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Vacuum Valves（Flange Type：K）

Vacuum valves are a type of valve attached to vacuum chambers. Vacuum valves must block gas components almost completely or must be precisely controlled compared with regular valves.
Blocking valves: These valves are used to isolate vacuum sections and block pressure differentials and come in various types, such as gate valves, L type valves, straight valves, and butterfly valves, to suit the possible pressure zones and applications within a vacuum system.
Conductance valves: needle valves and butterfly valves (used to control the flow rate of gas entering the empty chamber.)
The term "valve" itself is a generic term for things that control the flow of liquid or gas in pipe networks, controlling the fluid direction, pressure, and flow rate
From L type valves through to gate valve and from atmospheric pressure through to vacuum pressures, valves for all types of areas, conditions, and applications are available, including those for ultra-high vacuum levels.

8 items

: 30; 45; 60

Days to Ship	All 3 Day(s) or Less 4 Day(s) or Less 5 Day(s) or Less 7 Day(s) or Less 8 Day(s) or Less 9 Day(s) or Less 10 Day(s) or Less 11 Day(s) or Less 12 Day(s) or Less 13 Day(s) or Less

Aluminum High Vacuum Angle Valve, XLDV Series, Air-Operated Type With Solenoid Valve

SMC

A high vacuum angle (L-shaped) valve for preventing pumps from running when overloaded.
[Features]
· Initial exhaust valve and main exhaust valve are integrated (two-step flow rate control valve).
· Allows for compact system designs and reduced piping.
· Prevents dust turbulence inside the chamber when exhausting.
· Adjustable flow rate for initial exhaust valve.
· Air-operated type with solenoid valve.
· Its low outgassing enables use with a smaller pump capacity and helps reduce exhaust time.
· Does not contain heavy metals such as Ni (nickel) or Cr (chrome).
· Low sputtering yield minimizes heavy metal contamination of wafers.

CAD ：: 2D / 3D

Standard Price:	MYR 8,704.97-
Days to Ship:	23 Day(s) or more

"Same Day Ship Out" is available for item with 1 day

Stainless Steel High Vacuum Angle Valves / In-Line Valves, Double Acting / Bellows Seal, XMC/XYC Series

SMC

Vacuum valve with precision-cast single-piece structure which helps prevent gas accumulation.
[Features]
· Bellows type is particulate-free and cleaned.
· Pressure balanced structure.
· Body material: SCS13 (SUS304 equivalent).
· The XM Series is interchangeable with XL Series aluminum high vacuum angle valves.

Standard Price:	MYR 6,749.15-
Days to Ship:	23 Day(s) or more

"Same Day Ship Out" is available for item with 1 day

Aluminum High Vacuum Angle Valves, Normally Closed, O-Ring Seal, XLF Series

SMC

[Features]
· Aluminum body
· Uniform baking temperature
· Lightweight and compact
· Low outgassing
· Little heavy metal contamination
· Resistant to fluorine corrosion
· Replaceable bellows (bellows-seal type)

CAD ：: 2D / 3D

Standard Price:	MYR 5,102.49-
Days to Ship:	3 Day(s) or more

"Same Day Ship Out" is available for item with 1 day

Aluminum High Vacuum Angle Valve, 2-Step Control, Single Acting / Bellows Seal, O-Ring Seal, XLD Series

SMC

A high vacuum angle (L-shaped) valve for preventing pumps from running when overloaded.
[Features]
· Initial exhaust valve and main exhaust valve are integrated (two-step flow rate control valve)
・ Achieves system compactness and piping savings
・ Prevents dust from rolling up in the chamber when exhausting
・ Adjustable initial exhaust valve flow rate
・ Air operated type / with solenoid valve
・ Since there is little outgas, the pump capacity can be small and the exhaust time can be shortened
・ It does not contain heavy metals such as Ni (nickel) and Cr (chromium), and the sputtering rate is low, so there is little heavy metal contamination on the wafer
・ Strong against fluorine
· Uniform baking temperature. Good thermal conductivity, uniform temperature throughout the body, drastically reducing product adhesion
· Lightweight and compact

CAD ：

2D / 3D

Days to Ship: 10 Day(s) or more

"Same Day Ship Out" is available for item with 1 day

Days to Ship:	10 Day(s) or more

Stainless Steel High Vacuum L-Shaped, Straight Valve, Two-Stage Control, Single Acting, Bellows, O-Ring Seal, XMD/XYD

SMC

A vacuum valve for preventing pumps from running when overloaded.
[Features]
· Initial exhaust valve and main exhaust valve are integrated (two-step flow rate control valve)
· Allows for compact system designs and reduced piping.
· Prevents dust turbulence inside the chamber when exhausting.
· Adjustable flow rate for initial exhaust valve.
· Body material: SCS13 (SUS304 equivalent).
· Precision-cast single-piece structure which helps prevent gas accumulation.
· The XM Series is interchangeable with XL Series aluminum high vacuum angle valves.

CAD ：: 2D / 3D

Standard Price:	MYR 8,481.36-
Days to Ship:	23 Day(s) or more

"Same Day Ship Out" is available for item with 1 day

Aluminum High Vacuum Angle Valve, Double Acting / Bellows Seal, XLC Series

SMC

CAD ：: 2D / 3D

Standard Price:	MYR 5,789.56-
Days to Ship:	23 Day(s) or more

"Same Day Ship Out" is available for item with 1 day

Aluminum High Vacuum Angle Valves, Normally Closed, O-Ring Seal, XLFV Series, Air Operated Type, With Solenoid Valve

SMC

Standard Price:	MYR 5,442.64-
Days to Ship:	3 Day(s) or more

"Same Day Ship Out" is available for item with 1 day

Aluminum High Vacuum Angle Valves, Double Acting, O-Ring Seal, XLG Series

SMC

CAD ：: 2D / 3D

Standard Price:	MYR 5,269.40-
Days to Ship:	23 Day(s) or more

"Same Day Ship Out" is available for item with 1 day


Brand
Product Series
CAD
Days to Ship
Type
Application
Mounting Orientation
Number of Ports
Solenoid Type
Switching Type
Driving Type
Effective Sectional Area(mm2)
Pipe Port Type
Plumbing Thread Nominal
Connecting Tube Diameter
Flange Type
Flange Nominal
CV Value


Brand	SMC	SMC	SMC	SMC	SMC	SMC	SMC	SMC
Product Series	Aluminum High Vacuum Angle Valve, XLDV Series, Air-Operated Type With Solenoid Valve	Stainless Steel High Vacuum Angle Valves / In-Line Valves, Double Acting / Bellows Seal, XMC/XYC Series	Aluminum High Vacuum Angle Valves, Normally Closed, O-Ring Seal, XLF Series	Aluminum High Vacuum Angle Valve, 2-Step Control, Single Acting / Bellows Seal, O-Ring Seal, XLD Series	Stainless Steel High Vacuum L-Shaped, Straight Valve, Two-Stage Control, Single Acting, Bellows, O-Ring Seal, XMD/XYD	Aluminum High Vacuum Angle Valve, Double Acting / Bellows Seal, XLC Series	Aluminum High Vacuum Angle Valves, Normally Closed, O-Ring Seal, XLFV Series, Air Operated Type, With Solenoid Valve	Aluminum High Vacuum Angle Valves, Double Acting, O-Ring Seal, XLG Series
CAD	2D / 3D		2D / 3D	2D / 3D	2D / 3D	2D / 3D		2D / 3D
Days to Ship	23 Day(s) or more	23 Day(s) or more	3 Day(s) or more	10 Day(s) or more	23 Day(s) or more	23 Day(s) or more	3 Day(s) or more	23 Day(s) or more
Type	High Vacuum Solenoid	Pilot Vacuum Valve	Pilot Vacuum Valve	Air-Actuated Vacuum Valve	Pilot Vacuum Valve	Pilot Vacuum Valve	High Vacuum Solenoid	Pilot Vacuum Valve
Application	Single Use	Single Use	Single Use	Single Use	Single Use	Single Use	Single Use	Single Use
Mounting Orientation	Direct	Direct	Direct	Direct	Direct	Direct	Direct	Direct
Number of Ports	2-Port Valve	2-Port Valve	2-Port Valve	2-Port Valve	2-Port Valve	2-Port Valve	2-Port Valve	2-Port Valve
Solenoid Type	Single	-	-	-	-	-	Single	-
Switching Type	2-Position Normally Closed	2-Position Normally Closed	2-Position Normally Closed	2-Position Normally Closed	2-Position Normally Closed	2-Position Normally Closed	2-Position Normally Closed	2-Position Normally Closed
Driving Type	Directly Operated	-	-	-	-	-	Directly Operated	-
Effective Sectional Area(mm2)	-	-	-	-	-	-	-	-
Pipe Port Type	Flange	Flange	Flange	Flange	Flange	Flange	Flange	Flange
Plumbing Thread Nominal	-	-	-	-	-	-	-	-
Connecting Tube Diameter	-	-	-	-	-	-	-	-
Flange Type	K	K	K	K	K	K	K	K
Flange Nominal	63 / 80	63 / 80	63 / 80	63 / 80	63 / 80	63 / 80	63	63 / 80
CV Value	-	-	-	-	-	-	-	-

Configure

Specification/Dimensions

Type
- Solenoid Valve
- High Vacuum Solenoid
- Manual Vacuum Valve
- Mechanically-Operated Vacuum Valve
- Pilot Vacuum Valve
- Air-Actuated Vacuum Valve
- Related Components
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