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Single Axis Robots

Revolutionize your automation processes with our cutting-edge Single Axis Robots. Engineered for precision and efficiency, these robots offer seamless motion control along a single axis, ensuring optimal performance across various industrial applications. Boasting high-speed capabilities and exceptional accuracy, our robots streamline production processes, maximizing productivity while minimizing downtime. Constructed with robust materials and advanced components, these Single Axis Robots deliver unparalleled reliability and durability, even in challenging environments. Equipped with precision linear guides and ball screws, they guarantee smooth and precise movement, maintaining consistent performance throughout operation. From pick-and-place tasks to assembly operations and material handling applications, these versatile robots provide unmatched efficiency and flexibility, adapting to your specific automation needs.
Days to Ship
  • All
  • 2 Day(s) or Less
  • 3 Day(s) or Less
  • 9 Day(s) or Less
  • 10 Day(s) or Less
  • 11 Day(s) or Less
  • 12 Day(s) or Less
  • 13 Day(s) or Less
  • 14 Day(s) or Less
  • 15 Day(s) or Less
  • 16 Day(s) or Less
Brand
Product Series
CAD
Days to Ship
Stroke(mm)
Type
Max. Transportable Mass Range (Horizontal)(kg)
Max. Transportable Mass (Horizontal)(kg)
Max. Transportable Mass Range (Vertical)(kg)
Drive Method
Max. Transportable Mass (Vertical)(kg)
Main Body, Peripheral Components
Lead(mm)
Guide
Input Power Supply
Position Detection
I/O Module
Max. Thrust Force Range(N)
Table Length L1(mm)
Positioning Repeatability(µm)
Maximum Velocity(mm/sec)
Table Width W1(mm)
Brake
Operating Environment
Max. Thrust Force(N)
Noise Filter

    Single Axis Robots RS1 - Straight

      Electric Actuator, Slider Type, Ball Screw Drive, Motorless Type LEFS Series

        Electric Actuator With Motor Specification FLCR Table Type

          Electric Slider, EZS Series

            Compact Linear Actuator, DR Series with AZ

              Electric Slide Table, Compact Type LES Series

                Electric Actuator Slider Type Belt Drive LEFB Series Step Motor/Servo Motor

                  Single Axis Robots RS2 - Straight

                    Compact Electric Cylinder, DRS2 Series

                      Electric Slider, EAS Series

                        Single Axis Robots RS1 - Motor Folded -

                          Electric Actuator With Motor Specification EBS-M Slider Type

                            Electric Cylinder, EAC Series

                              Single Axis Robots RS2 - Motor Folded -

                                Single Axis Robots RSH4 - Straight -

                                  NS Slider, ELEWAVE Series

                                    Single Axis Robots RS3 - Straight

                                      Single Axis Robot RSH1 - Straight

                                        Single Axis Robot RSH2 - Straight

                                          Single Axis Robot RSH3 - Straight

                                            Single Axis Robots RS3 - Motor Folded

                                              Single Axis Robots RSH5 - Straight -

                                                Card Motor LAT3 series

                                                  Electric Cylinder LZB Series

                                                    Electric Cylinder LZC Series

                                                      Electric actuator, slider type, belt drive, motorless specification, LEFB series

                                                        Electric actuator, high stiffness slider type, ball screw drive, motorless specification, LEJS series

                                                          Electric actuator, guide-equipped rod type, motorless specification, LEYG series

                                                            Electric actuator slider type, ball screw drive, LEFS series, step motor / servo motor

                                                              Electric actuator, slider type, ball screw drive, LEFS series, AC servo motor LECS□

                                                                Electric actuator slider type, ball screw drive, LEFS series, AC servo motor LECY□

                                                                  Electric actuator slider type, belt drive, LEFB series, AC servo motor LECS□

                                                                    Electric actuator slider type, belt drive, LEFB series, AC servo motor LECY□

                                                                      Electric actuator, high stiffness slider type, ball screw drive, LEJS series LECS□

                                                                        Electric actuator, high stiffness slider type, ball screw drive, LEJS series LECY□

                                                                          Electric actuator, high stiffness slider type, belt drive, LEJB series, AC servo motor LECS□

                                                                            Electric actuator, high stiffness slider type, belt drive, LEJB series, AC servo motor LECY□

                                                                              Electric actuator guide rod slider belt drive LEL series step motor

                                                                                Electric actuator, low-profile slider type, basic model, LEMB series, step motor

                                                                                  Electric actuator, low-profile slider type, cam follower guide type, LEMC series, step motor

                                                                                    Electric actuator, slim slider type, linear guide single-axis/double-axis LEMH/LEMHT series

                                                                                      Electric actuator miniature rod type LEPY series step motor (servo 24 V DC)

                                                                                        Electric actuator miniature slide table type LEPS series step motor

                                                                                          Electric actuator rod type LEY series step motor / servo motor

                                                                                            Electric actuator rod type LEY series AC servo motor LECS□

                                                                                            Brand

                                                                                            MISUMI

                                                                                            SMC

                                                                                            CKD

                                                                                            ORIENTAL MOTOR

                                                                                            ORIENTAL MOTOR

                                                                                            SMC

                                                                                            SMC

                                                                                            MISUMI

                                                                                            ORIENTAL MOTOR

                                                                                            ORIENTAL MOTOR

                                                                                            MISUMI

                                                                                            CKD

                                                                                            ORIENTAL MOTOR

                                                                                            MISUMI

                                                                                            MISUMI

                                                                                            KOGANEI

                                                                                            MISUMI

                                                                                            MISUMI

                                                                                            MISUMI

                                                                                            MISUMI

                                                                                            MISUMI

                                                                                            MISUMI

                                                                                            SMC

                                                                                            SMC

                                                                                            SMC

                                                                                            SMC

                                                                                            SMC

                                                                                            SMC

                                                                                            SMC

                                                                                            SMC

                                                                                            SMC

                                                                                            SMC

                                                                                            SMC

                                                                                            SMC

                                                                                            SMC

                                                                                            SMC

                                                                                            SMC

                                                                                            SMC

                                                                                            SMC

                                                                                            SMC

                                                                                            SMC

                                                                                            SMC

                                                                                            SMC

                                                                                            SMC

                                                                                            SMC

                                                                                            Product Series

                                                                                            Single Axis Robots RS1 - Straight

                                                                                            Electric Actuator, Slider Type, Ball Screw Drive, Motorless Type LEFS Series

                                                                                            Electric Actuator With Motor Specification FLCR Table Type

                                                                                            Electric Slider, EZS Series

                                                                                            Compact Linear Actuator, DR Series with AZ

                                                                                            Electric Slide Table, Compact Type LES Series

                                                                                            Electric Actuator Slider Type Belt Drive LEFB Series Step Motor/Servo Motor

                                                                                            Single Axis Robots RS2 - Straight

                                                                                            Compact Electric Cylinder, DRS2 Series

                                                                                            Electric Slider, EAS Series

                                                                                            Single Axis Robots RS1 - Motor Folded -

                                                                                            Electric Actuator With Motor Specification EBS-M Slider Type

                                                                                            Electric Cylinder, EAC Series

                                                                                            Single Axis Robots RS2 - Motor Folded -

                                                                                            Single Axis Robots RSH4 - Straight -

                                                                                            NS Slider, ELEWAVE Series

                                                                                            Single Axis Robots RS3 - Straight

                                                                                            Single Axis Robot RSH1 - Straight

                                                                                            Single Axis Robot RSH2 - Straight

                                                                                            Single Axis Robot RSH3 - Straight

                                                                                            Single Axis Robots RS3 - Motor Folded

                                                                                            Single Axis Robots RSH5 - Straight -

                                                                                            Card Motor LAT3 series

                                                                                            Electric Cylinder LZB Series

                                                                                            Electric Cylinder LZC Series

                                                                                            Electric actuator, slider type, belt drive, motorless specification, LEFB series

                                                                                            Electric actuator, high stiffness slider type, ball screw drive, motorless specification, LEJS series

                                                                                            Electric actuator, guide-equipped rod type, motorless specification, LEYG series

                                                                                            Electric actuator slider type, ball screw drive, LEFS series, step motor / servo motor

                                                                                            Electric actuator, slider type, ball screw drive, LEFS series, AC servo motor LECS□

                                                                                            Electric actuator slider type, ball screw drive, LEFS series, AC servo motor LECY□

                                                                                            Electric actuator slider type, belt drive, LEFB series, AC servo motor LECS□

                                                                                            Electric actuator slider type, belt drive, LEFB series, AC servo motor LECY□

                                                                                            Electric actuator, high stiffness slider type, ball screw drive, LEJS series LECS□

                                                                                            Electric actuator, high stiffness slider type, ball screw drive, LEJS series LECY□

                                                                                            Electric actuator, high stiffness slider type, belt drive, LEJB series, AC servo motor LECS□

                                                                                            Electric actuator, high stiffness slider type, belt drive, LEJB series, AC servo motor LECY□

                                                                                            Electric actuator guide rod slider belt drive LEL series step motor

                                                                                            Electric actuator, low-profile slider type, basic model, LEMB series, step motor

                                                                                            Electric actuator, low-profile slider type, cam follower guide type, LEMC series, step motor

                                                                                            Electric actuator, slim slider type, linear guide single-axis/double-axis LEMH/LEMHT series

                                                                                            Electric actuator miniature rod type LEPY series step motor (servo 24 V DC)

                                                                                            Electric actuator miniature slide table type LEPS series step motor

                                                                                            Electric actuator rod type LEY series step motor / servo motor

                                                                                            Electric actuator rod type LEY series AC servo motor LECS□

                                                                                            CAD
                                                                                            • 2D / 3D
                                                                                            • 2D / 3D
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                                                                                            • 2D / 3D
                                                                                            Days to Ship 19 Day(s) or more 3 Day(s) or more 15 Day(s) or more 16 Day(s) or more 20 Day(s) 3 Day(s) or more 14 Day(s) or more 19 Day(s) or more 17 Day(s) or more 20 Day(s) or more 19 Day(s) or more 17 Day(s) or more 17 Day(s) or more 19 Day(s) or more 19 Day(s) or more 18 Day(s) or more 19 Day(s) or more 19 Day(s) or more 19 Day(s) or more 19 Day(s) or more 19 Day(s) or more 19 Day(s) or more Quote Quote Quote Quote Quote Quote Quote Quote Quote Quote Quote Quote Quote Quote Quote Quote Quote Quote Quote Quote Quote Quote Quote
                                                                                            Stroke(mm)50 ~ 4001,000 ~ 95050 ~ 10050 ~ 85025 ~ 3030 ~ 1501,000 ~ 300050 ~ 80040 ~ 5050 ~ 50050 ~ 40050 ~ 110050 ~ 30050 ~ 800150 ~ 10502050 ~ 800150 ~ 800150 ~ 1050150 ~ 105050 ~ 800150 ~ 105010 ~ 5010 ~ 20020 ~ 200300 ~ 3000200 ~ 150030 ~ 30050 ~ 120050 ~ 120050 ~ 1200300 ~ 3000300 ~ 3000200 ~ 1500200 ~ 1500200 ~ 3000200 ~ 3000100 ~ 100050 ~ 200050 ~ 200050 ~ 150025 ~ 7525 ~ 5030 ~ 50030 ~ 500
                                                                                            TypeSliderSliderSliderSlider-SliderSliderSliderRodSliderSliderSliderSliderSliderSliderSliderSliderSliderSliderSliderSliderSliderSliderRodRodSliderSliderRodSliderSliderSliderSliderSliderSliderSliderSliderSliderSliderSliderSliderSliderRodSliderRodRod
                                                                                            Max. Transportable Mass Range (Horizontal)(kg)0~2.0 / 2.1~5.0 / 5.1~10.05.1~10.0 / 10.1~20.0 / 20.1~50.0 / 50.1~100.02.1~5.0 / 5.1~10.0 / 10.1~20.05.1~10.0 / 10.1~20.0 / 20.1~50.0 / 50.1~100.0-0~2.0 / 2.1~5.00~2.0 / 2.1~5.0 / 5.1~10.0 / 10.1~20.0 / 20.1~50.02.1~5.0 / 5.1~10.02.1~5.0 / 5.1~10.0 / 20.1~50.05.1~10.0 / 10.1~20.0 / 20.1~50.00~2.0 / 2.1~5.0 / 5.1~10.010.1~20.0 / 20.1~50.0 / 50.1~100.05.1~10.0 / 10.1~20.0 / 20.1~50.0 / 50.1~100.02.1~5.0 / 5.1~10.010.1~20.0 / 20.1~50.0 / 50.1~100.00~2.05.1~10.0 / 10.1~20.010.1~20.0 / 20.1~50.05.1~10.0 / 10.1~20.0 / 20.1~50.020.1~50.0 / 50.1~100.05.1~10.0 / 10.1~20.010.1~20.0 / 20.1~50.0 / 50.1~100.00~2.02.1~5.0 / 5.1~10.0 / 10.1~20.02.1~5.0 / 5.1~10.0 / 10.1~20.02.1~5.0 / 10.1~20.0 / 20.1~50.010.1~20.0 / 20.1~50.0 / 50.1~100.010.1~20.0 / 20.1~50.0 / 50.1~100.02.1~5.0 / 5.1~10.0 / 10.1~20.0 / 20.1~50.0 / 50.1~100.05.1~10.0 / 10.1~20.0 / 20.1~50.0 / 50.1~100.05.1~10.0 / 10.1~20.0 / 20.1~50.0 / 50.1~100.02.1~5.0 / 10.1~20.0 / 20.1~50.02.1~5.0 / 10.1~20.0 / 20.1~50.010.1~20.0 / 20.1~50.0 / 50.1~100.010.1~20.0 / 20.1~50.0 / 50.1~100.05.1~10.0 / 10.1~20.0 / 20.1~50.05.1~10.0 / 10.1~20.0 / 20.1~50.02.1~5.05.1~10.0 / 10.1~20.05.1~10.0 / 10.1~20.05.1~10.0 / 10.1~20.00~2.0 / 2.1~5.0 / 5.1~10.00~2.02.1~5.0 / 5.1~10.0 / 10.1~20.0 / 20.1~50.0 / 50.1~100.010.1~20.0 / 20.1~50.0 / 50.1~100.0
                                                                                            Max. Transportable Mass (Horizontal)(kg)2 ~ 610 ~ 604 ~ 117.5 ~ 60-1 ~ 51 ~ 254 ~ 105 ~ 407.5 ~ 302 ~ 613.3 ~ 807.5 ~ 604 ~ 1015 ~ 601 ~ 26 ~ 1212 ~ 407 ~ 5030 ~ 806 ~ 1215 ~ 8012.4 ~ 202.4 ~ 205 ~ 2515 ~ 8518 ~ 605 ~ 6510 ~ 6010 ~ 605 ~ 255 ~ 2515 ~ 8515 ~ 8510 ~ 3010 ~ 303 ~ 56 ~ 1110 ~ 2010 ~ 201 ~ 60.75 ~ 23 ~ 9018 ~ 60
                                                                                            Max. Transportable Mass Range (Vertical)(kg)0~2.0 / 2.1~5.02.1~5.0 / 5.1~10.0 / 10.1~20.0 / 20.1~50.00~2.0 / 2.1~5.0 / 5.1~10.02.1~5.0 / 5.1~10.0 / 10.1~20.0 / 20.1~50.0-0~2.0 / 2.1~5.0-0~2.02.1~5.0 / 5.1~10.0 / 10.1~20.0 / 20.1~50.02.1~5.0 / 5.1~10.0 / 10.1~20.00~2.0 / 2.1~5.02.1~5.0 / 5.1~10.0 / 10.1~20.0 / 20.1~50.00~2.0 / 2.1~5.0 / 5.1~10.0 / 10.1~20.0 / 20.1~50.00~2.02.1~5.0 / 5.1~10.0 / 10.1~20.00~2.00~2.0 / 2.1~5.02.1~5.0 / 5.1~10.02.1~5.0 / 5.1~10.0 / 10.1~20.0-0~2.0 / 2.1~5.02.1~5.0 / 5.1~10.0 / 10.1~20.00~2.0---2.1~5.0 / 5.1~10.0 / 10.1~20.05.1~10.0 / 10.1~20.0 / 20.1~50.00~2.0 / 2.1~5.0 / 5.1~10.0 / 10.1~20.0 / 20.1~50.02.1~5.0 / 5.1~10.0 / 10.1~20.0 / 20.1~50.02.1~5.0 / 5.1~10.0 / 10.1~20.0 / 20.1~50.0--2.1~5.0 / 5.1~10.0 / 10.1~20.02.1~5.0 / 5.1~10.0 / 10.1~20.0------0~2.00~2.00~2.0 / 2.1~5.0 / 5.1~10.0 / 10.1~20.0 / 20.1~50.0 / 50.1~100.05.1~10.0 / 10.1~20.0 / 20.1~50.0
                                                                                            Drive MethodRolled Ball ScrewRolled Ball ScrewRolled Ball ScrewRolled Ball ScrewRolled Ball Screw / Ground Ball ScrewSlide ScrewBeltRolled Ball ScrewRolled Ball Screw / Ground Ball ScrewRolled Ball ScrewRolled Ball ScrewRolled Ball ScrewRolled Ball ScrewRolled Ball ScrewRolled Ball ScrewRack and PinionRolled Ball ScrewRolled Ball ScrewRolled Ball ScrewRolled Ball ScrewRolled Ball ScrewRolled Ball ScrewLinear MotorSlide ScrewRolled Ball ScrewBeltRolled Ball ScrewRolled Ball ScrewRolled Ball ScrewRolled Ball ScrewRolled Ball ScrewBeltBeltRolled Ball ScrewRolled Ball ScrewBeltBeltBeltBeltBeltBeltSlide ScrewSlide ScrewRolled Ball ScrewRolled Ball Screw
                                                                                            Max. Transportable Mass (Vertical)(kg)1 ~ 44 ~ 300.8 ~ 8.53.5 ~ 30-0.25 ~ 5-1 ~ 210 ~ 502.5 ~ 141 ~ 43.3 ~ 402 ~ 301 ~ 24 ~ 200.42 ~ 44 ~ 84 ~ 16-2 ~ 44 ~ 200.05 ~ 0.1---3 ~ 207 ~ 440.5 ~ 234 ~ 304 ~ 30--3 ~ 203 ~ 20------0.25 ~ 1.50.25 ~ 1.52 ~ 538 ~ 46
                                                                                            Main Body, Peripheral ComponentsMain BodyMain BodyMain BodyMain Body-Main BodyMain BodyMain BodyMain BodyMain BodyMain BodyMain BodyMain BodyMain BodyMain BodyMain BodyMain BodyMain BodyMain BodyMain BodyMain BodyMain BodyMain BodyMain BodyMain BodyMain BodyMain BodyMain BodyMain BodyMain BodyMain BodyMain BodyMain BodyMain BodyMain BodyMain BodyMain BodyMain BodyMain BodyMain BodyMain BodyMain BodyMain BodyMain BodyMain Body
                                                                                            Lead(mm)2 ~ 126 ~ 302 ~ 86 ~ 12-4 ~ 1648 ~ Equivalent to 546 ~ 202 ~ 83 ~ 122 ~ 122 ~ 203 ~ 126 ~ 205 ~ 300.016 ~ 206 ~ 205 ~ 305 ~ 206 ~ 205 ~ 30-2 ~ 122 ~ 12Equivalent to 548 ~ 303 ~ 205 ~ 306 ~ 306 ~ 30Equivalent to 54Equivalent to 548 ~ 308 ~ 3027 ~ 4227 ~ 4248 Equivalent48 Equivalent48 Equivalent48 Equivalent4 ~ 104 ~ 102.5 ~ 163 ~ 20
                                                                                            Guide-ProvidedProvidedProvided-ProvidedProvided-Not Provided / ProvidedProvided-ProvidedNot Provided / Provided-ProvidedProvided-----ProvidedProvidedNot ProvidedNot ProvidedProvidedProvidedProvidedProvidedProvidedProvidedProvidedProvidedProvidedProvidedProvidedProvidedProvidedProvidedProvidedProvidedProvidedProvidedNot ProvidedNot Provided
                                                                                            Input Power SupplyDC24V-DC24V/DC48VAC Single-Phase, 200 ~ 230V / DC24V/DC48V-DC24VDC24VDC24VDC24V/DC48VDC24V / AC Single-Phase, 200 ~ 230V / DC24V/DC48VDC24VDC24V/DC48VDC24V / AC Single-Phase, 200 ~ 230V / DC24V/DC48VDC24VAC Single-Phase, 100 ~ 115V / AC Single-Phase, 200 ~ 230VDC24VDC24VAC Single-Phase, 100 ~ 115V / AC Single-Phase, 200 ~ 230VAC Single-Phase, 100 ~ 115V / AC Single-Phase, 200 ~ 230VAC Single-Phase, 100 ~ 115V / AC Single-Phase, 200 ~ 230VDC24VAC Single-Phase, 100 ~ 115V / AC Single-Phase, 200 ~ 230VDC24VDC24VDC24V---DC24V--------DC24VDC24VDC24VDC24VDC24VDC24VDC24V-
                                                                                            Position DetectionIncrementalIncrementalIncrementalAbsolute-IncrementalIncremental / AbsoluteIncrementalAbsoluteAbsoluteIncrementalAbsoluteAbsoluteIncrementalIncrementalIncrementalIncrementalIncrementalIncrementalIncrementalIncrementalIncrementalIncremental-----IncrementalIncremental / AbsoluteAbsoluteIncremental / AbsoluteAbsoluteIncremental / AbsoluteAbsoluteIncremental / AbsoluteAbsoluteIncrementalIncrementalIncrementalIncrementalIncrementalIncrementalIncrementalIncremental / Absolute
                                                                                            I/O ModuleNPN / PNP / CC-Link / DeviceNet-Not ProvidedNot Provided-NPN / PNP / CC-Link / DeviceNet / Ethernet / Not Provided / EtherCAT / IO-Link / PROFINETNPN / PNP / CC-Link / DeviceNet / Ethernet / Not Provided / EtherCAT / PROFINETNPN / PNP / CC-Link / DeviceNetNot ProvidedNot Provided-Not ProvidedNot ProvidedNPN / PNP / CC-Link / DeviceNetNPN / PNP / CC-Link / DeviceNetINPOS SignalNPN / PNP / CC-Link / DeviceNetNPN / PNP / CC-Link / DeviceNetNPN / PNP / CC-Link / DeviceNetNPN / PNP / CC-Link / DeviceNetNPN / PNP / CC-Link / DeviceNetNPN / PNP / CC-Link / DeviceNetNPN / PNP / Not ProvidedNPN / PNP / Not ProvidedNPN / PNP / Not Provided---NPN / PNP / DeviceNet / Ethernet / Not Provided / EtherCAT / IO-Link / PROFINET--------NPN / PNP / DeviceNet / Ethernet / Not Provided / EtherCAT / PROFINETNPN / PNP / DeviceNet / Ethernet / Not Provided / EtherCAT / PROFINETNPN / PNP / Ethernet / Not Provided / EtherCAT / PROFINETNPN / PNP / Ethernet / Not Provided / EtherCAT / PROFINETNPN / PNP / DeviceNet / Ethernet / Not Provided / EtherCAT / PROFINETNPN / PNP / DeviceNet / Ethernet / Not Provided / EtherCAT / PROFINETNPN / PNP / DeviceNet / Ethernet / Not Provided / EtherCAT / IO-Link / PROFINET-
                                                                                            Max. Thrust Force Range(N)0~100 / 101~2000~100 / 101~200 / 201~300 / 301~500 / 501~10000~100 / 101~200 / 201~3000~100 / 101~200 / 301~500-0~100 / 101~2000~100 / 101~200 / 201~3000~1000~100 / 101~200 / 301~5000~100 / 101~2000~100 / 101~2000~100 / 101~200 / 201~300 / 301~500 / 501~10000~100 / 101~200 / 301~5000~100301~5000~1000~100 / 101~2000~100 / 101~200 / 201~3000~100 / 101~200 / 301~5000~100 / 101~200 / 301~5000~100 / 101~200301~5000~1000~100 / 101~2000~100 / 101~2000~100 / 101~200 / 201~300101~200 / 201~300 / 301~500 / 501~1000101~200 / 201~300 / 301~500 / 501~10000~100 / 101~200 / 201~300 / 301~500 / 501~10000~100 / 101~200 / 201~300 / 301~500 / 501~10000~100 / 101~200 / 201~300 / 301~500 / 501~10000~100 / 101~200 / 201~3000~100 / 101~200 / 201~300101~200 / 201~300 / 301~500 / 501~1000101~200 / 201~300 / 301~500 / 501~10000~100 / 101~200 / 201~3000~100 / 101~200 / 201~3000~1000~100 / 101~2000~100 / 101~2000~100 / 101~2000~1000~1000~100 / 101~200 / 201~300 / 301~500 / 501~1000 / 1001~101~200 / 201~300 / 301~500 / 501~1000
                                                                                            Table Length L1(mm)58102 ~ 170116 ~ 21372 ~ 108-88.5 ~ 316.572 ~ 17070121.545 ~ 655890 ~ 135-708631907878154909060 ~ 150--102 ~ 170160 ~ 172-72 ~ 170102 ~ 170102 ~ 170102 ~ 170102 ~ 170160 ~ 172160 ~ 172160 ~ 172160 ~ 17264 ~ 827870 ~ 10070 ~ 100-76.4 ~ 113.2--
                                                                                            Positioning Repeatability(µm)±20±10 ~ ±202020-±50±60 ~ ±80±20±3 ~ ±10 (tip part), ±20 (Top)20±201020±20±1030±20±20±10±10±20±10±5 ~ ±90--±60±10 ~ ±20±10 ~ ±20±15 ~ ±20±10 ~ ±20±10 ~ ±20±60±60±10 ~ ±20±10 ~ ±20±40±40±80±80±80±80±50±50±20±10 ~ ±20
                                                                                            Maximum Velocity(mm/sec)100 ~ 6001,000 ~ 940100180 ~ 80020 ~ 100200 ~ 4001,500 ~ 2000300 ~ 100050 ~ 200150 ~ 800100 ~ 600100 ~ 1100150 ~ 600300 ~ 10001800-300 ~ 1000360 ~ 1200300 ~ 1800300 ~ 1200300 ~ 1000180040033 ~ 20033 ~ 2002000130 ~ 1800225 ~ 1200170 ~ 1200160 ~ 1500160 ~ 150020002000130 ~ 1800130 ~ 18002000 ~ 30002000 ~ 3000500 ~ 1000100010002000150 ~ 350150 ~ 35075 ~ 500150 ~ 1200
                                                                                            Table Width W1(mm)4150 ~ 747254 ~ 74-32.2 ~ 6039.4 ~ 74504225 ~ 644142.6 ~ 81-5011024.5528080805213549--50 ~ 74105 ~ 129-39.4 ~ 7450 ~ 7450 ~ 7450 ~ 7450 ~ 74105 ~ 129105 ~ 129105 ~ 129105 ~ 129566172.4 ~ 108.750.4 ~ 124.7-19 ~ 24--
                                                                                            BrakeNot Provided / ProvidedNot ProvidedNot ProvidedNot Provided / Provided-Not Provided / ProvidedNot Provided / ProvidedNot Provided / ProvidedNot Provided / ProvidedNot Provided / ProvidedNot Provided / ProvidedNot Provided / ProvidedNot Provided / ProvidedNot Provided / ProvidedNot Provided / ProvidedNot ProvidedNot Provided / ProvidedNot Provided / ProvidedNot Provided / ProvidedNot ProvidedNot Provided / ProvidedNot Provided / ProvidedNot ProvidedNot ProvidedNot ProvidedNot ProvidedNot ProvidedNot ProvidedNot Provided / ProvidedNot Provided / ProvidedNot Provided / ProvidedNot Provided / ProvidedNot Provided / ProvidedNot Provided / ProvidedNot Provided / ProvidedNot Provided / ProvidedNot Provided / ProvidedNot Provided / ProvidedNot Provided / ProvidedNot Provided / ProvidedNot Provided / ProvidedNot ProvidedNot ProvidedNot Provided / ProvidedNot Provided / Provided
                                                                                            Operating EnvironmentStandardStandardStandardStandardStandardStandardStandardStandardStandardStandardStandardStandardStandardStandardStandardStandardStandardStandardStandardStandardStandardStandardStandardStandardStandardStandardStandardStandardStandardStandardStandardStandardStandardStandardStandardStandardStandardStandardStandardStandardStandardStandardStandardStandardStandard
                                                                                            Max. Thrust Force(N)45 ~ 15098 ~ 58855 ~ 21043 ~ 400-7.5 ~ 18049 ~ 24527 ~ 9050 ~ 50025 ~ 14045 ~ 15044 ~ 97025 ~ 40027 ~ 9033918 to 27 ~ 42 to 6536 ~ 12084 ~ 28356 ~ 33984 ~ 33936 ~ 1203392.5 ~ 624 ~ 19624 ~ 19649 ~ 245147 ~ 833131 ~ 73649 ~ 63798 ~ 58898 ~ 58849 ~ 24549 ~ 245147 ~ 833147 ~ 83398 ~ 29498 ~ 29429.4 ~ 4958.8 ~ 107.898 ~ 19698 ~ 19610 ~ 5010 ~ 5030 ~ 1058131 ~ 736
                                                                                            Noise Filter-Not ProvidedNot ProvidedNot Provided-Not ProvidedNot Provided-Not ProvidedNot Provided-Not ProvidedNot Provided--Not Provided-Not Provided / ProvidedNot Provided / ProvidedNot Provided / Provided--Not ProvidedNot ProvidedNot ProvidedNot ProvidedNot ProvidedNot ProvidedNot Provided / ProvidedNot ProvidedNot ProvidedNot ProvidedNot ProvidedNot ProvidedNot ProvidedNot ProvidedNot ProvidedNot ProvidedNot ProvidedNot ProvidedNot ProvidedNot ProvidedNot ProvidedNot ProvidedNot Provided

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