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Aluminum High Vacuum Angle Valves, Normally Closed, Bellows Seal, XLA Series
SMC
Vacuum regulator with low outgassing.
[Features]
· Aluminum body.
· Replaceable bellows.
· Uniform baking temperature.
· Lightweight and compact.
· Little heavy metal contamination.
| Days to Ship: | 3 Day(s) or more |
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Normally Closed Type High Vacuum Solenoid Valve XSA Series (XSA1/XSA2/XSA3)
SMC
A normally closed type high vacuum solenoid valve with reduced particulate matter and improved sealing performance.
[Features]
・ Flame-retardant (UL94 V-0 compliant)
・ Two types of fittings (face seal fittings / compression fittings) and female threads (Rc, NPT) are available
・ By moving the spring from the sliding part of the armature to the body part, dust generation due to contact with the spring has been reduced
・ Securely seals with a large spring force
・ Power consumption *: 4.5 W (size 1) / 7 W (size 2) / 10.5 W (Size 3) (* For DC specifications / B type. )
・ Operating temperature range: 5 to 60℃
| Standard Price: | MYR 1,106.16- |
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| Days to Ship: | 3 Day(s) or more |

《Vacuum Specification》Control Equipment Compact Solenoid Valve G010 Series
KOGANEI
In response to various control needs, the manufacturer has newly added positive pressure / always open specifications and vacuum specifications. The ideal control system for machines and equipment on the production line can now be selected.
| Standard Price: | MYR 237.76- |
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| Days to Ship: | 17 Day(s) or more |

Aluminum High Vacuum Angle Valve, XLDV Series, Air-Operated Type With Solenoid Valve
SMC
A high vacuum angle (L-shaped) valve for preventing pumps from running when overloaded.
[Features]
· Initial exhaust valve and main exhaust valve are integrated (two-step flow rate control valve).
· Allows for compact system designs and reduced piping.
· Prevents dust turbulence inside the chamber when exhausting.
· Adjustable flow rate for initial exhaust valve.
· Air-operated type with solenoid valve.
· Its low outgassing enables use with a smaller pump capacity and helps reduce exhaust time.
· Does not contain heavy metals such as Ni (nickel) or Cr (chrome).
· Low sputtering yield minimizes heavy metal contamination of wafers.
| Days to Ship: | 23 Day(s) or more |
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Aluminum High Vacuum Angle Valve XLS Series (Electromagnetic Type, Bellows Pressure Balance)
SMC
A high vacuum angle valve that requires no air to drive, enabling use in portable equipment.
[Features]
· Uses no sliding metal parts, minimizing particulate matter.
· The pressure balance mechanism allows an unrestricted exhaust direction.
· A control power supply circuit for solenoid valve drive is now standard.
· Its low outgassing enables use with a smaller pump capacity and helps reduce exhaust time.
· Does not contain heavy metals such as Ni (nickel) or Cr (chrome).
· Low sputtering yield minimizes heavy metal contamination of wafers.
| Standard Price: | MYR 1,953.90- |
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| Days to Ship: | 5 Day(s) or more |

Control Equipment Standard Electromagnetic Valve 112 Series Vacuum Compatible
KOGANEI
Lightweight, compact, 2- /3-port direct acting electromagnetic vacuum valve.
[Features]
·A series of vacuum and positive pressure combined types that enables forced release or vacuum break is available as well
·With full of various functions of 2- / 3-port valves by adopting an external pilot method
·It demonstrates versatility in spite of its compact body
·NC (normally closed) / NO (normally open) shared 2- / 3-port valve that is not restricted by piping port position and flow direction
·It can be used not only in vacuum but also in combination with positive pressure, and can be used as a valve for vacuum break and forced release
[Applications]
・ Compatible with pneumatic equipment and production lines in all industries
| Standard Price: | MYR 337.34- |
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| Days to Ship: | 11 Day(s) or more |

Control Equipment Standard Electromagnetic Valve 182 Series Vacuum Compatible
KOGANEI
Lightweight, compact, 2- /3-port direct acting electromagnetic vacuum valve.
[Features]
·A series of vacuum and positive pressure combined types that enables forced release or vacuum break is available as well
·With full of various functions of 2- / 3-port valves by adopting an external pilot method
·It demonstrates versatility in spite of its compact body
·NC (normally closed) / NO (normally open) shared 2- / 3-port valve that is not restricted by piping port position and flow direction
·It can be used not only in vacuum but also in combination with positive pressure, and can be used as a valve for vacuum break and forced release
[Applications]
・ Compatible with pneumatic equipment and production lines in all industries
| Standard Price: | MYR 423.61- |
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| Days to Ship: | 11 Day(s) or more |

Controller equipment Rectangular Electromagnetic Vacuum Valve 200 Series
KOGANEI
This is a reliable mechanism that promises consistent operation and high durability for the vacuum line.
| Standard Price: | MYR 608.41- |
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| Days to Ship: | 4 Day(s) or more |

Aluminum High Vacuum Angle Valves, Normally Closed, Bellows Seal, XLAV Series
SMC
A vacuum regulator with little heavy metal contamination.
[Features]
· Aluminum body.
· Replaceable bellows.
· Uniform baking temperature.
· Lightweight and compact.
· Low outgassing.
| Standard Price: | MYR 2,253.84- |
|---|---|
| Days to Ship: | 23 Day(s) or more |

SMC
[Features]
· Aluminum body
· Uniform baking temperature
· Lightweight and compact
· Low outgassing
· Little heavy metal contamination
· Resistant to fluorine corrosion
· Replaceable bellows (bellows-seal type)
| Standard Price: | MYR 2,214.40- |
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| Days to Ship: | 3 Day(s) or more |
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| Type |
| Application |
| Mounting Orientation |
| Number of Ports |
| Solenoid Type |
| Switching Type |
| Driving Type |
| Effective Sectional Area(mm2) |
| Pipe Port Type |
| Plumbing Thread Nominal |
| Connecting Tube Diameter |
| Flange Type |
| Flange Nominal |
| CV Value |
| Brand | SMC | SMC | KOGANEI | SMC | SMC | KOGANEI | KOGANEI | KOGANEI | SMC | SMC |
|---|---|---|---|---|---|---|---|---|---|---|
| Product Series | Aluminum High Vacuum Angle Valves, Normally Closed, Bellows Seal, XLA Series | Normally Closed Type High Vacuum Solenoid Valve XSA Series (XSA1/XSA2/XSA3) | 《Vacuum Specification》Control Equipment Compact Solenoid Valve G010 Series | Aluminum High Vacuum Angle Valve, XLDV Series, Air-Operated Type With Solenoid Valve | Aluminum High Vacuum Angle Valve XLS Series (Electromagnetic Type, Bellows Pressure Balance) | Control Equipment Standard Electromagnetic Valve 112 Series Vacuum Compatible | Control Equipment Standard Electromagnetic Valve 182 Series Vacuum Compatible | Controller equipment Rectangular Electromagnetic Vacuum Valve 200 Series | Aluminum High Vacuum Angle Valves, Normally Closed, Bellows Seal, XLAV Series | |
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| Days to Ship | 3 Day(s) or more | 3 Day(s) or more | 17 Day(s) or more | 23 Day(s) or more | 5 Day(s) or more | 11 Day(s) or more | 11 Day(s) or more | 4 Day(s) or more | 23 Day(s) or more | 3 Day(s) or more |
| Type | Air-Actuated Vacuum Valve | High Vacuum Solenoid | Solenoid Valve | High Vacuum Solenoid | Solenoid Valve | Solenoid Valve | Solenoid Valve | Solenoid Valve | High Vacuum Solenoid | High Vacuum Solenoid |
| Application | Single Use | Single Use | Single Use / Multi-Port | Single Use | Single Use | Single Use | Single Use / Multi-Port | Single Use | Single Use | Single Use |
| Mounting Orientation | Direct | Direct | Direct / Manifold Base | Direct | Direct | Direct | Direct / Manifold Base | Direct | Direct | Direct |
| Number of Ports | 3-Port Valve | 2-Port Valve | 2-Port Valve / 3-Port Valve | 2-Port Valve | 2-Port Valve | 2-Port Valve / 3-Port Valve | 2-Port Valve / 3-Port Valve | 2-Port Valve / 3-Port Valve | 3-Port Valve | 2-Port Valve |
| Solenoid Type | Single | Single | Single | Single | Single | Single | Single | Single | Single | Single |
| Switching Type | 2-Position Normally Closed | 2-Position Normally Closed | 2-Position Normally Open / 2-Position Normally Closed | 2-Position Normally Closed | 2-Position Normally Closed | 2-Position Normally Closed | 2-Position Normally Closed | 2-Position Normally Closed | 2-Position Normally Closed | 2-Position Normally Closed |
| Driving Type | - | Directly Operated | Directly Operated | Directly Operated | Directly Operated | External Pilot Shape | External Pilot Shape | Directly Operated | Air Pilot | Directly Operated |
| Effective Sectional Area(mm2) | - | - | 0.1 ~ 0.45 | - | - | 4.2 | 10.2 | 8.5 | - | - |
| Pipe Port Type | Flange | Rc / NPT / Face Seal Fitting / Compression Fitting | M | Flange | Flange | M | Rc | Rc | Flange | Flange |
| Plumbing Thread Nominal | - | 1/8 / 1/4 / 3/8 | M5 / M3 | - | - | M5 | 1/8 | 1/4 | - | - |
| Connecting Tube Diameter | - | - | - | - | - | - | - | - | - | - |
| Flange Type | NW / Others | - | - | KF / K | KF | - | - | - | NW / Others | KF / K |
| Flange Nominal | 16 / 25 / 40 / 50 / 63 / 80 | - | - | 25 / 40 / 50 / 63 / 80 | 16 / 25 | - | - | - | 16 / 25 / 40 / 50 / 63 / 80 | 16 / 25 / 40 / 50 / 63 / 80 |
| CV Value | - | - | 0.006 ~ 0.025 | - | - | 0.23 | 0.57 | 0.47 | - | - |
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