(s) or more | 10 | Small | Recessed Type | [Silicon Rubber] Silicone Rubber | Standard | [White] White | 3 | 4 | 15 | M3 × 0.5 | 4 | ||
MYR 46.22 | 1 Piece(s) | 9 Day(s) or more | 10 | Small | Recessed Type | [Silicon Rubber] Silicone Rubber +Carbon | Standard / Static electricity diffusion | Black | 3 | 4 | 15 | M3 × 0.5 | 3 | ||
MYR 46.22 | 1 Piece(s) | 9 Day(s) or more | 10 | Small | Recessed Type | [Silicon Rubber] Silicone Rubber +Carbon | Standard / Static electricity diffusion | Black | 3 | 4 | 15 | M3 × 0.5 | 4 | ||
MYR 57.08 | 1 Piece(s) | 9 Day(s) or more | 10 | Small | Recessed Type | Urethane Rubber | Standard | Blue | 3 | 4 | 15 | M3 × 0.5 | 3 | ||
MYR 57.08 | 1 Piece(s) | 9 Day(s) or more | 10 | Small | Recessed Type | Urethane Rubber | Standard | Blue | 3 | 4 | 15 | M3 × 0.5 | 4 |
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| Pad Type | Standard / Holder Set | Material | Rubber-based | Mounting Fitting | Fixed Type |
|---|---|---|---|---|---|
| Vacuum Outlet Direction | Horizontal | Fall Prevention Valve | None | Direct Attached Filter | None |
| Metal parts material | Standard Specifications |


IDEC
Standard Price : MYR 29.44
Days to Ship : 5 Day(s) or more
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