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Vacuum Regulator Clean Series Copper/Fluorine-Free Specifications 10-/20-IRV10/20 Series (Part Numbers)

[10-Series Clean Series]
・ This product can be used in a clean environment
・ It prevents dust generation in the cleanroom

[20-Series Copper/Fluorine-Free Specifications]
・ It can be used in environments where copper and fluorine materials should be avoided
・ External dimensions are the same as standard products

(i)Caution

Refer to the manufacturer's catalog for specification and material details.
The product images are representative only. Please refer to the manufacturer's catalog for shape details.

Part Number

Configured Part Number is shown.

Product TOP

: 30; 60; 90

Part Number
10-IRV20-LC06G
10-IRV20-LC06LG
10-IRV20-LC08
10-IRV20-LC08B
10-IRV20-LC08BG
10-IRV20-LC08BZA
10-IRV20-LC08BZN
10-IRV20-LC08G
10-IRV20-LC08GN
10-IRV20-LC08LG
10-IRV20-LC10
10-IRV20-LC10B
10-IRV20-LC10BG
10-IRV20-LC10BGN
10-IRV20-LC10BZA
10-IRV20-LC10BZN
10-IRV20-LC10BZP
10-IRV20-LC10G
10-IRV20-LC10GN
10-IRV20-LC10L
10-IRV20-LC10LG
10-IRV20-LC10LZN
10-IRV20-LN11
10-IRV20-LN11BG
10-IRV20-N07
10-IRV20-N07B
10-IRV20-N07BG
10-IRV20-N07G
10-IRV20-N09
10-IRV20-N09BG
10-IRV20-N11
10-IRV20-N11B
10-IRV20-N11BG
10-IRV20-N11G
10-IRV20A-C10
10-IRV20A-C10B
10-IRV20A-C10BG
10-IRV20A-C10BZA
10-IRV20A-C10BZN
10-IRV20A-LC08BG
10-IRV20A-LC08ZA
10-IRV20A-LC10
10-IRV20A-LC10B
10-IRV20A-LC10BG
10-IRV20A-LC10BZN
10-IRV20A-LC10G
10-IRV20A-LC10GN
10-IRV20A-LC10ZN
10-IRV20A-N11
20-IRV10-C06
20-IRV10-C06B
20-IRV10-C06BZN
20-IRV10-C08
20-IRV10-C08B
20-IRV10-C08BZA
20-IRV10-C08BZB
20-IRV10-C08BZN
20-IRV10-C08BZP
20-IRV10-LC06
20-IRV10-LC06B
20-IRV10-LC06BGN
20-IRV10-LC06BZA
20-IRV10-LC06BZN
20-IRV10-LC06GN
20-IRV10-LC08
20-IRV10-LC08B
20-IRV10-LC08BGN
20-IRV10-LC08L
20-IRV10-LC08LZN
20-IRV10-LC08ZN
20-IRV10-LN07B
20-IRV20-C06
20-IRV20-C06B
20-IRV20-C06BZN
20-IRV20-C06ZN
20-IRV20-C08
20-IRV20-C08B
20-IRV20-C08BZN
20-IRV20-C10
20-IRV20-C10B
20-IRV20-C10BZN
20-IRV20-C10L
20-IRV20-C10LGN
20-IRV20-C10LZN
20-IRV20-LC06
20-IRV20-LC06B
20-IRV20-LC06BGN
20-IRV20-LC08
20-IRV20-LC08B
20-IRV20-LC10

Standard Unit Price	Minimum order quantity	Days to Ship	Applicable Fluid (l/min)	Shape	Supply Side, Connecting Tube Diameter	Control Side, Connecting Tube Diameter	Piping specifications	Accessories	Monitor output	Supply side fitting shape	Control side fitting shape	Bracket	Type
MYR 582.35	1 Piece(s)	27 Day(s) or more	Maximum flow rate 240 L/min (ANR)	One-Touch Fitting Type Elbow	⌀6	⌀6	Standard connections	With Pressure Gauge	-	Elbow	Elbow	No	Clean series
MYR 603.77	1 Piece(s)	27 Day(s) or more	Maximum flow rate 240 L/min (ANR)	One-Touch Fitting Type Elbow	⌀6	⌀6	Standard connections	With Pressure Gauge	-	Elbow	Elbow	With bottom bracket	Clean series
MYR 453.21	1 Piece(s)	27 Day(s) or more	Maximum flow rate 240 L/min (ANR)	One-Touch Fitting Type Elbow	⌀8	⌀8	Standard connections	No	-	Elbow	Elbow	No	Clean series
MYR 465.40	1 Piece(s)	27 Day(s) or more	Maximum flow rate 240 L/min (ANR)	One-Touch Fitting Type Elbow	⌀8	⌀8	Standard connections	No	-	Elbow	Elbow	With bracket	Clean series
MYR 592.98	1 Piece(s)	14 Day(s) or more	Maximum flow rate 240 L/min (ANR)	One-Touch Fitting Type Elbow	⌀8	⌀8	Standard connections	With Pressure Gauge	-	Elbow	Elbow	With bracket	Clean series
MYR 866.33	1 Piece(s)	27 Day(s) or more	Maximum flow rate 240 L/min (ANR)	One-Touch Fitting Type Elbow	⌀8	⌀8	Standard connections	With digital pressure switch	NPN open collector 2 outputs	Elbow	Elbow	With bracket	Clean series
MYR 863.16	1 Piece(s)	27 Day(s) or more	Maximum flow rate 240 L/min (ANR)	One-Touch Fitting Type Elbow	⌀8	⌀8	Standard connections	With digital pressure switch	NPN open collector 1 output	Elbow	Elbow	With bracket	Clean series
MYR 581.49	1 Piece(s)	27 Day(s) or more	Maximum flow rate 240 L/min (ANR)	One-Touch Fitting Type Elbow	⌀8	⌀8	Standard connections	With Pressure Gauge	-	Elbow	Elbow	No	Clean series
MYR 453.21	1 Piece(s)	27 Day(s) or more	Maximum flow rate 240 L/min (ANR)	One-Touch Fitting Type Elbow	⌀8	⌀8	Standard connections	Gauge nut assembly	-	Elbow	Elbow	No	Clean series
MYR 600.91	1 Piece(s)	27 Day(s) or more	Maximum flow rate 240 L/min (ANR)	One-Touch Fitting Type Elbow	⌀8	⌀8	Standard connections	With Pressure Gauge	-	Elbow	Elbow	With bottom bracket	Clean series
MYR 453.21	1 Piece(s)	27 Day(s) or more	Maximum flow rate 240 L/min (ANR)	One-Touch Fitting Type Elbow	⌀10	⌀10	Standard connections	No	-	Elbow	Elbow	No	Clean series
MYR 465.40	1 Piece(s)	27 Day(s) or more	Maximum flow rate 240 L/min (ANR)	One-Touch Fitting Type Elbow	⌀10	⌀10	Standard connections	No	-	Elbow	Elbow	With bracket	Clean series
MYR 592.98	1 Piece(s)	14 Day(s) or more	Maximum flow rate 240 L/min (ANR)	One-Touch Fitting Type Elbow	⌀10	⌀10	Standard connections	With Pressure Gauge	-	Elbow	Elbow	With bracket	Clean series
MYR 465.65	1 Piece(s)	27 Day(s) or more	Maximum flow rate 240 L/min (ANR)	One-Touch Fitting Type Elbow	⌀10	⌀10	Standard connections	Gauge nut assembly	-	Elbow	Elbow	With bracket	Clean series
MYR 865.15	1 Piece(s)	27 Day(s) or more	Maximum flow rate 240 L/min (ANR)	One-Touch Fitting Type Elbow	⌀10	⌀10	Standard connections	With digital pressure switch	NPN open collector 2 outputs	Elbow	Elbow	With bracket	Clean series
MYR 863.16	1 Piece(s)	27 Day(s) or more	Maximum flow rate 240 L/min (ANR)	One-Touch Fitting Type Elbow	⌀10	⌀10	Standard connections	With digital pressure switch	NPN open collector 1 output	Elbow	Elbow	With bracket	Clean series
MYR 863.16	1 Piece(s)	23 Day(s) or more	Maximum flow rate 240 L/min (ANR)	One-Touch Fitting Type Elbow	⌀10	⌀10	Standard connections	With digital pressure switch	PNP open collector 1 output	Elbow	Elbow	With bracket	Clean series
MYR 581.49	1 Piece(s)	27 Day(s) or more	Maximum flow rate 240 L/min (ANR)	One-Touch Fitting Type Elbow	⌀10	⌀10	Standard connections	With Pressure Gauge	-	Elbow	Elbow	No	Clean series
MYR 453.21	1 Piece(s)	27 Day(s) or more	Maximum flow rate 240 L/min (ANR)	One-Touch Fitting Type Elbow	⌀10	⌀10	Standard connections	Gauge nut assembly	-	Elbow	Elbow	No	Clean series
MYR 473.83	1 Piece(s)	27 Day(s) or more	Maximum flow rate 240 L/min (ANR)	One-Touch Fitting Type Elbow	⌀10	⌀10	Standard connections	No	-	Elbow	Elbow	With bottom bracket	Clean series
MYR 603.96	1 Piece(s)	27 Day(s) or more	Maximum flow rate 240 L/min (ANR)	One-Touch Fitting Type Elbow	⌀10	⌀10	Standard connections	With Pressure Gauge	-	Elbow	Elbow	With bottom bracket	Clean series
MYR 871.09	1 Piece(s)	23 Day(s) or more	Maximum flow rate 240 L/min (ANR)	One-Touch Fitting Type Elbow	⌀10	⌀10	Standard connections	With digital pressure switch	NPN open collector 1 output	Elbow	Elbow	With bottom bracket	Clean series
MYR 452.28	1 Piece(s)	27 Day(s) or more	Maximum flow rate 240 L/min (ANR)	One-Touch Fitting Type Elbow	⌀3/8"	⌀3/8"	Standard connections	No	-	Elbow	Elbow	No	Clean series
MYR 596.41	1 Piece(s)	27 Day(s) or more	Maximum flow rate 240 L/min (ANR)	One-Touch Fitting Type Elbow	⌀3/8"	⌀3/8"	Standard connections	With Pressure Gauge	-	Elbow	Elbow	With bracket	Clean series
MYR 437.46	1 Piece(s)	27 Day(s) or more	Maximum flow rate 240 L/min (ANR)	Standard	⌀1/4"	⌀1/4"	Standard connections	No	-	Straight	Straight	No	Clean series
MYR 447.61	1 Piece(s)	27 Day(s) or more	Maximum flow rate 240 L/min (ANR)	Standard	⌀1/4"	⌀1/4"	Standard connections	No	-	Straight	Straight	With bracket	Clean series
MYR 577.18	1 Piece(s)	27 Day(s) or more	Maximum flow rate 240 L/min (ANR)	Standard	⌀1/4"	⌀1/4"	Standard connections	With Pressure Gauge	-	Straight	Straight	With bracket	Clean series
MYR 565.78	1 Piece(s)	27 Day(s) or more	Maximum flow rate 240 L/min (ANR)	Standard	⌀1/4"	⌀1/4"	Standard connections	With Pressure Gauge	-	Straight	Straight	No	Clean series
MYR 437.46	1 Piece(s)	27 Day(s) or more	Maximum flow rate 240 L/min (ANR)	Standard	⌀5/16"	⌀5/16"	Standard connections	No	-	Straight	Straight	No	Clean series
MYR 577.18	1 Piece(s)	27 Day(s) or more	Maximum flow rate 240 L/min (ANR)	Standard	⌀5/16"	⌀5/16"	Standard connections	With Pressure Gauge	-	Straight	Straight	With bracket	Clean series
MYR 437.46	1 Piece(s)	27 Day(s) or more	Maximum flow rate 240 L/min (ANR)	Standard	⌀3/8"	⌀3/8"	Standard connections	No	-	Straight	Straight	No	Clean series
MYR 448.72	1 Piece(s)	27 Day(s) or more	Maximum flow rate 240 L/min (ANR)	Standard	⌀3/8"	⌀3/8"	Standard connections	No	-	Straight	Straight	With bracket	Clean series
MYR 577.18	1 Piece(s)	27 Day(s) or more	Maximum flow rate 240 L/min (ANR)	Standard	⌀3/8"	⌀3/8"	Standard connections	With Pressure Gauge	-	Straight	Straight	With bracket	Clean series
MYR 565.60	1 Piece(s)	27 Day(s) or more	Maximum flow rate 240 L/min (ANR)	Standard	⌀3/8"	⌀3/8"	Standard connections	With Pressure Gauge	-	Straight	Straight	No	Clean series
MYR 460.90	1 Piece(s)	27 Day(s) or more	Maximum flow rate 240 L/min (ANR)	Standard	⌀10	⌀10	Single-sided connection specification	No	-	Straight	Straight	No	Clean series
MYR 472.22	1 Piece(s)	27 Day(s) or more	Maximum flow rate 240 L/min (ANR)	Standard	⌀10	⌀10	Single-sided connection specification	No	-	Straight	Straight	With bracket	Clean series
MYR 600.91	1 Piece(s)	27 Day(s) or more	Maximum flow rate 240 L/min (ANR)	Standard	⌀10	⌀10	Single-sided connection specification	With Pressure Gauge	-	Straight	Straight	With bracket	Clean series
MYR 872.15	1 Piece(s)	27 Day(s) or more	Maximum flow rate 240 L/min (ANR)	Standard	⌀10	⌀10	Single-sided connection specification	With digital pressure switch	NPN open collector 2 outputs	Straight	Straight	With bracket	Clean series
MYR 871.09	1 Piece(s)	23 Day(s) or more	Maximum flow rate 240 L/min (ANR)	Standard	⌀10	⌀10	Single-sided connection specification	With digital pressure switch	NPN open collector 1 output	Straight	Straight	With bracket	Clean series
MYR 619.48	1 Piece(s)	27 Day(s) or more	Maximum flow rate 240 L/min (ANR)	One-Touch Fitting Type Elbow	⌀8	⌀8	Single-sided connection specification	With Pressure Gauge	-	Elbow	Elbow	With bracket	Clean series
MYR 878.26	1 Piece(s)	27 Day(s) or more	Maximum flow rate 240 L/min (ANR)	One-Touch Fitting Type Elbow	⌀8	⌀8	Single-sided connection specification	With digital pressure switch	NPN open collector 2 outputs	Elbow	Elbow	No	Clean series
MYR 476.85	1 Piece(s)	27 Day(s) or more	Maximum flow rate 240 L/min (ANR)	One-Touch Fitting Type Elbow	⌀10	⌀10	Single-sided connection specification	No	-	Elbow	Elbow	No	Clean series
MYR 489.03	1 Piece(s)	27 Day(s) or more	Maximum flow rate 240 L/min (ANR)	One-Touch Fitting Type Elbow	⌀10	⌀10	Single-sided connection specification	No	-	Elbow	Elbow	With bracket	Clean series
MYR 616.62	1 Piece(s)	27 Day(s) or more	Maximum flow rate 240 L/min (ANR)	One-Touch Fitting Type Elbow	⌀10	⌀10	Single-sided connection specification	With Pressure Gauge	-	Elbow	Elbow	With bracket	Clean series
MYR 886.80	1 Piece(s)	27 Day(s) or more	Maximum flow rate 240 L/min (ANR)	One-Touch Fitting Type Elbow	⌀10	⌀10	Single-sided connection specification	With digital pressure switch	NPN open collector 1 output	Elbow	Elbow	With bracket	Clean series
MYR 605.17	1 Piece(s)	27 Day(s) or more	Maximum flow rate 240 L/min (ANR)	One-Touch Fitting Type Elbow	⌀10	⌀10	Single-sided connection specification	With Pressure Gauge	-	Elbow	Elbow	No	Clean series
MYR 475.23	1 Piece(s)	27 Day(s) or more	Maximum flow rate 240 L/min (ANR)	One-Touch Fitting Type Elbow	⌀10	⌀10	Single-sided connection specification	Gauge nut assembly	-	Elbow	Elbow	No	Clean series
MYR 875.40	1 Piece(s)	27 Day(s) or more	Maximum flow rate 240 L/min (ANR)	One-Touch Fitting Type Elbow	⌀10	⌀10	Single-sided connection specification	With digital pressure switch	NPN open collector 1 output	Elbow	Elbow	No	Clean series
MYR 458.23	1 Piece(s)	27 Day(s) or more	Maximum flow rate 240 L/min (ANR)	Standard	⌀3/8"	⌀3/8"	Single-sided connection specification	No	-	Straight	Straight	No	Clean series
MYR 500.62	1 Piece(s)	27 Day(s) or more	Maximum flow rate 140 L/min (ANR)	Standard	⌀6	⌀6	Standard connections	No	-	Straight	Straight	No	Copper and Fluorine Unavailable Specifications
MYR 513.59	1 Piece(s)	27 Day(s) or more	Maximum flow rate 140 L/min (ANR)	Standard	⌀6	⌀6	Standard connections	No	-	Straight	Straight	With bracket	Copper and Fluorine Unavailable Specifications
MYR 979.89	1 Piece(s)	27 Day(s) or more	Maximum flow rate 140 L/min (ANR)	Standard	⌀6	⌀6	Standard connections	With digital pressure switch	NPN open collector 1 output	Straight	Straight	With bracket	Copper and Fluorine Unavailable Specifications
MYR 500.62	1 Piece(s)	27 Day(s) or more	Maximum flow rate 140 L/min (ANR)	Standard	⌀8	⌀8	Standard connections	No	-	Straight	Straight	No	Copper and Fluorine Unavailable Specifications
MYR 513.59	1 Piece(s)	27 Day(s) or more	Maximum flow rate 140 L/min (ANR)	Standard	⌀8	⌀8	Standard connections	No	-	Straight	Straight	With bracket	Copper and Fluorine Unavailable Specifications
MYR 979.89	1 Piece(s)	27 Day(s) or more	Maximum flow rate 140 L/min (ANR)	Standard	⌀8	⌀8	Standard connections	With digital pressure switch	NPN open collector 2 outputs	Straight	Straight	With bracket	Copper and Fluorine Unavailable Specifications
MYR 979.89	1 Piece(s)	27 Day(s) or more	Maximum flow rate 140 L/min (ANR)	Standard	⌀8	⌀8	Standard connections	With digital pressure switch	PNP open collector 2 outputs	Straight	Straight	With bracket	Copper and Fluorine Unavailable Specifications
MYR 979.89	1 Piece(s)	27 Day(s) or more	Maximum flow rate 140 L/min (ANR)	Standard	⌀8	⌀8	Standard connections	With digital pressure switch	NPN open collector 1 output	Straight	Straight	With bracket	Copper and Fluorine Unavailable Specifications
MYR 979.89	1 Piece(s)	27 Day(s) or more	Maximum flow rate 140 L/min (ANR)	Standard	⌀8	⌀8	Standard connections	With digital pressure switch	PNP open collector 1 output	Straight	Straight	With bracket	Copper and Fluorine Unavailable Specifications
MYR 516.59	1 Piece(s)	27 Day(s) or more	Maximum flow rate 140 L/min (ANR)	One-Touch Fitting Type Elbow	⌀6	⌀6	Standard connections	No	-	Elbow	Elbow	No	Copper and Fluorine Unavailable Specifications
MYR 495.33	1 Piece(s)	9 Day(s) or more	Maximum flow rate 140 L/min (ANR)	One-Touch Fitting Type Elbow	⌀6	⌀6	Standard connections	No	-	Elbow	Elbow	With bracket	Copper and Fluorine Unavailable Specifications
MYR 519.75	1 Piece(s)	27 Day(s) or more	Maximum flow rate 140 L/min (ANR)	One-Touch Fitting Type Elbow	⌀6	⌀6	Standard connections	Gauge nut assembly	-	Elbow	Elbow	With bracket	Copper and Fluorine Unavailable Specifications
MYR 995.65	1 Piece(s)	23 Day(s) or more	Maximum flow rate 140 L/min (ANR)	One-Touch Fitting Type Elbow	⌀6	⌀6	Standard connections	With digital pressure switch	NPN open collector 2 outputs	Elbow	Elbow	With bracket	Copper and Fluorine Unavailable Specifications
MYR 995.65	1 Piece(s)	23 Day(s) or more	Maximum flow rate 140 L/min (ANR)	One-Touch Fitting Type Elbow	⌀6	⌀6	Standard connections	With digital pressure switch	NPN open collector 1 output	Elbow	Elbow	With bracket	Copper and Fluorine Unavailable Specifications
MYR 519.05	1 Piece(s)	23 Day(s) or more	Maximum flow rate 140 L/min (ANR)	One-Touch Fitting Type Elbow	⌀6	⌀6	Standard connections	Gauge nut assembly	-	Elbow	Elbow	No	Copper and Fluorine Unavailable Specifications
MYR 516.59	1 Piece(s)	27 Day(s) or more	Maximum flow rate 140 L/min (ANR)	One-Touch Fitting Type Elbow	⌀8	⌀8	Standard connections	No	-	Elbow	Elbow	No	Copper and Fluorine Unavailable Specifications
MYR 529.39	1 Piece(s)	27 Day(s) or more	Maximum flow rate 140 L/min (ANR)	One-Touch Fitting Type Elbow	⌀8	⌀8	Standard connections	No	-	Elbow	Elbow	With bracket	Copper and Fluorine Unavailable Specifications
MYR 529.39	1 Piece(s)	27 Day(s) or more	Maximum flow rate 140 L/min (ANR)	One-Touch Fitting Type Elbow	⌀8	⌀8	Standard connections	Gauge nut assembly	-	Elbow	Elbow	With bracket	Copper and Fluorine Unavailable Specifications
MYR 538.38	1 Piece(s)	23 Day(s) or more	Maximum flow rate 140 L/min (ANR)	One-Touch Fitting Type Elbow	⌀8	⌀8	Standard connections	No	-	Elbow	Elbow	With bottom bracket	Copper and Fluorine Unavailable Specifications
MYR 1,003.52	1 Piece(s)	23 Day(s) or more	Maximum flow rate 140 L/min (ANR)	One-Touch Fitting Type Elbow	⌀8	⌀8	Standard connections	With digital pressure switch	NPN open collector 1 output	Elbow	Elbow	With bottom bracket	Copper and Fluorine Unavailable Specifications
MYR 984.15	1 Piece(s)	23 Day(s) or more	Maximum flow rate 140 L/min (ANR)	One-Touch Fitting Type Elbow	⌀8	⌀8	Standard connections	With digital pressure switch	NPN open collector 1 output	Elbow	Elbow	No	Copper and Fluorine Unavailable Specifications
MYR 529.39	1 Piece(s)	27 Day(s) or more	Maximum flow rate 140 L/min (ANR)	One-Touch Fitting Type Elbow	⌀1/4"	⌀1/4"	Standard connections	No	-	Elbow	Elbow	With bracket	Copper and Fluorine Unavailable Specifications
MYR 519.05	1 Piece(s)	27 Day(s) or more	Maximum flow rate 240 L/min (ANR)	Standard	⌀6	⌀6	Standard connections	No	-	Straight	Straight	No	Copper and Fluorine Unavailable Specifications
MYR 530.50	1 Piece(s)	27 Day(s) or more	Maximum flow rate 240 L/min (ANR)	Standard	⌀6	⌀6	Standard connections	No	-	Straight	Straight	With bracket	Copper and Fluorine Unavailable Specifications
MYR 995.65	1 Piece(s)	27 Day(s) or more	Maximum flow rate 240 L/min (ANR)	Standard	⌀6	⌀6	Standard connections	With digital pressure switch	NPN open collector 1 output	Straight	Straight	With bracket	Copper and Fluorine Unavailable Specifications
MYR 977.68	1 Piece(s)	27 Day(s) or more	Maximum flow rate 240 L/min (ANR)	Standard	⌀6	⌀6	Standard connections	With digital pressure switch	NPN open collector 1 output	Straight	Straight	No	Copper and Fluorine Unavailable Specifications
MYR 519.05	1 Piece(s)	27 Day(s) or more	Maximum flow rate 240 L/min (ANR)	Standard	⌀8	⌀8	Standard connections	No	-	Straight	Straight	No	Copper and Fluorine Unavailable Specifications
MYR 530.50	1 Piece(s)	27 Day(s) or more	Maximum flow rate 240 L/min (ANR)	Standard	⌀8	⌀8	Standard connections	No	-	Straight	Straight	With bracket	Copper and Fluorine Unavailable Specifications
MYR 995.65	1 Piece(s)	27 Day(s) or more	Maximum flow rate 240 L/min (ANR)	Standard	⌀8	⌀8	Standard connections	With digital pressure switch	NPN open collector 1 output	Straight	Straight	With bracket	Copper and Fluorine Unavailable Specifications
MYR 519.05	1 Piece(s)	27 Day(s) or more	Maximum flow rate 240 L/min (ANR)	Standard	⌀10	⌀10	Standard connections	No	-	Straight	Straight	No	Copper and Fluorine Unavailable Specifications
MYR 530.50	1 Piece(s)	27 Day(s) or more	Maximum flow rate 240 L/min (ANR)	Standard	⌀10	⌀10	Standard connections	No	-	Straight	Straight	With bracket	Copper and Fluorine Unavailable Specifications
MYR 989.87	1 Piece(s)	27 Day(s) or more	Maximum flow rate 240 L/min (ANR)	Standard	⌀10	⌀10	Standard connections	With digital pressure switch	NPN open collector 1 output	Straight	Straight	With bracket	Copper and Fluorine Unavailable Specifications
MYR 532.60	1 Piece(s)	27 Day(s) or more	Maximum flow rate 240 L/min (ANR)	Standard	⌀10	⌀10	Standard connections	No	-	Straight	Straight	With bottom bracket	Copper and Fluorine Unavailable Specifications
MYR 531.16	1 Piece(s)	27 Day(s) or more	Maximum flow rate 240 L/min (ANR)	Standard	⌀10	⌀10	Standard connections	Gauge nut assembly	-	Straight	Straight	With bottom bracket	Copper and Fluorine Unavailable Specifications
MYR 1,003.52	1 Piece(s)	27 Day(s) or more	Maximum flow rate 240 L/min (ANR)	Standard	⌀10	⌀10	Standard connections	With digital pressure switch	NPN open collector 1 output	Straight	Straight	With bottom bracket	Copper and Fluorine Unavailable Specifications
MYR 534.76	1 Piece(s)	27 Day(s) or more	Maximum flow rate 240 L/min (ANR)	One-Touch Fitting Type Elbow	⌀6	⌀6	Standard connections	No	-	Elbow	Elbow	No	Copper and Fluorine Unavailable Specifications
MYR 546.26	1 Piece(s)	23 Day(s) or more	Maximum flow rate 240 L/min (ANR)	One-Touch Fitting Type Elbow	⌀6	⌀6	Standard connections	No	-	Elbow	Elbow	With bracket	Copper and Fluorine Unavailable Specifications
MYR 540.28	1 Piece(s)	27 Day(s) or more	Maximum flow rate 240 L/min (ANR)	One-Touch Fitting Type Elbow	⌀6	⌀6	Standard connections	Gauge nut assembly	-	Elbow	Elbow	With bracket	Copper and Fluorine Unavailable Specifications
MYR 534.76	1 Piece(s)	27 Day(s) or more	Maximum flow rate 240 L/min (ANR)	One-Touch Fitting Type Elbow	⌀8	⌀8	Standard connections	No	-	Elbow	Elbow	No	Copper and Fluorine Unavailable Specifications
MYR 540.47	1 Piece(s)	27 Day(s) or more	Maximum flow rate 240 L/min (ANR)	One-Touch Fitting Type Elbow	⌀8	⌀8	Standard connections	No	-	Elbow	Elbow	With bracket	Copper and Fluorine Unavailable Specifications
MYR 534.76	1 Piece(s)	27 Day(s) or more	Maximum flow rate 240 L/min (ANR)	One-Touch Fitting Type Elbow	⌀10	⌀10	Standard connections	No	-	Elbow	Elbow	No	Copper and Fluorine Unavailable Specifications

Basic Information

Type	Vacuum Regulator	Control Method	Directly Operated	Supply Side, Connection Type	One-Touch Plumbing
Control Side, Connection Type	One-Touch Plumbing	Set Pressure Range(kPa)	-100::-1.3	Customized specifications	No

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189 Part Numbers

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Specification/Dimensions

Applicable Fluid(l/min)
Maximum flow rate 140 L/min (ANR)

Maximum flow rate 240 L/min (ANR)
Clear
Shape
- Standard
- One-Touch Fitting Type Elbow
Clear
Supply Side, Connecting Tube Diameter
- ⌀6
- ⌀8
- ⌀5/16"
- ⌀3/8"
- ⌀10
- ⌀1/4"
Clear
Control Side, Connecting Tube Diameter
- ⌀6
- ⌀8
- ⌀10
- ⌀1/4"
- ⌀5/16"
- ⌀3/8"
Clear
Piping specifications
- Single-sided connection specification
- Standard connections
Clear
Accessories
Gauge nut assembly

No

With Pressure Gauge

With digital pressure switch
Clear
Monitor output
- NPN open collector 1 output
- PNP open collector 1 output
- NPN open collector 2 outputs
- PNP open collector 2 outputs
Clear
Supply side fitting shape
- Elbow
- Straight
Clear
Control side fitting shape
- Elbow
- Straight
Clear
Bracket
- No
- With bottom bracket
- With bracket
Clear
Type
- Clean series
- Copper and Fluorine Unavailable Specifications
Clear
type
- 10-IRV□
- 20-IRV□
Clear

Days to Ship

All

9 Day(s) or Less

14 Day(s) or Less

23 Day(s) or Less

27 Day(s) or Less
Clear

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The specifications and dimensions of some parts may not be fully covered. For exact details, refer to manufacturer catalogs .

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Vacuum Regulator Clean Series Copper/Fluorine-Free Specifications 10-/20-IRV10/20 Series (Part Numbers)

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Basic Information

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Specification/Dimensions

Applicable Fluid(l/min)

Shape

Supply Side, Connecting Tube Diameter

Control Side, Connecting Tube Diameter

Piping specifications

Accessories

Monitor output

Supply side fitting shape

Control side fitting shape

Bracket

Type

type

Days to Ship

Specify Alterations

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