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Pneumatic Slide Cylinders(Environment:General Purpose)

Pneumatic slide cylinders are pneumatic equipment items used to operate production lines and equipment driven by air pressure such as air tools, air hammers, air presses and air brakes. Pneumatic slide cylinders are also used to improve equipment operation. Pneumatic equipment is equipment in which air that has been pressurized or compressed by a compressor is used as the power source for operation. Varieties of pneumatic equipment include the air slide table type (providing smooth operation) and table type (incorporating a workpiece table). Efforts to make pneumatic equipment more lightweight and compact have resulted in a wide range of products enabling use for various applications. For example, there are units with linear guides enabling all-round use, and units with fall-prevention functions and other additional functions. When selecting products, users should familiarize themselves with the features of the air cylinder. The cylinder inner diameter should also be checked, along with the combination of the cylinder and equipment to be used, and the air unit (FRL).
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Brand
Product Series
CAD
Days to Ship
Type
Cylinder I.D.(Ø)
Stroke(mm)
Table Size: Length L(mm)
Max. Load Mass (Range Selectable)(kg)
Stroke (Range)(mm)
Table Material
Maximum Loading Weight (Range)(kg)
Table Size: Width W(mm)
Guide Type
Rodless Cylinder Joint Type
Table Size Length (Range)(mm)
Environment
Table Size Width (Range)(mm)
Table Size: Height H(mm)
Table Size Height (Range)(mm)
Table Surface Treatment
Operating Pressure(MPa)
Table Parallelism(µm)

    Magnetically Coupled Rodless Cylinder, Slider Type: Slide Bearing, CY1S Series

      Mechanically Jointed Rodless Cylinder, Basic Type, MY1B-Z Series

        Mechanically Jointed Rodless Cylinder, Basic Type, MY1B Series

          Mechanically Jointed Rodless Cylinder, Linear Guide Type, MY1H-Z Series

            Air Slide Table / MXS Series

              Magnetically Coupled Rodless Cylinder, Slider Type: Ball Bushing Bearing, CY1L Series

                Magnetically Coupled Rodless Cylinder, Direct Mount Type, CY3R Series

                  Mechanically Jointed Rodless Cylinder, Basic Type, MY3A/3B Series

                    Air Slide Table / MXQ Series

                      Mechanically Jointed Rodless Cylinder, Slide Bearing Guide Type, MY1M Series

                        Air Slide Table MXW Series

                          Air Slide Table MXQ Series

                            Mechanically Jointed Rodless Cylinder, Slide Bearing Guide Type, MY3M Series

                              Air Slide Table MXS Series

                                Mechanically Jointed Rodless Cylinder, Cam Follower Guide Type, MY1C Series

                                  Mechanically Jointed Rodless Cylinder, Linear Guide Type MY1H Series

                                    Mechanically Jointed Rodless Cylinder With Protective Cover, MY1□W Series

                                      Magnetically Coupled Rodless Cylinder, Low Profile Guide Type, CY1F Series

                                        Drive equipment high rigidity cylinder mini guide slide

                                          Compact Slide / MXH Series

                                            Compact Slide MXH Series

                                              Sine Rodless Cylinder, Direct Mount Type REAR Series

                                                Rod Less Shaped Super Rodless Cylinder SRL3 Series

                                                  Air Slide Table / MXJ Series

                                                    Air Slide Table / MXP Series

                                                      Air Slide Table MXJ Series

                                                        Magnetically Coupled Rodless Cylinder, Basic Type, CY3B Series

                                                          Mechanical Joint Type Rodless Cylinder, Linear Guide Type, Rechargeable Battery Compatible 25 A-MY2H Series

                                                            Super rodless cylinder SRG3 series with rodless form high-precision guide

                                                              Air Slide Table Double Ported Type, MXQ□A Series

                                                                Magnetically Coupled Rodless Cylinder, Linear Guide Type CY1H Series

                                                                  Mechanically Jointed Rodless Cylinder, Cam Follower Guide Type MY2C Series

                                                                    Air Slide Table, Reversible, MXQR Series

                                                                      Magnet Type Rodless Cylinder, Direct Mount Type Clean Series 12-CY3R Series

                                                                        Mechanical Joint Type Rodless Cylinder, Cam Follower Guide Type, Rechargeable Battery Compatible 25 A-MY1C Series

                                                                          Rodless, Magnet Type, Super Rodless Cylinder, MRL2 Series

                                                                            Linear Slide Cylinder LCG Series with Complex Function

                                                                              Linear Slide Cylinder LCM Series with Complex Function

                                                                                Drive equipment rod-less cylinder slit type ORC10 series

                                                                                  Air Slide Table (Symmetrical Shape) MXS□L Series

                                                                                    Air Slide Table Low Thrust With High Stiffness Type MXQ□B Series

                                                                                      Air Slide Table, Height Interchangeable Type, MXQ Series

                                                                                        Air Slide Table MXP Series

                                                                                          Mechanically Jointed Rodless Cylinder, Linear Guide Type, MY2H/HT Series

                                                                                            Clean Rodless Cylinder CYP Series

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                                                                                            Product Series

                                                                                            Magnetically Coupled Rodless Cylinder, Slider Type: Slide Bearing, CY1S Series

                                                                                            Mechanically Jointed Rodless Cylinder, Basic Type, MY1B-Z Series

                                                                                            Mechanically Jointed Rodless Cylinder, Basic Type, MY1B Series

                                                                                            Mechanically Jointed Rodless Cylinder, Linear Guide Type, MY1H-Z Series

                                                                                            Air Slide Table / MXS Series

                                                                                            Magnetically Coupled Rodless Cylinder, Slider Type: Ball Bushing Bearing, CY1L Series

                                                                                            Magnetically Coupled Rodless Cylinder, Direct Mount Type, CY3R Series

                                                                                            Mechanically Jointed Rodless Cylinder, Basic Type, MY3A/3B Series

                                                                                            Air Slide Table / MXQ Series

                                                                                            Mechanically Jointed Rodless Cylinder, Slide Bearing Guide Type, MY1M Series

                                                                                            Air Slide Table MXW Series

                                                                                            Air Slide Table MXQ Series

                                                                                            Mechanically Jointed Rodless Cylinder, Slide Bearing Guide Type, MY3M Series

                                                                                            Air Slide Table MXS Series

                                                                                            Mechanically Jointed Rodless Cylinder, Cam Follower Guide Type, MY1C Series

                                                                                            Mechanically Jointed Rodless Cylinder, Linear Guide Type MY1H Series

                                                                                            Mechanically Jointed Rodless Cylinder With Protective Cover, MY1□W Series

                                                                                            Magnetically Coupled Rodless Cylinder, Low Profile Guide Type, CY1F Series

                                                                                            Drive equipment high rigidity cylinder mini guide slide

                                                                                            Compact Slide / MXH Series

                                                                                            Compact Slide MXH Series

                                                                                            Sine Rodless Cylinder, Direct Mount Type REAR Series

                                                                                            Rod Less Shaped Super Rodless Cylinder SRL3 Series

                                                                                            Air Slide Table / MXJ Series

                                                                                            Air Slide Table / MXP Series

                                                                                            Air Slide Table MXJ Series

                                                                                            Magnetically Coupled Rodless Cylinder, Basic Type, CY3B Series

                                                                                            Mechanical Joint Type Rodless Cylinder, Linear Guide Type, Rechargeable Battery Compatible 25 A-MY2H Series

                                                                                            Super rodless cylinder SRG3 series with rodless form high-precision guide

                                                                                            Air Slide Table Double Ported Type, MXQ□A Series

                                                                                            Magnetically Coupled Rodless Cylinder, Linear Guide Type CY1H Series

                                                                                            Mechanically Jointed Rodless Cylinder, Cam Follower Guide Type MY2C Series

                                                                                            Air Slide Table, Reversible, MXQR Series

                                                                                            Magnet Type Rodless Cylinder, Direct Mount Type Clean Series 12-CY3R Series

                                                                                            Mechanical Joint Type Rodless Cylinder, Cam Follower Guide Type, Rechargeable Battery Compatible 25 A-MY1C Series

                                                                                            Rodless, Magnet Type, Super Rodless Cylinder, MRL2 Series

                                                                                            Linear Slide Cylinder LCG Series with Complex Function

                                                                                            Linear Slide Cylinder LCM Series with Complex Function

                                                                                            Drive equipment rod-less cylinder slit type ORC10 series

                                                                                            Air Slide Table (Symmetrical Shape) MXS□L Series

                                                                                            Air Slide Table Low Thrust With High Stiffness Type MXQ□B Series

                                                                                            Air Slide Table, Height Interchangeable Type, MXQ Series

                                                                                            Air Slide Table MXP Series

                                                                                            Mechanically Jointed Rodless Cylinder, Linear Guide Type, MY2H/HT Series

                                                                                            Clean Rodless Cylinder CYP Series

                                                                                            CAD
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                                                                                            Days to Ship 3 Day(s) or more 3 Day(s) or more 3 Day(s) or more 3 Day(s) or more 2 Day(s) or more 3 Day(s) or more 3 Day(s) or more 3 Day(s) or more 3 Day(s) or more 3 Day(s) or more Quote 14 Day(s) or more 3 Day(s) or more 22 Day(s) or more 3 Day(s) or more 3 Day(s) or more 26 Day(s) or more 3 Day(s) or more 9 Day(s) or more 3 Day(s) or more 3 Day(s) or more 14 Day(s) or more 14 Day(s) or more 3 Day(s) or more 2 Day(s) or more Quote 3 Day(s) or more 27 Day(s) or more 17 Day(s) or more 14 Day(s) or more 26 Day(s) or more 21 Day(s) or more 3 Day(s) or more 27 Day(s) or more 27 Day(s) or more 16 Day(s) or more 15 Day(s) or more 13 Day(s) or more 9 Day(s) or more 9 Day(s) or more 32 Day(s) or more 31 Day(s) or more Quote 3 Day(s) or more 27 Day(s) or more
                                                                                            TypeRodless TypeRodless TypeRodless TypeRodless TypeL-Style Table TypeRodless TypeRodless TypeRodless TypeL-Style Table TypeRodless TypeTable TypeL-Style Table TypeRodless TypeL-Style Table TypeRodless TypeRodless TypeRodless TypeRodless TypeL-Style Table TypeL-Style Table TypeL-Style Table TypeRodless TypeRodless TypeL-Style Table TypeTable TypeL-Style Table TypeRodless TypeRodless TypeRodless TypeL-Style Table TypeRodless TypeRodless TypeL-Style Table TypeRodless TypeRodless TypeRodless TypeL-Style Table TypeL-Style Table TypeRodless TypeL-Style Table TypeL-Style Table TypeL-Style Table TypeTable TypeRodless TypeRodless Type
                                                                                            Cylinder I.D.(Ø)6 ~ 4025 ~ 4010 ~ 10025 ~ 406 ~ 256 ~ 406 ~ 6316 ~ 636 ~ 2516 ~ 638 ~ 256 ~ 2516 ~ 636 ~ 2516 ~ 6310 ~ 2016 ~ 6310 ~ 254.5 ~ 106 ~ 206 ~ 1010 ~ 4012 ~ 1004.5 ~ 86 ~ 164.5 ~ 86 ~ 6316 ~ 2516 ~ 256 ~ 2510 ~ 3216 ~ 406 ~ 256 ~ 6316 ~ 636 ~ 326 ~ 204.5 ~ 8106 ~ 86 ~ 206 ~ 256 ~ 1616 ~ 4015 ~ 32
                                                                                            Stroke(mm)1,000 ~ 14901,000 ~ 49001,000 ~ 27001,000 ~ 149010 ~ 1501,000 ~ 14751,000 ~ 19801,000 ~ 298010 ~ 1251,000 ~ 490025 ~ 30010 ~ 1501,000 ~ 290010 ~ 1501,000 ~ 490050 ~ 6001,000 ~ 18401,000 ~ 11505 ~ 305 ~ 6010 ~ 501,000 ~ 1850200 ~ 10005 ~ 205 ~ 305 ~ 201,000 ~ 4800100 ~ 600200 ~ 100010 ~ 1501,000 ~ 14001,000 ~ 451010 ~ 1501,000 ~ 8001,000 ~ 90050 ~ 70010 ~ 755 ~ 20100 ~ 30010 ~ 7510 ~ 15010 ~ 1505 ~ 301,000 ~ 1470100 ~ 700
                                                                                            Table Size: Length L(mm)40 ~ 95110 ~ 17050 ~ 400114 ~ 17042 ~ 30640 ~ 13634 ~ 11865 ~ 22042 ~ 21480 ~ 23084 ~ 20942 ~ 28365 ~ 22042 ~ 30680 ~ 23050 ~ 100110 ~ 29038 ~ 8942 ~ 6742 ~ 11442 ~ 8938 ~ 9081 ~ 23842.5 ~ 54.521 ~ 5642.5 ~ 54.535 ~ 12270 ~ 10088 ~ 12254.5 ~ 33946 ~ 13870 ~ 18041.5 ~ 281.534 ~ 11880 ~ 23040 ~ 7866 ~ 13042 ~ 54194 ~ 39442 ~ 15159.5 ~ 33954.5 ~ 33921 ~ 5070 ~ 18067 ~ 90
                                                                                            Max. Load Mass (Range Selectable)(kg)1~4.9 ~ 40~5720~39.9 ~ 40~575~9.2 ~ 120~150.120~39.9 ~ 40~570.05~0.8 ~ 5~9.21~4.9 ~ 40~570.05~0.8 ~ 1~4.95~9.2 ~ 60~800.05~0.8 ~ 5~9.210~19 ~ 153~1~4.9 ~ 10~190.05~0.8 ~ 5~9.210~19 ~ 153~0.05~0.8 ~ 5~9.210~19 ~ 120~150.15~9.2 ~ 10~1910~19 ~ 153~1~4.9 ~ 10~19---0.05~0.8 ~ 1~4.9-0.05~0.80.05~0.8 ~ 1~4.90.05~0.80.05~0.8 ~ 1~4.910~19 ~ 20~39.91~4.9 ~ 5~9.20.05~0.8 ~ 5~9.21~4.9 ~ 40~5710~19 ~ 60~800.05~0.8 ~ 5~9.20.05~0.8 ~ 1~4.910~19 ~ 120~150.11~4.9 ~ 10~1910~19 ~ 40~57--0.05~0.8 ~ 1~4.90.05~0.8 ~ 5~9.20.05~0.8 ~ 5~9.20.05~0.8 ~ 1~4.910~19 ~ 60~801~4.9 ~ 5~9.2
                                                                                            Stroke (Range)(mm)51~100 ~ 1001~200031~50 ~ 2001~101~250 ~ 2001~31~50 ~ 1001~2000-101~250 ~ 1001~2000101~250 ~ 1001~200051~100 ~ 2001~-51~100 ~ 2001~--51~100 ~ 2001~-51~100 ~ 2001~31~50 ~ 501~1000101~250 ~ 2001~31~50 ~ 251~500--~30101~250 ~ 1001~2000-----101~250 ~ 501~1000-~30 ~ 31~50251~500 ~ 501~100031~50 ~ 1001~2000~30 ~ 101~250-51~100 ~ 1001~2000--------31~50 ~ 1001~2000251~500 ~ 501~1000
                                                                                            Table MaterialAluminumAluminumAluminumAluminumAluminumAluminumAluminumAluminumStainless Steel / AluminumAluminumAluminumAluminumAluminumAluminumAluminumAluminumAluminumAluminumStainless SteelAluminumAluminumAluminumAluminumStainless SteelAluminumStainless SteelAluminumAluminumAluminumAluminumAluminumAluminumAluminumAluminumAluminumAluminumSteel / Stainless SteelStainless SteelPlasticAluminumAluminumAluminumAluminumAluminumAluminum
                                                                                            Maximum Loading Weight (Range)(kg)1.1~5.0 ~ 40.1~60.020.1~40.0 ~ 40.1~60.01.1~5.0 ~ 100.1~150.020.1~40.0 ~ 40.1~60.0-1.1~5.0 ~ 40.1~60.0~1.0 ~ 1.1~5.05.1~10.0 ~ 60.1~80.0-10.1~20.0 ~ 150.1~--10.1~20.0 ~ 150.1~-10.1~20.0 ~ 100.1~150.05.1~10.0 ~ 10.1~20.010.1~20.0 ~ 150.1~1.1~5.0 ~ 10.1~20.0---~1.0 ~ 1.1~5.0-----10.1~20.0 ~ 20.1~40.0-~1.0 ~ 1.1~5.010.1~20.0 ~ 20.1~40.010.1~20.0 ~ 60.1~80.0~1.0 ~ 5.1~10.0-10.1~20.0 ~ 80.1~100.0--------10.1~20.0 ~ 60.1~80.0~1.0 ~ 1.1~5.0
                                                                                            Table Size: Width W(mm)46 ~ 14242 ~ 6424 ~ 14090 ~ 12132 ~ 9256 ~ 18718.5 ~ 9741 ~ 13427 ~ 7468 ~ 16849 ~ 12627 ~ 7464 ~ 17632 ~ 9254 ~ 16843 ~ 78102 ~ 23650.5 ~ 128.518 ~ 2615 ~ 3115 ~ 1925.5 ~ 63.529 ~ 17020 ~ 2618 ~ 4620 ~ 2617 ~ 10048.2 ~ 71.854.5 ~ 8032 ~ 7054 ~ 13072.4 ~ 21427 ~ 7418.5 ~ 93.568 ~ 16818 ~ 11925 ~ 5418 ~ 241532 ~ 4032 ~ 7032 ~ 7018 ~ 4650.4 ~ 22969 ~ 115
                                                                                            Guide TypeSliding GuideGuidelessGuidelessRolling GuideRolling GuideRolling GuideGuidelessGuidelessRolling GuideSliding GuideRolling GuideRolling GuideSliding GuideRolling GuideRolling GuideRolling GuideSliding Guide / Rolling GuideGuidelessRolling GuideRolling GuideRolling GuideGuidelessGuideless / Sliding GuideRolling GuideRolling GuideRolling GuideGuidelessRolling GuideRolling GuideRolling GuideRolling GuideRolling GuideRolling GuideGuidelessRolling GuideGuideless / Sliding GuideRolling GuideRolling GuideGuidelessRolling GuideRolling GuideRolling GuideRolling GuideRolling GuideGuideless
                                                                                            Rodless Cylinder Joint TypeMagnet TypeMechanical Joint TypeMechanical Joint TypeMechanical Joint Type-Magnet TypeMagnet TypeMechanical Joint Type-Mechanical Joint Type--Mechanical Joint Type-Mechanical Joint TypeMechanical Joint TypeMechanical Joint TypeMagnet Type---Magnet TypeMechanical Joint Type---Magnet TypeMechanical Joint TypeMechanical Joint Type-Magnet TypeMechanical Joint TypeMechanical Joint TypeMagnet TypeMechanical Joint TypeMagnet Type--Mechanical Joint Type----Mechanical Joint TypeMagnet Type
                                                                                            Table Size Length (Range)(mm)~50.0 ~ 50.1~100.0100.1~150.0 ~ 150.1~200.0~50.0 ~ 300.1~100.1~150.0 ~ 150.1~200.0-~50.0 ~ 100.1~150.0~50.0 ~ 100.1~150.050.1~100.0 ~ 200.1~300.0-50.1~100.0 ~ 200.1~300.0--50.1~100.0 ~ 200.1~300.0-50.1~100.0 ~ 200.1~300.0~50.0 ~ 50.1~100.0100.1~150.0 ~ 200.1~300.050.1~100.0--50.1~100.0~50.0 ~ 50.1~100.0-----50.1~100.0-50.1~100.0 ~ 100.1~150.0100.1~150.050.1~100.0 ~ 150.1~200.050.1~100.0 ~ 200.1~300.0-50.1~100.0 ~ 150.1~200.0--------50.1~100.0 ~ 150.1~200.050.1~100.0
                                                                                            EnvironmentGeneral PurposeGeneral PurposeGeneral PurposeGeneral PurposeGeneral PurposeGeneral PurposeGeneral PurposeGeneral PurposeGeneral PurposeGeneral PurposeGeneral PurposeGeneral PurposeGeneral PurposeGeneral PurposeGeneral PurposeGeneral PurposeGeneral PurposeGeneral PurposeGeneral PurposeGeneral PurposeGeneral PurposeGeneral PurposeGeneral PurposeGeneral PurposeGeneral PurposeGeneral PurposeGeneral PurposeGeneral PurposeGeneral PurposeGeneral PurposeGeneral PurposeGeneral PurposeGeneral PurposeGeneral PurposeGeneral PurposeGeneral PurposeGeneral PurposeGeneral PurposeGeneral PurposeGeneral PurposeGeneral PurposeGeneral PurposeGeneral PurposeGeneral PurposeGeneral Purpose
                                                                                            Table Size Width (Range)(mm)25.1~50.0 ~ 100.1~150.025.1~50.0 ~ 50.1~75.0~25.0 ~ 100.1~150.075.1~100.0 ~ 100.1~150.0-50.1~75.0 ~ 150.1~~25.0 ~ 150.1~25.1~50.0 ~ 100.1~150.0-50.1~75.0 ~ 150.1~--50.1~75.0 ~ 150.1~-50.1~75.0 ~ 150.1~25.1~50.0 ~ 75.1~100.0100.1~150.0 ~ 150.1~50.1~75.0--~25.025.1~50.0 ~ 150.1~-----25.1~50.0 ~ 50.1~75.0-25.1~50.075.1~100.0 ~ 100.1~150.050.1~75.0 ~ 100.1~150.025.1~50.0 ~ 50.1~75.0-50.1~75.0 ~ 100.1~150.0--------50.1~75.0 ~ 100.1~150.050.1~75.0 ~ 100.1~150.0
                                                                                            Table Size: Height H(mm)27 ~ 7654 ~ 8427 ~ 19054 ~ 8420 ~ 6225 ~ 7819 ~ 9727 ~ 8420 ~ 5540 ~ 13030 ~ 7620 ~ 5533 ~ 9320 ~ 6240 ~ 13027 ~ 4652 ~ 14928 ~ 4610 ~ 1639 ~ 64.539 ~ 4726 ~ 6733 ~ 1509.5 ~ 12.517 ~ 329.5 ~ 12.517 ~ 10028 ~ 3745 ~ 63.523 ~ 5239.5 ~ 7528 ~ 5820 ~ 5519 ~ 9740 ~ 13020 ~ 5621 ~ 4810 ~ 1428.520 ~ 2420 ~ 4620 ~ 5517 ~ 3228 ~ 5845 ~ 75
                                                                                            Table Size Height (Range)(mm)20.1~30.0 ~ 75.1~100.050.1~75.0 ~ 75.1~100.020.1~30.0 ~ 100.1~50.1~75.0 ~ 75.1~100.0-20.1~30.0 ~ 75.1~100.0~20.0 ~ 75.1~100.020.1~30.0 ~ 75.1~100.0-30.1~40.0 ~ 100.1~--30.1~40.0 ~ 75.1~100.0-30.1~40.0 ~ 100.1~20.1~30.0 ~ 40.1~50.050.1~75.0 ~ 100.1~20.1~30.0 ~ 40.1~50.0--40.1~50.020.1~30.0 ~ 50.1~75.0-----20.1~30.0 ~ 30.1~40.0-20.1~30.050.1~75.020.1~30.0 ~ 50.1~75.0~20.0 ~ 50.1~75.0-30.1~40.0 ~ 100.1~--------20.1~30.0 ~ 50.1~75.040.1~50.0 ~ 50.1~75.0
                                                                                            Table Surface TreatmentNot ProvidedAnodizeAnodizeAnodizeAnodizeAnodizeAnodizeNickel PlatingNickel PlatingAnodizeAnodizeNickel PlatingAnodizeAnodizeNickel PlatingAnodizeAnodizeAnodize-AnodizeAnodizeAnodizeAnodize---AnodizeAnodizeAnodize-AnodizeAnodizeHeat treatedAnodizeNickel PlatingAnodize---Anodize---AnodizeNickel Plating
                                                                                            Operating Pressure(MPa)0.18 to 0.70.1 to 0.80.1 to 0.8 ~ 0.2 to 0.80.1 to 0.8-0.18 to 0.70.12 to 0.7 ~ 0.16 to 0.70.15 to 0.8 ~ 0.2 to 0.80.15 to 0.70.15 to 0.8 ~ 0.2 to 0.8--0.15 to 0.7 ~ 0.2 to 0.8-0.1 to 0.8 ~ 0.15 to 0.80.15 to 0.8 ~ 0.2 to 0.80.1 to 0.8 ~ 0.15 to 0.80.2 to 0.7---0.18 to 0.7----0.12 to 0.7 ~ 0.16 to 0.70.1 to 0.8 ~ 0.15 to 0.8--0.2 to 0.70.1 to 0.8 ~ 0.15 to 0.80.15 to 0.70.12 to 0.7 ~ 0.16 to 0.70.1 to 0.8 ~ 0.15 to 0.8--------0.1 to 0.8 ~ 0.15 to 0.80.05 to 0.3
                                                                                            Table Parallelism(µm)--------25 ~ 95120-25 ~ 125-----503050 ~ 10050 ~ 100--302030-----5025 ~ 125----0.03----20--

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