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Magnetically Coupled Rodless Cylinder, Slider Type: Slide Bearing, CY1S Series
SMC
Air slide table made by SMC
[Features]
· Weight reduced by up to 15% (0.96 kg: conventionally 1.13 kg)
· Overall length reduced by up to 15 mm (240 mm: conventionally 255 mm)
· The inner and outer peripheral surfaces of the cylinder tube are equipped with Lub-retainers to improve lubricity retention.
· Stroke position reproducibility is improved with an adjusting bolt
| Days to Ship: | 14 Day(s) or more |
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Mechanically Jointed Rodless Cylinder, Basic Type, MY1B Series
SMC
Air slide table made by SMC
[Features]
· Capable of being used in combination with various guides depending on the conditions
· Simple, space-saving design without any guides
· A wide variety is available from ø10 to ø100
| Standard Price: | MYR 1,123.12- |
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| Days to Ship: | 3 Day(s) or more |

SMC
An air slide table made by SMC
[Features]
· A compactly integrated work table and air cylinder.
· An air slide table suitable for precision assembly.
· Improved mounting repeatability of workpieces and bodies.
· An auto switch attaching groove is provided in consideration of safety.
· Also usable for vertical axis mounting.
· Dual-rod structure.
· Wide range of options.
| Standard Price: | MYR 2,581.60- |
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| Days to Ship: | 2 Day(s) or more |

Magnetically Coupled Rodless Cylinder, Slider Type: Ball Bushing Bearing, CY1L Series
SMC
Magnetically Coupled Rodless Cylinder, Slider Type with Ball Bushing Bearing, CY1L series by SMC.
[Features]
· Space-saving cylinder with a wide range of applications thanks to its magnet coupling structure.
| Standard Price: | MYR 2,117.44- |
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| Days to Ship: | 9 Day(s) or more |

Mechanically Jointed Rodless Cylinder, Basic Type, MY3A/3B Series
SMC
MY3A/3B Series Mechanically Jointed Rodless Cylinders, Basic Type packed with functionality despite being low profile and compact.
[Features]
· The integrated guide enables direct loading of workpieces.
· Tube inner diameters ø20 (diameter 20 mm) / ø32 (diameter 32 mm) / ø50 (diameter 50 mm) have been added.
| Days to Ship: | 3 Day(s) or more |
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SMC
An air slide table made by SMC
[Features]
· Integrated guide rail and table.
· A circulation-type linear guide for high rigidity and precision.
· Air slide table for precision assembly.
· A symmetrical type is also available as standard.
· An auto switch attaching groove is provided in consideration of safety.
· Wide range of options.
· Improved load resistance.
· Improved mounting repeatability of workpieces and bodies.
· Reinforced end plate part.
| Days to Ship: | 21 Day(s) or more |
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| Standard Price: | MYR 1,951.16- |
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| Days to Ship: | 3 Day(s) or more |

SMC
An air slide table with linear guides for smooth and stable long strokes.
[Features]
· The rigidity of the table remains constant throughout the entire stroke.
· Dual-rod structure.
| Days to Ship: | Quote |
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SMC
An air slide table with integrated guide rail and table.
[Features]
· High stiffness and accuracy by using a recirculating linear guide.
· An air slide table for precision assembly.
· Symmetric types is also available as standard.
· Auto switch mounting grooves designed for safety.
· Wide range of options.
· Improved load capacity.
· Improved mounting repeatability of workpieces and bodies.
· Improved strength of the end plate.
| Days to Ship: | Quote |
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SMC
An air slide table equipped with cross roller guides for smooth and stable movement.
[Features]
· A compactly integrated work table and air cylinder.
· An air slide table suitable for precision assembly.
· Includes machined positioning holes for improved mounting repeatability of workpieces and bodies.
· Auto switch mounting grooves, designed for safety.
· Can also be mounted axially.
· Dual-rod structure.
· An abundance of options including various combinations of adjuster options and function options.
| Days to Ship: | 41 Day(s) or more |
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Mechanically Jointed Rodless Cylinder, Linear Guide Type MY1H Series
SMC
The MY1H series is a type of Mechanically Jointed Rodless Cylinder that employs a linear guide.
[Features]
· Optimal for picking and placing small/medium items of ø10 to 40 (diameter 10 mm to 40 mm) in size.
· Employs a linear guide to achieve highly precise positioning repeatability.
| Standard Price: | MYR 2,670.95- |
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| Days to Ship: | 9 Day(s) or more |

Magnetically Coupled Rodless Cylinder, Low Profile Guide Type, CY1F Series
SMC
"Thin type," "short body" and "lightweight" design.
[Features]
· Thin type: up to 29% reduction.
· Short body: up to 31% reduction.
· Lightweight: up to 50% reduction.
· A centralized piping-port variation is selectable.
· 4 types of stroke adjustments are possible.
· Removing sediment from the guide part is easy thanks to the lack of an end cover.
· The drive part (cylinder) and guide part can be separated, enabling the drive part (cylinder) to be replaced with an integrated-structure workpiece still mounted.
| Standard Price: | MYR 2,849.08- |
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| Days to Ship: | 27 Day(s) or more |

Air Slide Table Clean / Low Dust Generation 13/20/22-MXQ Series
SMC
[13-Series, Clean Series]
・ It is suitable for clean environment.
・ It prevents dust generation in the cleanroom.
[20-Series Copper/Fluorine-Free Specifications]
・ Suitable for use in environments that dislike copper and fluorine materials.
・ External dimensions are the same as standard products.
[22-Series, Copper / Fluorine / Silicone-Free + Low Dust Generation]
・ It supports environments with restrictions on copper-based, fluorine-based, and silicone-based materials.
・ The structure is the same as the Clean Series. (Grease and packaging are different from the Clean Series)
| Standard Price: | MYR 1,822.88- |
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| Days to Ship: | 14 Day(s) or more |

Super rodless cylinder SRG3 series with rodless form high-precision guide
CKD
[Features]
· A cylinder which is a super rod-less cylinder is integrally attached with a uni-axial, high precision linear guide
| Days to Ship: | 17 Day(s) or more |
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Air Slide Table Double Ported Type, MXQ□A Series
SMC
An air slide table with a table shape for better function and easier maintenance.
[Features]
・ Overall height reduction: 10% reduction 27 mm. (Conventional product 30 mm)
・ Product weight: 22% reduction 298 g. (Conventional product 380 g)
・ Allowable Kinetic Energy: 64% improvement 0.09 J. (Conventional product 0.055 J)
· Mounting dimensions are equivalent to the conventional MXQ Series.
· A wide range of stroke adjusters (option).
· "Shorter total length type" table is available.
・ Piping / auto switch mounting grooves provided on both sides.
・ It is possible to combine a retraction end adjuster and a extension end adjuster.
| Days to Ship: | Quote |
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Magnetically Coupled Rodless Cylinder, Linear Guide Type CY1H Series
SMC
A CY1H Series magnetically coupled rodless cylinder with linear guide manufactured by SMC.
[Features]
· A space-saving type cylinder with a magnetically coupled design that allows use in wide range of applications.
| Standard Price: | MYR 3,233.68- |
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| Days to Ship: | 27 Day(s) or more |
| Days to Ship: | 3 Day(s) or more |
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Rodless, Magnet Type, Super Rodless Cylinder, MRL2 Series
CKD
[Features]
· A new magnet style, rod-less cylinder with significantly improved life and operation stability by using a new lubrication system
| Days to Ship: | 16 Day(s) or more |
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Air Slide Table Low Thrust With High Stiffness Type MXQ□B Series
SMC
An Air Slide Table low thrust high stiffness type.
[Features]
· Improved allowable kinetic energy.
· The table shape for better functionality and easier maintenance.
· Mounting dimensions are equivalent to the conventional MXQ Series.
· A wide range of stroke adjusters (option).
· "Shorter total length type" table is available.
· Guide rigidity improved by 50% (for MXQ8B).
· The cylinder can be downsized for light loads with reduced height, air consumption reduction and weight reduction.
| Days to Ship: | 32 Day(s) or more |
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Air Slide Table, Height Interchangeable Type, MXQ Series
SMC
An air slide table with improved auto switch visibility.
[Features]
· Improved allowable kinetic energy.
· The table shape was designed in consideration of functionality and maintenance.
· Shorter length table available.
| Days to Ship: | 31 Day(s) or more |
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Vacuum Rodless Cylinder CYV Series
SMC
A low-dust-generation type air cylinder, usable for transport in vacuum environments.
[Features]
· Being able to be placed in a vacuum chamber helps contribute to making more compact and simplified transport systems.
· Stainless steel linear guide and low-dust-generation vacuum grease.
· Reduced initial dust generation for reduced dust generated at the stroke end.
· Uses a magnetic rodless cylinder which has no sliding-induced external leaks.
· Outgassing has been reduced by surface treatments and the plastic/resin materials eliminated.
· Tube internal diameter: 15 mm, Magnetic attractive force: 59 N. Piping connection port diameter: 5/16-24 UNF.
· Tube internal diameter: 32 mm, Magnetic attractive force: 268 N. Piping connection port diameter: 7/16-20 UNF.
| Standard Price: | MYR 12,950.28- |
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| Days to Ship: | 27 Day(s) or more |

Clean Rodless Cylinder CYP Series
SMC
A magnetic rodless cylinder, used for transfers in clean environments.
[Features]
· Highly flexible piping port variations.
· Parts are cleaned, assembled and double packaged in a clean room.
· Shockless.
· Stroke adjustment.
| Standard Price: | MYR 7,831.30- |
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| Days to Ship: | 27 Day(s) or more |
| Standard Price: | MYR 2,188.45- |
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| Days to Ship: | 14 Day(s) or more |

Air Slide Table, Compatible With Rechargeable Battery 25A-MXQ Series
SMC
[Features]
・ In order to reduce product defects in the rechargeable battery manufacturing process, materials containing copper (Cu) and zinc (Zn) as the main components are not used.
* Some aluminum alloys and die-cast aluminum materials contain small amounts of copper (Cu) and zinc (Zn) as additive elements.
・ Nickel electroplating with copper base and zinc plating are not used.
* Electroless nickel plating is used.
・ Low dew point compatible grease used, it can be used at -70°C. Performance improvement in low dew point environment.
| Standard Price: | MYR 2,002.27- |
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| Days to Ship: | 11 Day(s) or more |

Air Slide, Table Rechargeable Battery Compatible 25 A-MXW Series
SMC
[Features]
・ In order to reduce product defects in the rechargeable battery manufacturing process, materials containing copper (Cu) and zinc (Zn) as the main components are not used.
* Some aluminum alloys and die-cast aluminum materials contain small amounts of copper (Cu) and zinc (Zn) as additive elements.
・ Electrolytic nickel plating and zinc plating with copper base are not used.
* Electrolytic nickel plating is used.
・ Low dew point compatible grease used, can be used at -70°C. Performance improvement in low dew point environment.
| Standard Price: | MYR 4,683.72- |
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| Days to Ship: | 27 Day(s) or more |

Air Slide Table (Symmetric) / MXS□L Series
SMC
An air slide table made by SMC
[Features]
· A compactly integrated work table and air cylinder.
· An air slide table suitable for precision assembly.
· Improved mounting repeatability of workpieces and bodies.
· An auto switch attaching groove is provided in consideration of safety.
· Also usable for vertical axis mounting.
· Dual-rod structure.
· Wide range of options.
· Symmetrical shape.
| Standard Price: | MYR 3,666.73 |
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| Days to Ship: | 32 Day(s) |

Air Slide Table, Both Sides Piping Type, MXQ□A Series
SMC
An air slide table made by SMC
[Features]
· Improved allowable kinetic energy.
· A table shaped in consideration of functionality and maintenance.
· Mounting is the same as the conventional product, the MXQ series.
· A wide range of stroke adjusters (option).
· "Overall length shortened type" table available.
· Overall height is reduced by 10% compared to the conventional product.
· 22% weight reduction.
· Piping / auto switch mounting grooves provided on both sides.
| Days to Ship: | Quote |
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SMC
An air slide table made by SMC
[Features]
· A table unit that supports long strokes by employing a linear guide.
· The rigidity of the table remains constant in any stroke position.
· Dual-rod structure.
| Standard Price: | MYR 4,463.22- |
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| Days to Ship: | 14 Day(s) or more |
| Standard Price: | MYR 3,770.10- |
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| Days to Ship: | 27 Day(s) or more |
| Standard Price: | MYR 3,646.32- |
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| Days to Ship: | 27 Day(s) or more |

Sine Rodless Cylinder, Slider Type, Ball Bushing Bearing, REAL Series
SMC
Achieves speedy transfer of workpieces for which shock should be avoided.
Semiconductor wafer, LCD substrate, magnetic disk, ceramic products, glass products.
[Features]
·Direct load loading is possible due to the integrated guide type
·It is a centralized piping type in which piping is integrated on one side plate
·Can be equipped with an auto switch
·By adopting a ball bushing bearing, stable operation is possible even if an offset load is applied
| Standard Price: | MYR 2,458.61- |
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| Days to Ship: | 17 Day(s) or more |

Air Slide Table, Rechargeable Battery Compatible 25 A-MXS Series
SMC
[Rechargeable battery compatible series]
・ In order to reduce product defects in the rechargeable battery manufacturing process, materials containing copper (Cu) and zinc (Zn) as the main components are not used.
* Some aluminum alloys and die-cast aluminum materials contain small amounts of copper (Cu) and zinc (Zn) as additive elements.
・ Electrolytic nickel plating and zinc plating with copper base are not used.
* Electrolytic nickel plating is used.
・ Low dew point compatible grease used, can be used at -70°C. Performance improvement in low dew point environment.
| Standard Price: | MYR 2,065.12- |
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| Days to Ship: | 27 Day(s) or more |
| Brand |
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| Product Series |
| CAD |
| Days to Ship |
| Type |
| Cylinder I.D.(Ø) |
| Stroke(mm) |
| Table Size: Length L(mm) |
| Max. Load Mass (Range Selectable)(kg) |
| Stroke (Range)(mm) |
| Table Material |
| Maximum Loading Weight (Range)(kg) |
| Table Size: Width W(mm) |
| Guide Type |
| Rodless Cylinder Joint Type |
| Table Size Length (Range)(mm) |
| Environment |
| Table Size Width (Range)(mm) |
| Table Size: Height H(mm) |
| Table Size Height (Range)(mm) |
| Table Surface Treatment |
| Operating Pressure(MPa) |
| Table Parallelism(µm) |
| Brand | SMC | SMC | SMC | SMC | SMC | SMC | SMC | SMC | SMC | SMC | SMC | SMC | SMC | CKD | SMC | SMC | SMC | CKD | SMC | SMC | SMC | SMC | SMC | SMC | SMC | SMC | SMC | SMC | SMC | SMC | SMC | SMC |
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| Product Series | Magnetically Coupled Rodless Cylinder, Slider Type: Slide Bearing, CY1S Series | Mechanically Jointed Rodless Cylinder, Basic Type, MY1B Series | Magnetically Coupled Rodless Cylinder, Slider Type: Ball Bushing Bearing, CY1L Series | Mechanically Jointed Rodless Cylinder, Basic Type, MY3A/3B Series | Air Slide Table Clean / Low Dust Generation 13/20/22-MXS Series | Mechanically Jointed Rodless Cylinder, Linear Guide Type MY1H Series | Magnetically Coupled Rodless Cylinder, Low Profile Guide Type, CY1F Series | Air Slide Table Clean / Low Dust Generation 13/20/22-MXQ Series | Super rodless cylinder SRG3 series with rodless form high-precision guide | Magnetically Coupled Rodless Cylinder, Linear Guide Type CY1H Series | Air Slide Table Low Thrust With High Stiffness Type MXQ□B Series | Sine Rodless Cylinder, Slider Type: Slide Bearing, REAS Series | Air Slide Table, Compatible With Rechargeable Battery 25A-MXQ Series | Air Slide, Table Rechargeable Battery Compatible 25 A-MXW Series | Sine Rodless Cylinder, Slider Type, Ball Bushing Bearing, REAL Series | Air Slide Table, Rechargeable Battery Compatible 25 A-MXS Series | ||||||||||||||||
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| Days to Ship | 14 Day(s) or more | 3 Day(s) or more | 2 Day(s) or more | 9 Day(s) or more | 3 Day(s) or more | 21 Day(s) or more | 3 Day(s) or more | Quote | Quote | 41 Day(s) or more | 9 Day(s) or more | 27 Day(s) or more | 14 Day(s) or more | 17 Day(s) or more | Quote | 27 Day(s) or more | 3 Day(s) or more | 16 Day(s) or more | 32 Day(s) or more | 31 Day(s) or more | 27 Day(s) or more | 27 Day(s) or more | 14 Day(s) or more | 11 Day(s) or more | 27 Day(s) or more | 32 Day(s) | Quote | 14 Day(s) or more | 27 Day(s) or more | 27 Day(s) or more | 17 Day(s) or more | 27 Day(s) or more |
| Type | Rodless Type | Rodless Type | L-Style Table Type | Rodless Type | Rodless Type | L-Style Table Type | L-Style Table Type | Table Type | L-Style Table Type | L-Style Table Type | Rodless Type | Rodless Type | L-Style Table Type | Rodless Type | L-Style Table Type | Rodless Type | L-Style Table Type | Rodless Type | L-Style Table Type | L-Style Table Type | Rodless Type | Rodless Type | Rodless Type | L-Style Table Type | Table Type | L-Style Table Type | L-Style Table Type | Table Type | Rodless Type | Rodless Type | Rodless Type | L-Style Table Type |
| Cylinder I.D.(Ø) | 15 | 10 | 20 ~ 25 | 15 | 16 | 20 ~ 25 | 20 ~ 25 | 16 | 20 ~ 25 | 20 ~ 25 | 10 | 15 | 20 ~ 25 | 25 | 20 ~ 25 | 15 | 20 ~ 25 | 16 ~ 32 | 16 ~ 20 | 20 ~ 25 | 32 | 32 | 15 | 20 ~ 25 | 16 | 20 | 25 | 16 | 15 | 15 | 15 | 20 ~ 25 |
| Stroke(mm) | 15 ~ 750 | 1,000 ~ 1600 | 10 ~ 150 | 25 ~ 750 | 1,000 ~ 2800 | 30 ~ 100 | 10 ~ 150 | 75 ~ 200 | 10 ~ 150 | 10 ~ 150 | 50 ~ 600 | 50 ~ 750 | 10 ~ 150 | 200 ~ 1000 | 10 ~ 150 | 100 ~ 730 | 10 ~ 150 | 100 ~ 700 | 10 ~ 150 | 10 ~ 150 | 100 ~ 700 | 100 ~ 700 | 100 ~ 750 | 10 ~ 150 | 75 ~ 200 | 50 | 50 | 100 ~ 200 | 150 ~ 500 | 150 ~ 500 | 100 ~ 750 | 10 ~ 150 |
| Table Size: Length L(mm) | 60 | 50 | 83 ~ 306 | 75 | 65 | 94 ~ 205 | 96 ~ 343 | 125 | 94 ~ 283 | 83 ~ 306 | 50 | 53 ~ 65 | 107 ~ 323.5 | 122 | 95.5 ~ 339 | 106 | 92.5 ~ 281.5 | 55 ~ 78 | 109.5 ~ 339 | 95.5 ~ 339 | 90 | 90 | 60 | 107 ~ 298 | 125 | 108 | 184 | 125 | 106 | 106 | 75 | 96 ~ 319 |
| Max. Load Mass (Range Selectable)(kg) | 5~9.2 | 5~9.2 | 5~9.2 | 5~9.2 | 5~9.2 | 5~9.2 | 5~9.2 | 5~9.2 | 5~9.2 | 5~9.2 | 5~9.2 | 5~9.2 | 5~9.2 | 5~9.2 | 5~9.2 | 5~9.2 | 5~9.2 | 5~9.2 | 5~9.2 | 5~9.2 | 5~9.2 | 5~9.2 | 5~9.2 | 5~9.2 | 5~9.2 | 5~9.2 | 5~9.2 | 5~9.2 | 5~9.2 | 5~9.2 | 5~9.2 | 5~9.2 |
| Stroke (Range)(mm) | - | - | - | - | - | - | - | - | - | - | - | - | - | - | - | - | - | - | - | - | - | - | - | - | - | - | - | - | - | - | - | - |
| Table Material | Aluminum | Aluminum | Aluminum | Aluminum | Aluminum | Stainless Steel / Aluminum | Aluminum | Aluminum | Aluminum | Aluminum | Aluminum | Aluminum | Aluminum | Aluminum | Aluminum | Aluminum | Aluminum | Aluminum | Aluminum | Aluminum | Aluminum | Aluminum | Aluminum | Aluminum | Aluminum | Aluminum | Stainless Steel | Aluminum | Aluminum | Aluminum | Aluminum | Aluminum |
| Maximum Loading Weight (Range)(kg) | - | - | - | - | - | - | - | - | - | - | - | - | - | - | - | - | - | - | - | - | - | - | - | - | - | - | - | - | - | - | - | - |
| Table Size: Width W(mm) | 73 ~ 76 | 24 | 76 ~ 92 | 92 | 41 | 60 ~ 74 | 76 ~ 92 | 74 | 60 ~ 74 | 76 ~ 92 | 43 | 57.5 ~ 99 | 60 ~ 84 | 80 | 60 ~ 70 | 71.5 | 60 ~ 74 | 36 ~ 74 | 60 ~ 70 | 60 ~ 70 | 115 | 115 | 72 | 70 ~ 84 | 74 | 76 | 70 | 74 | 71.5 | 71.5 | 92 | 76 ~ 92 |
| Guide Type | Sliding Guide | Guideless | Rolling Guide | Rolling Guide | Guideless | Rolling Guide | Rolling Guide | Rolling Guide | Rolling Guide | Rolling Guide | Rolling Guide | Guideless | Rolling Guide | Rolling Guide | Rolling Guide | Rolling Guide | Rolling Guide | Guideless / Sliding Guide | Rolling Guide | Rolling Guide | Rolling Guide | Guideless | Sliding Guide | Rolling Guide | Rolling Guide | Rolling Guide | Rolling Guide | Rolling Guide | Rolling Guide | Rolling Guide | Rolling Guide | Rolling Guide |
| Rodless Cylinder Joint Type | Magnet Type | Mechanical Joint Type | - | Magnet Type | Mechanical Joint Type | - | - | - | - | - | Mechanical Joint Type | Magnet Type | - | Mechanical Joint Type | - | Magnet Type | Mechanical Joint Type | Magnet Type | - | - | Magnet Type | Magnet Type | Magnet Type | - | - | - | - | - | Magnet Type | Magnet Type | Magnet Type | - |
| Table Size Length (Range)(mm) | - | - | - | - | - | - | - | - | - | - | - | - | - | - | - | - | - | - | - | - | - | - | - | - | - | - | - | - | - | - | - | - |
| Environment | General Purpose / Copper-Free/Fluorine-Free | General Purpose / Copper-Free/Fluorine-Free | General Purpose | General Purpose | General Purpose / Copper-Free/Fluorine-Free | General Purpose | Dust Resistant / Copper-Free/Fluorine-Free | General Purpose | General Purpose | General Purpose | General Purpose / Copper-Free/Fluorine-Free | General Purpose | Dust Resistant / Copper-Free/Fluorine-Free | General Purpose | General Purpose | General Purpose | General Purpose | General Purpose | General Purpose | General Purpose | Vacuum | General Purpose | General Purpose | General Purpose | General Purpose | General Purpose | General Purpose | General Purpose | General Purpose | General Purpose | General Purpose | General Purpose |
| Table Size Width (Range)(mm) | - | - | - | - | - | - | - | - | - | - | - | - | - | - | - | - | - | - | - | - | - | - | - | - | - | - | - | - | - | - | - | - |
| Table Size: Height H(mm) | 40 | 27 | 50 ~ 62 | 38 ~ 40 | 27 | 46 ~ 55 | 50 ~ 62 | 43 | 46 ~ 55 | 50 ~ 62 | 27 | 34 | 46 ~ 55 | 63.5 | 43 ~ 52 | 46 | 46 ~ 55 | 32 ~ 56 | 37 ~ 46 | 46 ~ 55 | 75 | 75 | 40 | 46 ~ 55 | 43 | 50 | 52 | 43 | 46 | 46 | 40 | 50 ~ 62 |
| Table Size Height (Range)(mm) | - | - | - | - | - | - | - | - | - | - | - | - | - | - | - | - | - | - | - | - | - | - | - | - | - | - | - | - | - | - | - | - |
| Table Surface Treatment | Not Provided | Anodize | Anodize | Anodize | Nickel Plating | Nickel Plating | Anodize | Anodize | Nickel Plating | Anodize | Anodize | Anodize | Nickel Plating | Anodize | - | Anodize | Heat treated | Anodize | - | - | Nickel Plating | Nickel Plating | Anodize | Nickel Plating | Anodize | Anodize | - | Anodize | Anodize | Anodize | Anodize | Anodize |
| Operating Pressure(MPa) | 0.18 to 0.7 | 0.2 to 0.8 | - | 0.18 to 0.7 | 0.2 to 0.8 | 0.15 to 0.7 | 0.15 to 0.7 | - | - | - | 0.2 to 0.8 | 0.2 to 0.7 | 0.15 to 0.7 | - | - | 0.2 to 0.7 | 0.15 to 0.7 | - | - | - | 0.05 to 0.3 | 0.05 to 0.3 | 0.18 to 0.7 | 0.15 to 0.7 | 0.15 to 0.7 | - | - | - | 0.2 to 0.7 | 0.2 to 0.7 | 0.18 to 0.7 | 0.15 to 0.7 |
| Table Parallelism(µm) | - | - | - | - | - | 40 ~ 90 | - | - | 40 ~ 125 | - | - | 50 | 40 ~ 125 | - | - | - | 40 ~ 125 | - | - | - | - | - | - | 40 ~ 125 | - | - | - | - | - | - | - | - |
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