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Z-axis type with high rigidity, compact width, and overall length that saves space.
Part Number
Configured Part Number is shown.

[ ! ]The drawing is for the L (left) Cover Positon Type.
| Part Number | - | Sensor | - | Motor | - | Cable |
| ZMSG413 | - | LA5 | - | C | - | N |
| Part Number | Sensor | Motor | Cable | Mechanical Standards | Accuracy Standards*3 | |||||||
| Type | No. | Cover Position | Logic | Voltage (V) | Stage Surface (mm) | Travel Distance (mm) | Weight*2 (kg) | Unidirectional Positioning Accuracy | Pitching | Yawing | ||
| ZMSG | 413 | L(Standard) R(Reversed) | A (All N.C.) B (All N.O.) C (Limit Switches are N.C; Home Sensor is N.O.) | 5 24 | C (Standard) D (High Torque) E (High Resolution) MA*1 (With Electromagnetic Brake) PA*1 (α- Step) UA*1 (Servo Motor) | N (Cable not included (separately sold)) M*1 (For Motor with Electromagnetic Brake) P*1 (For α- Step) U*1 (For Servo Motor) [ ! ]For combination of motors and cables, see the table below. | 40×40 | 13 | 0.58 | 6μm or less | 15'' or less | 10'' or less |
| 513 | 50×50 | 0.77 | ||||||||||
| 615 | 60×60 | 15 | 0.91 | |||||||||
| 715 | 70×70 | 1.12 | ||||||||||
CAD Data download and 3D preview are not available because the part number has not yet been determined.
| Part Number | Standard Unit Price | Minimum order quantity | Volume Discount | Days to Ship | RoHS | Motor, Motor Characteristics | Resolution (µm) | Table Length (mm) | Table Width (mm) | Stroke (Z Distance) (mm) | Maximum Velocity (mm/sec) | Moment Rigidity (Pitching) ("/N•cm) | Moment Rigidity (Yawing) ("/N•cm) | Moment Rigidity (Rolling) ("/N•cm) | Sensor | Cable |
|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|
MYR 4,901.58 | 1 Piece(s) | 8 Day(s) or more | 10 | 5-Phase Stepping Motor | 2µm | 40 | 40 | 13 | 10 | 0.22 | 0.17 | 0.12 | LA5 | No cable (sold separately) | ||
MYR 5,081.97 | 1 Piece(s) | 8 Day(s) or more | 10 | 5-Phase Stepping Motor - High Torque | 2µm | 40 | 40 | 13 | 15 | 0.22 | 0.17 | 0.12 | LA5 | No cable (sold separately) | ||
MYR 4,963.79 | 1 Piece(s) | 8 Day(s) or more | 10 | 5-Phase Stepping Motor - High Resolution | 1µm | 40 | 40 | 13 | 12.5 | 0.22 | 0.17 | 0.12 | LA5 | No cable (sold separately) | ||
MYR 4,901.58 | 1 Piece(s) | 8 Day(s) or more | 10 | 5-Phase Stepping Motor | 2µm | 40 | 40 | 13 | 10 | 0.22 | 0.17 | 0.12 | LA24 | No cable (sold separately) | ||
MYR 5,081.97 | 1 Piece(s) | 8 Day(s) or more | 10 | 5-Phase Stepping Motor - High Torque | 2µm | 40 | 40 | 13 | 15 | 0.22 | 0.17 | 0.12 | LA24 | No cable (sold separately) | ||
MYR 4,963.79 | 1 Piece(s) | 8 Day(s) or more | 10 | 5-Phase Stepping Motor - High Resolution | 1µm | 40 | 40 | 13 | 12.5 | 0.22 | 0.17 | 0.12 | LA24 | No cable (sold separately) | ||
MYR 4,901.58 | 1 Piece(s) | 8 Day(s) or more | 10 | 5-Phase Stepping Motor | 2µm | 40 | 40 | 13 | 10 | 0.22 | 0.17 | 0.12 | LB5 | No cable (sold separately) | ||
MYR 5,081.97 | 1 Piece(s) | 8 Day(s) or more | 10 | 5-Phase Stepping Motor - High Torque | 2µm | 40 | 40 | 13 | 15 | 0.22 | 0.17 | 0.12 | LB5 | No cable (sold separately) | ||
MYR 4,963.79 | 1 Piece(s) | 8 Day(s) or more | 10 | 5-Phase Stepping Motor - High Resolution | 1µm | 40 | 40 | 13 | 12.5 | 0.22 | 0.17 | 0.12 | LB5 | No cable (sold separately) | ||
MYR 4,901.58 | 1 Piece(s) | 8 Day(s) or more | 10 | 5-Phase Stepping Motor | 2µm | 40 | 40 | 13 | 10 | 0.22 | 0.17 | 0.12 | LB24 | No cable (sold separately) | ||
MYR 5,081.97 | 1 Piece(s) | 8 Day(s) or more | 10 | 5-Phase Stepping Motor - High Torque | 2µm | 40 | 40 | 13 | 15 | 0.22 | 0.17 | 0.12 | LB24 | No cable (sold separately) | ||
MYR 4,963.79 | 1 Piece(s) | 8 Day(s) or more | 10 | 5-Phase Stepping Motor - High Resolution | 1µm | 40 | 40 | 13 | 12.5 | 0.22 | 0.17 | 0.12 | LB24 | No cable (sold separately) | ||
MYR 4,901.58 | 1 Piece(s) | 8 Day(s) or more | 10 | 5-Phase Stepping Motor | 2µm | 40 | 40 | 13 | 10 | 0.22 | 0.17 | 0.12 | LC5 | No cable (sold separately) | ||
MYR 5,081.97 | 1 Piece(s) | 8 Day(s) or more | 10 | 5-Phase Stepping Motor - High Torque | 2µm | 40 | 40 | 13 | 15 | 0.22 | 0.17 | 0.12 | LC5 | No cable (sold separately) | ||
MYR 4,963.79 | 1 Piece(s) | 8 Day(s) or more | 10 | 5-Phase Stepping Motor - High Resolution | 1µm | 40 | 40 | 13 | 12.5 | 0.22 | 0.17 | 0.12 | LC5 | No cable (sold separately) | ||
MYR 4,901.58 | 1 Piece(s) | 8 Day(s) or more | 10 | 5-Phase Stepping Motor | 2µm | 40 | 40 | 13 | 10 | 0.22 | 0.17 | 0.12 | LC24 | No cable (sold separately) | ||
MYR 5,081.97 | 1 Piece(s) | 8 Day(s) or more | 10 | 5-Phase Stepping Motor - High Torque | 2µm | 40 | 40 | 13 | 15 | 0.22 | 0.17 | 0.12 | LC24 | No cable (sold separately) | ||
MYR 4,963.79 | 1 Piece(s) | 8 Day(s) or more | 10 | 5-Phase Stepping Motor - High Resolution | 1µm | 40 | 40 | 13 | 12.5 | 0.22 | 0.17 | 0.12 | LC24 | No cable (sold separately) | ||
MYR 4,901.58 | 1 Piece(s) | 8 Day(s) or more | 10 | 5-Phase Stepping Motor | 2µm | 40 | 40 | 13 | 10 | 0.22 | 0.17 | 0.12 | RA5 | No cable (sold separately) | ||
MYR 5,081.97 | 1 Piece(s) | 8 Day(s) or more | 10 | 5-Phase Stepping Motor - High Torque | 2µm | 40 | 40 | 13 | 15 | 0.22 | 0.17 | 0.12 | RA5 | No cable (sold separately) | ||
MYR 4,963.79 | 1 Piece(s) | 8 Day(s) or more | 10 | 5-Phase Stepping Motor - High Resolution | 1µm | 40 | 40 | 13 | 12.5 | 0.22 | 0.17 | 0.12 | RA5 | No cable (sold separately) | ||
MYR 4,901.58 | 1 Piece(s) | 8 Day(s) or more | 10 | 5-Phase Stepping Motor | 2µm | 40 | 40 | 13 | 10 | 0.22 | 0.17 | 0.12 | RA24 | No cable (sold separately) | ||
MYR 5,081.97 | 1 Piece(s) | 8 Day(s) or more | 10 | 5-Phase Stepping Motor - High Torque | 2µm | 40 | 40 | 13 | 15 | 0.22 | 0.17 | 0.12 | RA24 | No cable (sold separately) | ||
MYR 4,963.79 | 1 Piece(s) | 8 Day(s) or more | 10 | 5-Phase Stepping Motor - High Resolution | 1µm | 40 | 40 | 13 | 12.5 | 0.22 | 0.17 | 0.12 | RA24 | No cable (sold separately) | ||
MYR 4,901.58 | 1 Piece(s) | 8 Day(s) or more | 10 | 5-Phase Stepping Motor | 2µm | 40 | 40 | 13 | 10 | 0.22 | 0.17 | 0.12 | RB5 | No cable (sold separately) | ||
MYR 5,081.97 | 1 Piece(s) | 8 Day(s) or more | 10 | 5-Phase Stepping Motor - High Torque | 2µm | 40 | 40 | 13 | 15 | 0.22 | 0.17 | 0.12 | RB5 | No cable (sold separately) | ||
MYR 4,963.79 | 1 Piece(s) | 8 Day(s) or more | 10 | 5-Phase Stepping Motor - High Resolution | 1µm | 40 | 40 | 13 | 12.5 | 0.22 | 0.17 | 0.12 | RB5 | No cable (sold separately) | ||
MYR 4,901.58 | 1 Piece(s) | 8 Day(s) or more | 10 | 5-Phase Stepping Motor | 2µm | 40 | 40 | 13 | 10 | 0.22 | 0.17 | 0.12 | RB24 | No cable (sold separately) | ||
MYR 5,081.97 | 1 Piece(s) | 8 Day(s) or more | 10 | 5-Phase Stepping Motor - High Torque | 2µm | 40 | 40 | 13 | 15 | 0.22 | 0.17 | 0.12 | RB24 | No cable (sold separately) | ||
MYR 4,963.79 | 1 Piece(s) | 8 Day(s) or more | 10 | 5-Phase Stepping Motor - High Resolution | 1µm | 40 | 40 | 13 | 12.5 | 0.22 | 0.17 | 0.12 | RB24 | No cable (sold separately) | ||
MYR 4,901.58 | 1 Piece(s) | 8 Day(s) or more | 10 | 5-Phase Stepping Motor | 2µm | 40 | 40 | 13 | 10 | 0.22 | 0.17 | 0.12 | RC5 | No cable (sold separately) | ||
MYR 5,081.97 | 1 Piece(s) | 8 Day(s) or more | 10 | 5-Phase Stepping Motor - High Torque | 2µm | 40 | 40 | 13 | 15 | 0.22 | 0.17 | 0.12 | RC5 | No cable (sold separately) | ||
MYR 4,963.79 | 1 Piece(s) | 8 Day(s) or more | 10 | 5-Phase Stepping Motor - High Resolution | 1µm | 40 | 40 | 13 | 12.5 | 0.22 | 0.17 | 0.12 | RC5 | No cable (sold separately) | ||
MYR 4,901.58 | 1 Piece(s) | 8 Day(s) or more | 10 | 5-Phase Stepping Motor | 2µm | 40 | 40 | 13 | 10 | 0.22 | 0.17 | 0.12 | RC24 | No cable (sold separately) | ||
MYR 5,081.97 | 1 Piece(s) | 8 Day(s) or more | 10 | 5-Phase Stepping Motor - High Torque | 2µm | 40 | 40 | 13 | 15 | 0.22 | 0.17 | 0.12 | RC24 | No cable (sold separately) | ||
MYR 4,963.79 | 1 Piece(s) | 8 Day(s) or more | 10 | 5-Phase Stepping Motor - High Resolution | 1µm | 40 | 40 | 13 | 12.5 | 0.22 | 0.17 | 0.12 | RC24 | No cable (sold separately) | ||
MYR 5,200.15 | 1 Piece(s) | 8 Day(s) or more | 10 | 5-Phase Stepping Motor | 2µm | 50 | 50 | 13 | 10 | 0.14 | 0.1 | 0.06 | LA5 | No cable (sold separately) | ||
MYR 5,377.71 | 1 Piece(s) | 8 Day(s) or more | 10 | 5-Phase Stepping Motor - High Torque | 2µm | 50 | 50 | 13 | 15 | 0.14 | 0.1 | 0.06 | LA5 | No cable (sold separately) | ||
MYR 5,259.53 | 1 Piece(s) | 8 Day(s) or more | 10 | 5-Phase Stepping Motor - High Resolution | 1µm | 50 | 50 | 13 | 12.5 | 0.14 | 0.1 | 0.06 | LA5 | No cable (sold separately) | ||
MYR 5,200.15 | 1 Piece(s) | 8 Day(s) or more | 10 | 5-Phase Stepping Motor | 2µm | 50 | 50 | 13 | 10 | 0.14 | 0.1 | 0.06 | LA24 | No cable (sold separately) | ||
MYR 5,377.71 | 1 Piece(s) | 8 Day(s) or more | 10 | 5-Phase Stepping Motor - High Torque | 2µm | 50 | 50 | 13 | 15 | 0.14 | 0.1 | 0.06 | LA24 | No cable (sold separately) | ||
MYR 5,259.53 | 1 Piece(s) | 8 Day(s) or more | 10 | 5-Phase Stepping Motor - High Resolution | 1µm | 50 | 50 | 13 | 12.5 | 0.14 | 0.1 | 0.06 | LA24 | No cable (sold separately) | ||
MYR 5,200.15 | 1 Piece(s) | 8 Day(s) or more | 10 | 5-Phase Stepping Motor | 2µm | 50 | 50 | 13 | 10 | 0.14 | 0.1 | 0.06 | LB5 | No cable (sold separately) | ||
MYR 5,377.71 | 1 Piece(s) | 8 Day(s) or more | 10 | 5-Phase Stepping Motor - High Torque | 2µm | 50 | 50 | 13 | 15 | 0.14 | 0.1 | 0.06 | LB5 | No cable (sold separately) | ||
MYR 5,259.53 | 1 Piece(s) | 8 Day(s) or more | 10 | 5-Phase Stepping Motor - High Resolution | 1µm | 50 | 50 | 13 | 12.5 | 0.14 | 0.1 | 0.06 | LB5 | No cable (sold separately) | ||
MYR 5,200.15 | 1 Piece(s) | 8 Day(s) or more | 10 | 5-Phase Stepping Motor | 2µm | 50 | 50 | 13 | 10 | 0.14 | 0.1 | 0.06 | LB24 | No cable (sold separately) | ||
MYR 5,377.71 | 1 Piece(s) | 8 Day(s) or more | 10 | 5-Phase Stepping Motor - High Torque | 2µm | 50 | 50 | 13 | 15 | 0.14 | 0.1 | 0.06 | LB24 | No cable (sold separately) | ||
MYR 5,259.53 | 1 Piece(s) | 8 Day(s) or more | 10 | 5-Phase Stepping Motor - High Resolution | 1µm | 50 | 50 | 13 | 12.5 | 0.14 | 0.1 | 0.06 | LB24 | No cable (sold separately) | ||
MYR 5,200.15 | 1 Piece(s) | 8 Day(s) or more | 10 | 5-Phase Stepping Motor | 2µm | 50 | 50 | 13 | 10 | 0.14 | 0.1 | 0.06 | LC5 | No cable (sold separately) | ||
MYR 5,377.71 | 1 Piece(s) | 8 Day(s) or more | 10 | 5-Phase Stepping Motor - High Torque | 2µm | 50 | 50 | 13 | 15 | 0.14 | 0.1 | 0.06 | LC5 | No cable (sold separately) | ||
MYR 5,259.53 | 1 Piece(s) | 8 Day(s) or more | 10 | 5-Phase Stepping Motor - High Resolution | 1µm | 50 | 50 | 13 | 12.5 | 0.14 | 0.1 | 0.06 | LC5 | No cable (sold separately) | ||
MYR 5,200.15 | 1 Piece(s) | 8 Day(s) or more | 10 | 5-Phase Stepping Motor | 2µm | 50 | 50 | 13 | 10 | 0.14 | 0.1 | 0.06 | LC24 | No cable (sold separately) | ||
MYR 5,377.71 | 1 Piece(s) | 8 Day(s) or more | 10 | 5-Phase Stepping Motor - High Torque | 2µm | 50 | 50 | 13 | 15 | 0.14 | 0.1 | 0.06 | LC24 | No cable (sold separately) | ||
MYR 5,259.53 | 1 Piece(s) | 8 Day(s) or more | 10 | 5-Phase Stepping Motor - High Resolution | 1µm | 50 | 50 | 13 | 12.5 | 0.14 | 0.1 | 0.06 | LC24 | No cable (sold separately) | ||
MYR 5,200.15 | 1 Piece(s) | 8 Day(s) or more | 10 | 5-Phase Stepping Motor | 2µm | 50 | 50 | 13 | 10 | 0.14 | 0.1 | 0.06 | RA5 | No cable (sold separately) | ||
MYR 5,377.71 | 1 Piece(s) | 8 Day(s) or more | 10 | 5-Phase Stepping Motor - High Torque | 2µm | 50 | 50 | 13 | 15 | 0.14 | 0.1 | 0.06 | RA5 | No cable (sold separately) | ||
MYR 5,259.53 | 1 Piece(s) | 8 Day(s) or more | 10 | 5-Phase Stepping Motor - High Resolution | 1µm | 50 | 50 | 13 | 12.5 | 0.14 | 0.1 | 0.06 | RA5 | No cable (sold separately) | ||
MYR 5,200.15 | 1 Piece(s) | 8 Day(s) or more | 10 | 5-Phase Stepping Motor | 2µm | 50 | 50 | 13 | 10 | 0.14 | 0.1 | 0.06 | RA24 | No cable (sold separately) | ||
MYR 5,377.71 | 1 Piece(s) | 8 Day(s) or more | 10 | 5-Phase Stepping Motor - High Torque | 2µm | 50 | 50 | 13 | 15 | 0.14 | 0.1 | 0.06 | RA24 | No cable (sold separately) | ||
MYR 5,259.53 | 1 Piece(s) | 8 Day(s) or more | 10 | 5-Phase Stepping Motor - High Resolution | 1µm | 50 | 50 | 13 | 12.5 | 0.14 | 0.1 | 0.06 | RA24 | No cable (sold separately) | ||
MYR 5,200.15 | 1 Piece(s) | 8 Day(s) or more | 10 | 5-Phase Stepping Motor | 2µm | 50 | 50 | 13 | 10 | 0.14 | 0.1 | 0.06 | RB5 | No cable (sold separately) | ||
MYR 5,377.71 | 1 Piece(s) | 8 Day(s) or more | 10 | 5-Phase Stepping Motor - High Torque | 2µm | 50 | 50 | 13 | 15 | 0.14 | 0.1 | 0.06 | RB5 | No cable (sold separately) | ||
MYR 5,259.53 | 1 Piece(s) | 8 Day(s) or more | 10 | 5-Phase Stepping Motor - High Resolution | 1µm | 50 | 50 | 13 | 12.5 | 0.14 | 0.1 | 0.06 | RB5 | No cable (sold separately) | ||
MYR 5,200.15 | 1 Piece(s) | 8 Day(s) or more | 10 | 5-Phase Stepping Motor | 2µm | 50 | 50 | 13 | 10 | 0.14 | 0.1 | 0.06 | RB24 | No cable (sold separately) | ||
MYR 5,377.71 | 1 Piece(s) | 8 Day(s) or more | 10 | 5-Phase Stepping Motor - High Torque | 2µm | 50 | 50 | 13 | 15 | 0.14 | 0.1 | 0.06 | RB24 | No cable (sold separately) | ||
MYR 5,259.53 | 1 Piece(s) | 8 Day(s) or more | 10 | 5-Phase Stepping Motor - High Resolution | 1µm | 50 | 50 | 13 | 12.5 | 0.14 | 0.1 | 0.06 | RB24 | No cable (sold separately) | ||
MYR 5,200.15 | 1 Piece(s) | 8 Day(s) or more | 10 | 5-Phase Stepping Motor | 2µm | 50 | 50 | 13 | 10 | 0.14 | 0.1 | 0.06 | RC5 | No cable (sold separately) | ||
MYR 5,377.71 | 1 Piece(s) | 8 Day(s) or more | 10 | 5-Phase Stepping Motor - High Torque | 2µm | 50 | 50 | 13 | 15 | 0.14 | 0.1 | 0.06 | RC5 | No cable (sold separately) | ||
MYR 5,259.53 | 1 Piece(s) | 8 Day(s) or more | 10 | 5-Phase Stepping Motor - High Resolution | 1µm | 50 | 50 | 13 | 12.5 | 0.14 | 0.1 | 0.06 | RC5 | No cable (sold separately) | ||
MYR 5,200.15 | 1 Piece(s) | 8 Day(s) or more | 10 | 5-Phase Stepping Motor | 2µm | 50 | 50 | 13 | 10 | 0.14 | 0.1 | 0.06 | RC24 | No cable (sold separately) | ||
MYR 5,377.71 | 1 Piece(s) | 8 Day(s) or more | 10 | 5-Phase Stepping Motor - High Torque | 2µm | 50 | 50 | 13 | 15 | 0.14 | 0.1 | 0.06 | RC24 | No cable (sold separately) | ||
MYR 5,259.53 | 1 Piece(s) | 8 Day(s) or more | 10 | 5-Phase Stepping Motor - High Resolution | 1µm | 50 | 50 | 13 | 12.5 | 0.14 | 0.1 | 0.06 | RC24 | No cable (sold separately) | ||
MYR 5,256.13 | 1 Piece(s) | 8 Day(s) or more | 10 | 5-Phase Stepping Motor | 2µm | 60 | 60 | 15 | 10 | 0.08 | 0.07 | 0.03 | LA5 | No cable (sold separately) | ||
MYR 5,436.54 | 1 Piece(s) | 8 Day(s) or more | 10 | 5-Phase Stepping Motor - High Torque | 2µm | 60 | 60 | 15 | 15 | 0.08 | 0.07 | 0.03 | LA5 | No cable (sold separately) | ||
MYR 5,318.34 | 1 Piece(s) | 8 Day(s) or more | 10 | 5-Phase Stepping Motor - High Resolution | 1µm | 60 | 60 | 15 | 12.5 | 0.08 | 0.07 | 0.03 | LA5 | No cable (sold separately) | ||
MYR 5,256.13 | 1 Piece(s) | 8 Day(s) or more | 10 | 5-Phase Stepping Motor | 2µm | 60 | 60 | 15 | 10 | 0.08 | 0.07 | 0.03 | LA24 | No cable (sold separately) | ||
MYR 5,436.54 | 1 Piece(s) | 8 Day(s) or more | 10 | 5-Phase Stepping Motor - High Torque | 2µm | 60 | 60 | 15 | 15 | 0.08 | 0.07 | 0.03 | LA24 | No cable (sold separately) | ||
MYR 5,318.34 | 1 Piece(s) | 8 Day(s) or more | 10 | 5-Phase Stepping Motor - High Resolution | 1µm | 60 | 60 | 15 | 12.5 | 0.08 | 0.07 | 0.03 | LA24 | No cable (sold separately) | ||
MYR 5,256.13 | 1 Piece(s) | 8 Day(s) or more | 10 | 5-Phase Stepping Motor | 2µm | 60 | 60 | 15 | 10 | 0.08 | 0.07 | 0.03 | LB5 | No cable (sold separately) | ||
MYR 5,436.54 | 1 Piece(s) | 8 Day(s) or more | 10 | 5-Phase Stepping Motor - High Torque | 2µm | 60 | 60 | 15 | 15 | 0.08 | 0.07 | 0.03 | LB5 | No cable (sold separately) | ||
MYR 5,318.34 | 1 Piece(s) | 8 Day(s) or more | 10 | 5-Phase Stepping Motor - High Resolution | 1µm | 60 | 60 | 15 | 12.5 | 0.08 | 0.07 | 0.03 | LB5 | No cable (sold separately) | ||
MYR 5,256.13 | 1 Piece(s) | 8 Day(s) or more | 10 | 5-Phase Stepping Motor | 2µm | 60 | 60 | 15 | 10 | 0.08 | 0.07 | 0.03 | LB24 | No cable (sold separately) | ||
MYR 5,436.54 | 1 Piece(s) | 8 Day(s) or more | 10 | 5-Phase Stepping Motor - High Torque | 2µm | 60 | 60 | 15 | 15 | 0.08 | 0.07 | 0.03 | LB24 | No cable (sold separately) | ||
MYR 5,318.34 | 1 Piece(s) | 8 Day(s) or more | 10 | 5-Phase Stepping Motor - High Resolution | 1µm | 60 | 60 | 15 | 12.5 | 0.08 | 0.07 | 0.03 | LB24 | No cable (sold separately) | ||
MYR 10,075.09 | 1 Piece(s) | 8 Day(s) or more | 10 | α-Step Motor | 1µm | 60 | 60 | 15 | 17.5 | 0.08 | 0.07 | 0.03 | LB24 | For α- Step (included) | ||
MYR 5,256.13 | 1 Piece(s) | 8 Day(s) or more | 10 | 5-Phase Stepping Motor | 2µm | 60 | 60 | 15 | 10 | 0.08 | 0.07 | 0.03 | LC5 | No cable (sold separately) | ||
MYR 5,436.54 | 1 Piece(s) | 8 Day(s) or more | 10 | 5-Phase Stepping Motor - High Torque | 2µm | 60 | 60 | 15 | 15 | 0.08 | 0.07 | 0.03 | LC5 | No cable (sold separately) | ||
MYR 5,318.34 | 1 Piece(s) | 8 Day(s) or more | 10 | 5-Phase Stepping Motor - High Resolution | 1µm | 60 | 60 | 15 | 12.5 | 0.08 | 0.07 | 0.03 | LC5 | No cable (sold separately) | ||
MYR 5,256.13 | 1 Piece(s) | 8 Day(s) or more | 10 | 5-Phase Stepping Motor | 2µm | 60 | 60 | 15 | 10 | 0.08 | 0.07 | 0.03 | LC24 | No cable (sold separately) | ||
MYR 5,436.54 | 1 Piece(s) | 8 Day(s) or more | 10 | 5-Phase Stepping Motor - High Torque | 2µm | 60 | 60 | 15 | 15 | 0.08 | 0.07 | 0.03 | LC24 | No cable (sold separately) |
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| Feed Screw | Ball Screw Ø6, Lead 1 |
| Guide | Linear Ball Guide |
| Resolution *1 | 2μm/Pulse (Full) 1μm/Pulse (Half) |
| Positioning Repeatability | Within ±0.5μm |
| Load Capacity | 49N |
| Lost Motion | 1μm or less |
| Backlash | 0.5μm or less |
| Parallelism | 15μm or less |
| Motor | Cable |
| C,D,E | N (Not Provided) |
| MA | M |
| PA | P |
| UA | U |
| Motor | (mm/sec) | Motor | (mm/sec) |
| C | 10 | MA | 10 |
| D | 25 | PA | 30 |
| E | 20 | UA | 50 |

| Type | Z-Axis Motorized Stage | Material | SUS440C | Guide | Linear Ball Guide |
|---|---|---|---|---|---|
| Table Feeding Method | Ball Screw | Z-Axis Stage Surface | Vertical | Surface Treatment | 无电解镀镍 |
| Through Hole (Table Center Hole) | Not Provided | Load Capacity (Range)(N) | 30.1~50 | Load Capacity(N) | 49 |
| Positioning Accuracy(µm) | 6 | Table Straightness(µm) | 1 | Sensor | Limit + Home |
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Days to Ship : 10 Day(s) or more
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Standard Price : MYR 9,652.75
Days to Ship : 11 Day(s) or more

MISUMI
Standard Price : MYR 9,329.45
Days to Ship : 22 Day(s) or more
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