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Vacuum Regulator Clean Series Copper/Fluorine-Free Specifications 10-/20-IRV10/20 Series (Part Numbers)

Vacuum Regulator Clean Series Copper/Fluorine-Free Specifications 10-/20-IRV10/20 Series

[10-Series Clean Series]
・ This product can be used in a clean environment
・ It prevents dust generation in the cleanroom

[20-Series Copper/Fluorine-Free Specifications]
・ It can be used in environments where copper and fluorine materials should be avoided
・ External dimensions are the same as standard products

(i)Caution

  • Refer to the manufacturer's catalog for specification and material details.
  • The product images are representative only. Please refer to the manufacturer's catalog for shape details.

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Part Number

Configured Part Number is shown.

 
Part Number
Part NumberMinimum order quantityVolume DiscountDays to ShipApplicable Fluid
(l/min)
Shape Supply Side, Connecting Tube Diameter Control Side, Connecting Tube Diameter Piping specifications Accessories Monitor output Supply side fitting shape Control side fitting shape Bracket Type

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Basic Information

Type Vacuum Regulator Control Method Directly Operated Supply Side, Connection Type One-Touch Plumbing
Control Side, Connection Type One-Touch Plumbing Set Pressure Range(kPa) -100::-1.3 Customized specifications No

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