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SMC Solenoid Valves(Number of Solenoids:Double Page3)

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  • 7 Day(s) or Less
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  • 9 Day(s) or Less
  • 10 Day(s) or Less
Brand
Product Series
CAD
Days to Ship
Number of Ports
Application
Switching Type
Voltage
Number of Solenoids
Mounting Orientation
Pipe Port Type
Specifications
Status at Power Off
Plumbing Thread Nominal
Plumbing
Applicable Cylinder Dia.(Ø)
Type
Driving Type
Connecting Tube Diameter
Pressure Rating(MPa)
Seal Type
CV Value
Pilot Air Supply

    5-Port Solenoid Valve, Base Mounted, Rechargeable Battery Compatible, 25A-VQ2000

      5-Port Solenoid Valve, Plug-in Type, Compatible With Rechargeable Batteries 25A-SQ2000 Series

        5-Port Solenoid Valve, Plug Lead Type, Compatible With Rechargeable Batteries 25A-SQ2000 Series

          5-Port Solenoid Valve, Base Mounted, Plug Lead Unit, Rechargeable Battery Compatible, 25A-VQZ1000 Series

            5-Port Solenoid Valve, Body Ported, Plug Lead Unit, Rechargeable Battery Compatible, 25A-VQZ1000

              4 / 5 Port Solenoid Valve, Elastic Seal, Clean Series 10-SYJ3000 Series

                ATEX Directive 5-Port Solenoid Valve 52-SY Series ATEX Category 2

                  5 Port Solenoid Valve, Elastic Seal, Clean Series 10-SYJ7000 Series

                    3-Port 3-Position Valve, Base Piping Type VEX3 Series

                      5-Port Solenoid Valve, Base Mounted, Clean, 10-SY3000/5000/7000/9000

                        5-Port Solenoid Valve, Body Ported, Clean, 10-SY3000/5000/7000, Type 60

                          Intrinsically Safe Explosion-Proof Structure Certified (Japan) 5-Port Solenoid Valve, Base Mounted, 51-SY5000/7000/9000

                            UL Standard Compliant Product, 3-Port Solenoid Valve, Direct Piping Type, Single Unit SY300/500 Series

                              UL Standard Compliant Product, 3-Port Solenoid Valve, Base Piping Type, Single Unit SY300/500 Series

                                CSA Standard Compliant, 5-Port Solenoid Valve, Pilot Operated, Metal Seal, VFS2000

                                  CSA Standard Compliant, 5-Port Solenoid Valve, Pilot Operated, Metal Seal, VFS3000

                                    CSA Standard Compliant, 5-Port Solenoid Valve, Pilot Operated, Metal Seal, VFS4000

                                      CSA Standard Compliant, 5-Port Solenoid Valve, Pilot Operated, Metal Seal, VFS5000

                                        CSA Standard Compliant, 5-Port Solenoid Valve, Pilot Operated, Metal Seal, VFS6000

                                          CSA Standard Compliant 5-Port Solenoid Valve, Pilot Operated, Elastic Material Seal, VFR2000

                                            ATEX Directive 5-Port Solenoid Valve, 56-VQC4000 Series, ATEX Category 3

                                              Compact 5-Port Solenoid Valve Plug-in JSY1000/3000/5000 Series

                                                5-Port Solenoid Valve, Base Mounted Type, Clean, 10-S0700

                                                  5-Port Solenoid Valve, Base Mounted, Clean, 10-VQ1000

                                                    5-Port Solenoid Valve, Base Mounted, Clean, 10-VQ2000

                                                      5-Port Solenoid Valve, Plug-in Type, Clean Series, 10-SZ3000 Series

                                                        5-Port Solenoid Valve Non-Plug-in Type Clean Series 10-SZ3000 Series

                                                          Guide integrated cylinder with valve Valve for MVGQ series (For ø25 to ø63)

                                                            Guide integrated cylinder with valve Valve for MVGQ series (For ø12 to ø20)

                                                              5-Port Solenoid Valve, Plug-in SY5000/7000 Series Valve With Pressure Sensor

                                                                4-Port Solenoid Valve, SJ2000 / 3000 Series

                                                                  5-Port Solenoid Valve, Pilot Type, Metal Seal, Plug-In / Non Plug-In, VFS5000 Series

                                                                    5-Port Solenoid Valve, Plug-In Unit, Base Mounted, Valve, VQC1000 Series

                                                                      5-Port Solenoid Valve, Plug-In Unit, Base Mounted, Valve, VQC2000 Series

                                                                        5-Port Solenoid Valve, Plug-In, Stacking Type, DIN Rail Mounted, Valve, SY3000 / 5000 Series

                                                                          Single Valve, Sub-Plate Type, IP67 Protection, SV1000 / 2000 / 3000 / 4000 Series

                                                                            CSA Standard Compliant, 5-Port Pilot Operated Solenoid Valve, Elastic Seal, VF1000/3000/5000

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                                                                            Product Series

                                                                            5-Port Solenoid Valve, Base Mounted, Rechargeable Battery Compatible, 25A-VQ2000

                                                                            5-Port Solenoid Valve, Plug-in Type, Compatible With Rechargeable Batteries 25A-SQ2000 Series

                                                                            5-Port Solenoid Valve, Plug Lead Type, Compatible With Rechargeable Batteries 25A-SQ2000 Series

                                                                            5-Port Solenoid Valve, Base Mounted, Plug Lead Unit, Rechargeable Battery Compatible, 25A-VQZ1000 Series

                                                                            5-Port Solenoid Valve, Body Ported, Plug Lead Unit, Rechargeable Battery Compatible, 25A-VQZ1000

                                                                            4 / 5 Port Solenoid Valve, Elastic Seal, Clean Series 10-SYJ3000 Series

                                                                            ATEX Directive 5-Port Solenoid Valve 52-SY Series ATEX Category 2

                                                                            5 Port Solenoid Valve, Elastic Seal, Clean Series 10-SYJ7000 Series

                                                                            3-Port 3-Position Valve, Base Piping Type VEX3 Series

                                                                            5-Port Solenoid Valve, Base Mounted, Clean, 10-SY3000/5000/7000/9000

                                                                            5-Port Solenoid Valve, Body Ported, Clean, 10-SY3000/5000/7000, Type 60

                                                                            Intrinsically Safe Explosion-Proof Structure Certified (Japan) 5-Port Solenoid Valve, Base Mounted, 51-SY5000/7000/9000

                                                                            UL Standard Compliant Product, 3-Port Solenoid Valve, Direct Piping Type, Single Unit SY300/500 Series

                                                                            UL Standard Compliant Product, 3-Port Solenoid Valve, Base Piping Type, Single Unit SY300/500 Series

                                                                            CSA Standard Compliant, 5-Port Solenoid Valve, Pilot Operated, Metal Seal, VFS2000

                                                                            CSA Standard Compliant, 5-Port Solenoid Valve, Pilot Operated, Metal Seal, VFS3000

                                                                            CSA Standard Compliant, 5-Port Solenoid Valve, Pilot Operated, Metal Seal, VFS4000

                                                                            CSA Standard Compliant, 5-Port Solenoid Valve, Pilot Operated, Metal Seal, VFS5000

                                                                            CSA Standard Compliant, 5-Port Solenoid Valve, Pilot Operated, Metal Seal, VFS6000

                                                                            CSA Standard Compliant 5-Port Solenoid Valve, Pilot Operated, Elastic Material Seal, VFR2000

                                                                            ATEX Directive 5-Port Solenoid Valve, 56-VQC4000 Series, ATEX Category 3

                                                                            Compact 5-Port Solenoid Valve Plug-in JSY1000/3000/5000 Series

                                                                            5-Port Solenoid Valve, Base Mounted Type, Clean, 10-S0700

                                                                            5-Port Solenoid Valve, Base Mounted, Clean, 10-VQ1000

                                                                            5-Port Solenoid Valve, Base Mounted, Clean, 10-VQ2000

                                                                            5-Port Solenoid Valve, Plug-in Type, Clean Series, 10-SZ3000 Series

                                                                            5-Port Solenoid Valve Non-Plug-in Type Clean Series 10-SZ3000 Series

                                                                            Guide integrated cylinder with valve Valve for MVGQ series (For ø25 to ø63)

                                                                            Guide integrated cylinder with valve Valve for MVGQ series (For ø12 to ø20)

                                                                            5-Port Solenoid Valve, Plug-in SY5000/7000 Series Valve With Pressure Sensor

                                                                            4-Port Solenoid Valve, SJ2000 / 3000 Series

                                                                            5-Port Solenoid Valve, Pilot Type, Metal Seal, Plug-In / Non Plug-In, VFS5000 Series

                                                                            5-Port Solenoid Valve, Plug-In Unit, Base Mounted, Valve, VQC1000 Series

                                                                            5-Port Solenoid Valve, Plug-In Unit, Base Mounted, Valve, VQC2000 Series

                                                                            5-Port Solenoid Valve, Plug-In, Stacking Type, DIN Rail Mounted, Valve, SY3000 / 5000 Series

                                                                            Single Valve, Sub-Plate Type, IP67 Protection, SV1000 / 2000 / 3000 / 4000 Series

                                                                            CSA Standard Compliant, 5-Port Pilot Operated Solenoid Valve, Elastic Seal, VF1000/3000/5000

                                                                            CAD
                                                                            • 2D / 3D
                                                                            • 2D / 3D
                                                                            • 2D / 3D
                                                                            • 2D / 3D
                                                                            • 2D / 3D
                                                                            • 2D / 3D
                                                                            • 2D / 3D
                                                                            • 2D / 3D
                                                                            • 2D / 3D
                                                                            • 2D / 3D
                                                                            • 2D / 3D
                                                                            • 2D / 3D
                                                                            Days to Ship 14 Day(s) or more Quote Quote 21 Day(s) Quote 11 Day(s) or more 21 Day(s) or more 27 Day(s) or more 13 Day(s) or more 14 Day(s) or more 21 Day(s) or more Quote Quote Quote 27 Day(s) or more 27 Day(s) or more 27 Day(s) or more 27 Day(s) or more 27 Day(s) or more 27 Day(s) or more Quote 14 Day(s) or more Quote 27 Day(s) or more 27 Day(s) or more Quote Quote Quote Quote Quote Quote 27 Day(s) or more Quote 27 Day(s) or more Quote 27 Day(s) or more 27 Day(s) or more
                                                                            Number of Ports5-Port Valve5-Port Valve5-Port Valve5-Port Valve5-Port Valve4-Port Valve / 5-Port Valve5-Port Valve5-Port Valve3-Port Valve5-Port Valve5-Port Valve5-Port Valve3-Port Valve3-Port Valve5-Port Valve5-Port Valve5-Port Valve5-Port Valve5-Port Valve5-Port Valve5-Port Valve5-Port Valve5-Port Valve5-Port Valve5-Port Valve5-Port Valve5-Port Valve5-Port Valve4-Port Valve5-Port Valve5-Port Valve5-Port Valve5-Port Valve5-Port Valve5-Port Valve5-Port Valve5-Port Valve
                                                                            ApplicationSingle Use / Unit for Manifold MountingUnit for Manifold MountingUnit for Manifold MountingUnit for Manifold MountingSingle UseSingle Use / Unit for Manifold MountingSingle Use / Unit for Manifold MountingSingle Use / Unit for Manifold MountingSingle Use / Unit for Manifold MountingSingle Use / Unit for Manifold MountingUnit for Manifold MountingSingle Use / Unit for Manifold MountingSingle UseUnit for Manifold MountingSingle Use / Unit for Manifold MountingSingle Use / Unit for Manifold MountingSingle Use / Unit for Manifold MountingSingle Use / Unit for Manifold MountingSingle UseSingle Use / Unit for Manifold MountingUnit for Manifold MountingUnit for Manifold MountingUnit for Manifold MountingUnit for Manifold MountingUnit for Manifold MountingUnit for Manifold MountingUnit for Manifold MountingUnit for Manifold MountingUnit for Manifold MountingUnit for Manifold MountingUnit for Manifold MountingUnit for Manifold MountingUnit for Manifold MountingUnit for Manifold MountingManifoldsManifoldsSingle Use
                                                                            Switching Type2-Position Exhaust / 3-Position Closed Center / 3-Position Exhaust Center / 3-Position Pressure Center2-Position Exhaust / 3-Position Closed Center2-Position Exhaust2-Position Exhaust2-Position Exhaust / 3-Position Closed Center / 3-Position Exhaust Center2-Position Exhaust / 3-Position Closed Center / 3-Position Exhaust Center / 3-Position Pressure Center2-Position Exhaust / 3-Position Closed Center / 3-Position Exhaust Center / 3-Position Pressure Center2-Position Exhaust / 3-Position Closed Center / 3-Position Exhaust Center / 3-Position Pressure Center3-Position Closed Center2-Position Exhaust / 3-Position Closed Center / 3-Position Exhaust Center / 3-Position Pressure Center2-Position Exhaust / 3-Position Closed Center / 3-Position Exhaust Center2-Position Exhaust / 3-Position Closed Center / 3-Position Exhaust Center / 3-Position Pressure Center2-Position Normally Closed2-Position Normally Open / 2-Position Normally Closed2-Position Exhaust / 3-Position Closed Center / 3-Position Exhaust Center / 3-Position Pressure Center / Others2-Position Exhaust / 3-Position Closed Center / 3-Position Exhaust Center / 3-Position Pressure Center / Others2-Position Exhaust / 3-Position Closed Center / 3-Position Exhaust Center / 3-Position Pressure Center / Others2-Position Exhaust / 3-Position Closed Center / 3-Position Exhaust Center / 3-Position Pressure Center / Others2-Position Exhaust2-Position Exhaust / 3-Position Closed Center / 3-Position Exhaust Center2-Position Exhaust / 3-Position Closed Center / 3-Position Exhaust Center / 3-Position Pressure Center2-Position Exhaust / 3-Position Closed Center / 3-Position Exhaust Center / 3-Position Pressure Center2-Position Exhaust2-Position Exhaust / 3-Position Closed Center / 3-Position Exhaust Center2-Position Exhaust / 3-Position Closed Center / 3-Position Exhaust Center2-Position Exhaust / 3-Position Closed Center / 3-Position Exhaust Center / 3-Position Pressure Center / Others2-Position Exhaust / 3-Position Closed Center / Others2-Position Exhaust2-Position Normally Closed2-Position Exhaust / 3-Position Closed Center2-Position Exhaust / 3-Position Exhaust Center / 3-Position Pressure Center2-Position Exhaust2-Position Exhaust / 3-Position Closed Center2-Position Exhaust / 3-Position Closed Center / 3-Position Pressure Center2-Position Exhaust / 3-Position Closed Center / 3-Position Exhaust Center / 3-Position Pressure Center2-Position Pressure / 3-Position Closed Center2-Position Exhaust / 3-Position Closed Center / 3-Position Exhaust Center / 3-Position Pressure Center
                                                                            VoltageDC24V / AC100VDC24VDC24VDC24VDC24VDC12V / DC24V / AC100V / DC5VDC12VDC24V / AC100V / AC200VDC24V / AC100V / AC110V / AC200V / AC220VDC12V / DC24V / AC100V / AC110V / AC200V / AC220V / DC5VDC24V / AC100VDC12VDC24VDC24VDC24V / AC100V / AC200V / 110/120 V ACDC24V / AC100V / AC200V / 110/120 V ACDC24V / AC100V / AC200V / 110/120 V ACDC24V / AC100V / AC220V / 110/120 V ACDC24V / AC100V / 110/120 V ACDC24V / AC100V / 110/120 V ACDC24VDC24VDC12V / DC24VDC24VDC24VDC12V / DC24VDC24VDC24V / AC100V / AC110V / AC200V / AC220VDC12V / DC24V / AC100V / AC200V / DC5VDC24VDC24VDC24VDC24VDC24VDC24VDC24VDC24V / AC100V / AC200V / AC220V / 110/120 V AC
                                                                            Number of SolenoidsDoubleDoubleDoubleDoubleDoubleDoubleDoubleDoubleDoubleDoubleDoubleDoubleDoubleDoubleDoubleDoubleDoubleDoubleDoubleDoubleDoubleDoubleDoubleDoubleDoubleDoubleDoubleDoubleDoubleDoubleDoubleDoubleDoubleDoubleDoubleDoubleDouble
                                                                            Mounting OrientationDirect / Manifold BaseManifold BaseManifold BaseManifold BaseDirectDirect / Manifold BaseDirect / Manifold BaseDirect / Manifold BaseDirect / Manifold BaseDirect / Manifold BaseManifold BaseDirect / Manifold BaseDirectManifold BaseDirect / Manifold BaseDirect / Manifold BaseDirect / Manifold BaseDirect / Manifold BaseDirectDirect / Manifold BaseManifold BaseManifold BaseManifold BaseManifold BaseManifold BaseManifold BaseManifold BaseManifold BaseManifold BaseManifold BaseManifold BaseManifold BaseManifold BaseManifold BaseManifold BaseManifold BaseDirect
                                                                            Pipe Port TypeRc (R)One-Touch PlumbingOne-Touch Plumbing-M / One-Touch PlumbingMRc (R) / NPT / NPTF / G / One-Touch PlumbingRc (R) / NPTF / G / One-Touch PlumbingRc (R) / NPT / GRc (R) / NPT / NPTF / GRc (R) / One-Touch PlumbingRc (R) / NPT / GOne-Touch Plumbing-Rc (R) / NPT / NPTFRc (R) / NPT / NPTF / GRc (R) / NPT / NPTFRc (R) / NPT / NPTF / GRc (R)Rc (R) / NPT / NPTF-----One-Touch Plumbing / Barbed CouplersOne-Touch Plumbing--One-Touch PlumbingOne-Touch Plumbing----Rc (R) / GRc (R) / NPT / G
                                                                            SpecificationsLubrication FreeLubrication FreeLubrication FreeLubrication FreeLubrication FreeLubrication Free / CleanroomStandardLubrication Free / CleanroomLubrication FreeLubrication Free / CleanroomLubrication Free / CleanroomLubrication FreeLubrication FreeLubrication FreeLubrication FreeStandard / Drip-Proof / Lubrication FreeLubrication FreeLubrication FreeLubrication FreeLubrication FreeDrip-Proof / Lubrication FreeLubrication FreeStandard / Lubrication FreeLubrication Free / CleanroomLubrication Free / CleanroomLubrication FreeStandardLubrication FreeLubrication FreeLubrication FreeLubrication Free / Low CurrentLubrication FreeLubrication FreeLubrication FreeLubrication FreeStandard / Lubrication Free / Low CurrentLubrication Free
                                                                            Status at Power OffSelf-Retaining / Self-Recovery (Spring Return)Self-Retaining / Self-Recovery (Spring Return)Self-RetainingSelf-RetainingSelf-Retaining / Self-Recovery (Spring Return)Self-Retaining / Self-Recovery (Spring Return)Self-Retaining / Self-Recovery (Spring Return)Self-Retaining / Self-Recovery (Spring Return)Self-Recovery (Spring Return)Self-Retaining / Self-Recovery (Spring Return)Self-Retaining / Self-Recovery (Spring Return)Self-Retaining / Self-Recovery (Spring Return)Self-RetainingSelf-RetainingSelf-Retaining / Self-Recovery (Spring Return)Self-Retaining / Self-Recovery (Spring Return)Self-Retaining / Self-Recovery (Spring Return)Self-Retaining / Self-Recovery (Spring Return)Self-RetainingSelf-Retaining / Self-Recovery (Spring Return)Self-Retaining / Self-Recovery (Spring Return)Self-Retaining / Self-Recovery (Spring Return)Self-RetainingSelf-Retaining / Self-Recovery (Spring Return)Self-Retaining / Self-Recovery (Spring Return)Self-Retaining / Self-Recovery (Spring Return) / Self-Recovery (Pressure Differential Return)Self-Retaining / Self-Recovery (Spring Return) / Self-Recovery (Pressure Differential Return)Self-Recovery (Spring Return)Self-Recovery (Pressure Differential Return)Self-Retaining / Self-Recovery (Spring Return)Self-Retaining / Self-Recovery (Spring Return)Self-RetainingSelf-Retaining / Self-Recovery (Spring Return)Self-Retaining / Self-Recovery (Spring Return)Self-Retaining / Self-Recovery (Spring Return)Self-Retaining / Self-Recovery (Spring Return)Self-Retaining / Self-Recovery (Spring Return)
                                                                            Plumbing Thread Nominal1/4---M5M3 ~ M51/2 ~ 3/81/4 ~ 1/81/2 ~ 3/81/2 ~ 3/81/41/2 ~ 3/8--1/4 ~ 1/81 ~ 3/81/2 ~ 3/81/2 ~ 3/81 ~ 3/41/4 ~ 1/8-----M5---------1/2 ~ 1/41/2 ~ 3/8
                                                                            PlumbingSub-Base PlumbingDirect PlumbingDirect PlumbingSub-Base PlumbingDirect PlumbingDirect Plumbing / Sub-Base PlumbingDirect Plumbing / Sub-Base PlumbingDirect Plumbing / Sub-Base PlumbingSub-Base PlumbingSub-Base PlumbingDirect PlumbingSub-Base PlumbingDirect PlumbingSub-Base PlumbingSub-Base PlumbingSub-Base PlumbingSub-Base PlumbingSub-Base PlumbingSub-Base PlumbingSub-Base PlumbingSub-Base PlumbingSub-Base PlumbingSub-Base PlumbingSub-Base PlumbingSub-Base PlumbingDirect PlumbingDirect PlumbingSub-Base PlumbingSub-Base PlumbingDirect PlumbingDirect PlumbingSub-Base PlumbingSub-Base PlumbingSub-Base PlumbingSub-Base PlumbingSub-Base PlumbingDirect Plumbing / Sub-Base Plumbing
                                                                            Applicable Cylinder Dia.(Ø)-40 or less40 or less-63 or less---80 or Less ~ 125 or less-----20 to 40 ~ 40 to 16040 to 140 ~ 40 to 20050 to 300 ~ 80 to 300--20 to 100 ~ 40 to 160200 or less40 or less ~ 80 or Less-----40 or less ~ 50 or Less20 or Less125 or less-125 to 300-----
                                                                            TypeSolenoid ValvesSolenoid ValvesSolenoid ValvesSolenoid ValvesSolenoid ValvesSolenoid ValvesSolenoid ValvesSolenoid ValvesSolenoid ValvesSolenoid ValvesSolenoid ValvesSolenoid ValvesSolenoid ValvesSolenoid ValvesSolenoid ValvesSolenoid ValvesSolenoid ValvesSolenoid ValvesSolenoid ValvesSolenoid ValvesSolenoid ValvesSolenoid ValvesSolenoid ValvesSolenoid ValvesSolenoid ValvesSolenoid ValvesSolenoid ValvesSolenoid ValvesSolenoid ValvesSolenoid ValvesSolenoid ValvesSolenoid ValvesSolenoid ValvesSolenoid ValvesSolenoid ValvesSolenoid ValvesSolenoid Valves
                                                                            Driving TypePilot Type SpoolPilot Type SpoolPilot Type SpoolPilot Type SpoolPilot Type SpoolPilot Type SpoolPilot Type SpoolPilot Type SpoolPilot Type SpoolPilot Type SpoolPilot Type SpoolPilot Type SpoolPilot Type SpoolPilot Type SpoolPilot Type SpoolPilot Type SpoolPilot Type SpoolPilot Type SpoolPilot Type SpoolPilot Type SpoolPilot Type SpoolPilot Type SpoolPilot Type SpoolPilot Type SpoolPilot Type SpoolPilot Type SpoolPilot Type SpoolPilot Type SpoolPilot Type SpoolPilot Type SpoolPilot Type SpoolPilot Type SpoolPilot Type SpoolPilot Type SpoolPilot Type SpoolPilot Type SpoolPilot Type Spool
                                                                            Connecting Tube Diameter-Ø4 / Ø6 / Ø8Ø6-Ø4 / Ø6-Ø4 / Ø6 / Ø8 / Ø10 / Ø3/8Ø6 / Ø8--Ø4 / Ø6 / Ø8 / Ø10-Ø6------------Ø4 / Ø6Ø4 / Ø6--Ø6Ø4 / Ø6------
                                                                            Pressure Rating(MPa)0.1 to 0.7 / 0.2 to 0.70.1 to 0.7 / 0.2 to 0.70.1 to 0.70.1 to 0.70.1 to 0.7 / 0.2 to 0.70.1 to 0.7 / 0.2 to 0.70.1 to 0.7 / 0.2 to 0.7 / -0.1 to 0.70.15 to 0.7 / 0.1 to 0.70.2 to 0.7 / -0.1 to 10.1 to 0.7 / 0.2 to 0.7 / -0.1 to 0.70.1 to 0.7 / 0.2 to 0.70.1 to 0.7 / 0.2 to 0.7 / -0.1 to 0.70.1 to 0.70.25 to 0.7 / 0.1 to 0.70.15 to 1 / 0.1 to 1.00.1 to 1.00.15 to 1 / 0.1 to 1.00.1 to 1.00.1 to 1.002 to 0.9 / 0.1 ~ 0.90.15 to 1 / 0.2 to 10.1 to 0.7 / 0.2 to 0.70.2 to 0.70.1 to 0.7 / 0.2 to 0.7 / 0.1 to 1.00.1 to 0.7 / 0.2 to 0.7 / 0.1 to 1.00.25 to 0.7 / 0.15 to 0.7 / 0.1 to 0.7 / 0.2 to 0.7-0.1 to 0.70.1 to 0.70.1 to 0.7 / 0.2 to 0.70.25 to 0.7 / 0.1 to 0.7 / 0.2 to 0.70.1 to 1.00.1 to 0.7 / 0.1 to 1.00.1 to 0.7 / 0.2 to 0.7 / 0.1 to 1.0-0.1 to 0.7 / 0.2 to 0.70.15 to 0.7 / 0.1 to 0.7
                                                                            Seal TypeSoft SealSoft SealSoft SealSoft SealSoft SealSoft SealSoft SealSoft SealStandardSoft SealSoft SealSoft SealSoft SealSoft SealStandardStandardStandardStandardStandardSoft SealStandard / Soft SealSoft SealSoft SealStandard / Soft SealStandard / Soft SealStandardStandardSoft SealSoft SealStandard / Soft SealSoft SealStandardStandard / Soft SealStandard / Soft SealSoft SealSoft SealSoft Seal
                                                                            CV Value0.49 ~ 0.80.46 ~ 0.510.510.30.23 ~ 0.260.1 ~ 0.120.19 ~ 2.20.34 ~ 0.78-0.18 ~ 3.3-0.44 ~ 2.2--0.53 ~ 0.631.4 ~ 5.82.5 ~ 2.93.7 ~ 4.66.80.24 ~ 0.621.5 ~ 2.1-0.110.16 ~ 0.210.46 ~ 0.550.14 ~ 0.180.14 ~ 0.18---0.08 ~ 0.12-0.16 ~ 0.210.46 ~ 0.57--0.17 ~ 2.4
                                                                            Pilot Air SupplyInternal / ExternalInternalInternalInternalInternalInternalInternal / ExternalInternalInternal / ExternalInternal / ExternalInternalInternal / ExternalInternalInternal / ExternalInternalInternalInternal / ExternalInternal / ExternalInternal / ExternalInternalInternal / ExternalInternalInternalInternalInternalInternal / ExternalInternal / ExternalInternalInternalInternalInternal / ExternalInternalInternalInternal / ExternalInternalInternalInternal

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