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Vacuum Regulator Clean Series Copper/Fluorine-Free Specifications 10-/20-IRV10/20 Series (Part Numbers)
[10-Series Clean Series]
・ This product can be used in a clean environment
・ It prevents dust generation in the cleanroom
[20-Series Copper/Fluorine-Free Specifications]
・ It can be used in environments where copper and fluorine materials should be avoided
・ External dimensions are the same as standard products
(i)Caution
- Refer to the manufacturer's catalog for specification and material details.
- The product images are representative only. Please refer to the manufacturer's catalog for shape details.
| Part Number | Standard Unit Price | Minimum order quantity | Volume Discount | Days to Ship | Applicable Fluid (l/min) | Shape | Supply Side, Connecting Tube Diameter | Control Side, Connecting Tube Diameter | Piping specifications | Accessories | Monitor output | Supply side fitting shape | Control side fitting shape | Bracket | Type |
|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|
MYR 421.70 | 1 Piece(s) | 27 Day(s) or more | Maximum flow rate 140 L/min (ANR) | Standard | ⌀6 | ⌀6 | Standard connections | No | - | Straight | Straight | No | Clean series | ||
MYR 433.89 | 1 Piece(s) | 27 Day(s) or more | Maximum flow rate 140 L/min (ANR) | Standard | ⌀6 | ⌀6 | Standard connections | No | - | Straight | Straight | With bracket | Clean series | ||
MYR 561.47 | 1 Piece(s) | 27 Day(s) or more | Maximum flow rate 140 L/min (ANR) | Standard | ⌀6 | ⌀6 | Standard connections | With Pressure Gauge | - | Straight | Straight | With bracket | Clean series | ||
MYR 428.92 | 1 Piece(s) | 27 Day(s) or more | Maximum flow rate 140 L/min (ANR) | Standard | ⌀6 | ⌀6 | Standard connections | Gauge nut assembly | - | Straight | Straight | With bracket | Clean series | ||
MYR 829.53 | 1 Piece(s) | 27 Day(s) or more | Maximum flow rate 140 L/min (ANR) | Standard | ⌀6 | ⌀6 | Standard connections | With digital pressure switch | NPN open collector 2 outputs | Straight | Straight | With bracket | Clean series | ||
MYR 828.23 | 1 Piece(s) | 27 Day(s) or more | Maximum flow rate 140 L/min (ANR) | Standard | ⌀6 | ⌀6 | Standard connections | With digital pressure switch | NPN open collector 1 output | Straight | Straight | With bracket | Clean series | ||
MYR 549.98 | 1 Piece(s) | 27 Day(s) or more | Maximum flow rate 140 L/min (ANR) | Standard | ⌀6 | ⌀6 | Standard connections | With Pressure Gauge | - | Straight | Straight | No | Clean series | ||
MYR 441.77 | 1 Piece(s) | 27 Day(s) or more | Maximum flow rate 140 L/min (ANR) | Standard | ⌀6 | ⌀6 | Standard connections | No | - | Straight | Straight | With bottom bracket | Clean series | ||
MYR 569.30 | 1 Piece(s) | 27 Day(s) or more | Maximum flow rate 140 L/min (ANR) | Standard | ⌀6 | ⌀6 | Standard connections | With Pressure Gauge | - | Straight | Straight | With bottom bracket | Clean series | ||
MYR 820.16 | 1 Piece(s) | 27 Day(s) or more | Maximum flow rate 140 L/min (ANR) | Standard | ⌀6 | ⌀6 | Standard connections | With digital pressure switch | NPN open collector 1 output | Straight | Straight | No | Clean series | ||
MYR 437.46 | 1 Piece(s) | 27 Day(s) or more | Maximum flow rate 140 L/min (ANR) | One-Touch Fitting Type Elbow | ⌀6 | ⌀6 | Standard connections | No | - | Elbow | Elbow | No | Clean series | ||
MYR 449.59 | 1 Piece(s) | 27 Day(s) or more | Maximum flow rate 140 L/min (ANR) | One-Touch Fitting Type Elbow | ⌀6 | ⌀6 | Standard connections | No | - | Elbow | Elbow | With bracket | Clean series | ||
MYR 577.18 | 1 Piece(s) | 14 Day(s) or more | Maximum flow rate 140 L/min (ANR) | One-Touch Fitting Type Elbow | ⌀6 | ⌀6 | Standard connections | With Pressure Gauge | - | Elbow | Elbow | With bracket | Clean series | ||
MYR 445.18 | 1 Piece(s) | 27 Day(s) or more | Maximum flow rate 140 L/min (ANR) | One-Touch Fitting Type Elbow | ⌀6 | ⌀6 | Standard connections | Gauge nut assembly | - | Elbow | Elbow | With bracket | Clean series | ||
MYR 844.68 | 1 Piece(s) | 27 Day(s) or more | Maximum flow rate 140 L/min (ANR) | One-Touch Fitting Type Elbow | ⌀6 | ⌀6 | Standard connections | With digital pressure switch | NPN open collector 2 outputs | Elbow | Elbow | With bracket | Clean series | ||
MYR 844.68 | 1 Piece(s) | 27 Day(s) or more | Maximum flow rate 140 L/min (ANR) | One-Touch Fitting Type Elbow | ⌀6 | ⌀6 | Standard connections | With digital pressure switch | NPN open collector 1 output | Elbow | Elbow | With bracket | Clean series | ||
MYR 565.78 | 1 Piece(s) | 27 Day(s) or more | Maximum flow rate 140 L/min (ANR) | One-Touch Fitting Type Elbow | ⌀6 | ⌀6 | Standard connections | With Pressure Gauge | - | Elbow | Elbow | No | Clean series | ||
MYR 452.74 | 1 Piece(s) | 27 Day(s) or more | Maximum flow rate 140 L/min (ANR) | One-Touch Fitting Type Elbow | ⌀6 | ⌀6 | Standard connections | No | - | Elbow | Elbow | With bottom bracket | Clean series | ||
MYR 585.11 | 1 Piece(s) | 27 Day(s) or more | Maximum flow rate 140 L/min (ANR) | One-Touch Fitting Type Elbow | ⌀6 | ⌀6 | Standard connections | With Pressure Gauge | - | Elbow | Elbow | With bottom bracket | Clean series | ||
MYR 855.29 | 1 Piece(s) | 23 Day(s) or more | Maximum flow rate 140 L/min (ANR) | One-Touch Fitting Type Elbow | ⌀6 | ⌀6 | Standard connections | With digital pressure switch | NPN open collector 1 output | Elbow | Elbow | With bottom bracket | Clean series | ||
MYR 445.33 | 1 Piece(s) | 27 Day(s) or more | Maximum flow rate 140 L/min (ANR) | Standard | ⌀6 | ⌀6 | Single-sided connection specification | No | - | Straight | Straight | No | Clean series | ||
MYR 855.29 | 1 Piece(s) | 23 Day(s) or more | Maximum flow rate 140 L/min (ANR) | Standard | ⌀6 | ⌀6 | Single-sided connection specification | With digital pressure switch | NPN open collector 1 output | Straight | Straight | With bracket | Clean series | ||
MYR 573.61 | 1 Piece(s) | 27 Day(s) or more | Maximum flow rate 140 L/min (ANR) | Standard | ⌀6 | ⌀6 | Single-sided connection specification | With Pressure Gauge | - | Straight | Straight | No | Clean series | ||
MYR 445.33 | 1 Piece(s) | 27 Day(s) or more | Maximum flow rate 140 L/min (ANR) | Standard | ⌀6 | ⌀6 | Single-sided connection specification | Gauge nut assembly | - | Straight | Straight | No | Clean series | ||
MYR 465.40 | 1 Piece(s) | 27 Day(s) or more | Maximum flow rate 140 L/min (ANR) | Standard | ⌀6 | ⌀6 | Single-sided connection specification | No | - | Straight | Straight | With bottom bracket | Clean series | ||
MYR 588.50 | 1 Piece(s) | 27 Day(s) or more | Maximum flow rate 140 L/min (ANR) | Standard | ⌀6 | ⌀6 | Single-sided connection specification | With Pressure Gauge | - | Straight | Straight | With bottom bracket | Clean series | ||
MYR 465.40 | 1 Piece(s) | 23 Day(s) or more | Maximum flow rate 140 L/min (ANR) | Standard | ⌀6 | ⌀6 | Single-sided connection specification | Gauge nut assembly | - | Straight | Straight | With bottom bracket | Clean series | ||
MYR 860.30 | 1 Piece(s) | 27 Day(s) or more | Maximum flow rate 140 L/min (ANR) | Standard | ⌀6 | ⌀6 | Single-sided connection specification | With digital pressure switch | NPN open collector 2 outputs | Straight | Straight | With bottom bracket | Clean series | ||
MYR 843.84 | 1 Piece(s) | 27 Day(s) or more | Maximum flow rate 140 L/min (ANR) | Standard | ⌀6 | ⌀6 | Single-sided connection specification | With digital pressure switch | NPN open collector 2 outputs | Straight | Straight | No | Clean series | ||
MYR 461.09 | 1 Piece(s) | 27 Day(s) or more | Maximum flow rate 140 L/min (ANR) | One-Touch Fitting Type Elbow | ⌀6 | ⌀6 | Single-sided connection specification | No | - | Elbow | Elbow | No | Clean series | ||
MYR 597.19 | 1 Piece(s) | 27 Day(s) or more | Maximum flow rate 140 L/min (ANR) | One-Touch Fitting Type Elbow | ⌀6 | ⌀6 | Single-sided connection specification | With Pressure Gauge | - | Elbow | Elbow | With bracket | Clean series | ||
MYR 871.09 | 1 Piece(s) | 23 Day(s) or more | Maximum flow rate 140 L/min (ANR) | One-Touch Fitting Type Elbow | ⌀6 | ⌀6 | Single-sided connection specification | With digital pressure switch | NPN open collector 1 output | Elbow | Elbow | With bracket | Clean series | ||
MYR 868.98 | 1 Piece(s) | 27 Day(s) or more | Maximum flow rate 140 L/min (ANR) | One-Touch Fitting Type Elbow | ⌀6 | ⌀6 | Single-sided connection specification | With digital pressure switch | PNP open collector 1 output | Elbow | Elbow | With bracket | Clean series | ||
MYR 604.64 | 1 Piece(s) | 27 Day(s) or more | Maximum flow rate 140 L/min (ANR) | One-Touch Fitting Type Elbow | ⌀6 | ⌀6 | Single-sided connection specification | With Pressure Gauge | - | Elbow | Elbow | With bottom bracket | Clean series | ||
MYR 859.60 | 1 Piece(s) | 27 Day(s) or more | Maximum flow rate 140 L/min (ANR) | One-Touch Fitting Type Elbow | ⌀6 | ⌀6 | Single-sided connection specification | With digital pressure switch | NPN open collector 1 output | Elbow | Elbow | No | Clean series | ||
MYR 437.46 | 1 Piece(s) | 27 Day(s) or more | Maximum flow rate 240 L/min (ANR) | Standard | ⌀6 | ⌀6 | Standard connections | No | - | Straight | Straight | No | Clean series | ||
MYR 449.59 | 1 Piece(s) | 27 Day(s) or more | Maximum flow rate 240 L/min (ANR) | Standard | ⌀6 | ⌀6 | Standard connections | No | - | Straight | Straight | With bracket | Clean series | ||
MYR 577.18 | 1 Piece(s) | 27 Day(s) or more | Maximum flow rate 240 L/min (ANR) | Standard | ⌀6 | ⌀6 | Standard connections | With Pressure Gauge | - | Straight | Straight | With bracket | Clean series | ||
MYR 847.41 | 1 Piece(s) | 23 Day(s) or more | Maximum flow rate 240 L/min (ANR) | Standard | ⌀6 | ⌀6 | Standard connections | With digital pressure switch | NPN open collector 1 output | Straight | Straight | With bracket | Clean series | ||
MYR 565.78 | 1 Piece(s) | 27 Day(s) or more | Maximum flow rate 240 L/min (ANR) | Standard | ⌀6 | ⌀6 | Standard connections | With Pressure Gauge | - | Straight | Straight | No | Clean series | ||
MYR 457.52 | 1 Piece(s) | 27 Day(s) or more | Maximum flow rate 240 L/min (ANR) | Standard | ⌀6 | ⌀6 | Standard connections | No | - | Straight | Straight | With bottom bracket | Clean series | ||
MYR 585.11 | 1 Piece(s) | 27 Day(s) or more | Maximum flow rate 240 L/min (ANR) | Standard | ⌀6 | ⌀6 | Standard connections | With Pressure Gauge | - | Straight | Straight | With bottom bracket | Clean series | ||
MYR 451.96 | 1 Piece(s) | 27 Day(s) or more | Maximum flow rate 240 L/min (ANR) | One-Touch Fitting Type Elbow | ⌀6 | ⌀6 | Standard connections | No | - | Elbow | Elbow | No | Clean series | ||
MYR 465.96 | 1 Piece(s) | 27 Day(s) or more | Maximum flow rate 240 L/min (ANR) | One-Touch Fitting Type Elbow | ⌀6 | ⌀6 | Standard connections | No | - | Elbow | Elbow | With bracket | Clean series | ||
MYR 592.98 | 1 Piece(s) | 27 Day(s) or more | Maximum flow rate 240 L/min (ANR) | One-Touch Fitting Type Elbow | ⌀6 | ⌀6 | Standard connections | With Pressure Gauge | - | Elbow | Elbow | With bracket | Clean series | ||
MYR 866.27 | 1 Piece(s) | 27 Day(s) or more | Maximum flow rate 240 L/min (ANR) | One-Touch Fitting Type Elbow | ⌀6 | ⌀6 | Standard connections | With digital pressure switch | NPN open collector 2 outputs | Elbow | Elbow | With bracket | Clean series | ||
MYR 866.20 | 1 Piece(s) | 27 Day(s) or more | Maximum flow rate 240 L/min (ANR) | One-Touch Fitting Type Elbow | ⌀6 | ⌀6 | Standard connections | With digital pressure switch | NPN open collector 1 output | Elbow | Elbow | With bracket | Clean series | ||
MYR 866.20 | 1 Piece(s) | 27 Day(s) or more | Maximum flow rate 240 L/min (ANR) | One-Touch Fitting Type Elbow | ⌀6 | ⌀6 | Standard connections | With digital pressure switch | PNP open collector 1 output | Elbow | Elbow | With bracket | Clean series | ||
MYR 582.35 | 1 Piece(s) | 27 Day(s) or more | Maximum flow rate 240 L/min (ANR) | One-Touch Fitting Type Elbow | ⌀6 | ⌀6 | Standard connections | With Pressure Gauge | - | Elbow | Elbow | No | Clean series | ||
MYR 603.77 | 1 Piece(s) | 27 Day(s) or more | Maximum flow rate 240 L/min (ANR) | One-Touch Fitting Type Elbow | ⌀6 | ⌀6 | Standard connections | With Pressure Gauge | - | Elbow | Elbow | With bottom bracket | Clean series | ||
MYR 500.62 | 1 Piece(s) | 27 Day(s) or more | Maximum flow rate 140 L/min (ANR) | Standard | ⌀6 | ⌀6 | Standard connections | No | - | Straight | Straight | No | Copper and Fluorine Unavailable Specifications | ||
MYR 513.59 | 1 Piece(s) | 27 Day(s) or more | Maximum flow rate 140 L/min (ANR) | Standard | ⌀6 | ⌀6 | Standard connections | No | - | Straight | Straight | With bracket | Copper and Fluorine Unavailable Specifications | ||
MYR 979.89 | 1 Piece(s) | 27 Day(s) or more | Maximum flow rate 140 L/min (ANR) | Standard | ⌀6 | ⌀6 | Standard connections | With digital pressure switch | NPN open collector 1 output | Straight | Straight | With bracket | Copper and Fluorine Unavailable Specifications | ||
MYR 516.59 | 1 Piece(s) | 27 Day(s) or more | Maximum flow rate 140 L/min (ANR) | One-Touch Fitting Type Elbow | ⌀6 | ⌀6 | Standard connections | No | - | Elbow | Elbow | No | Copper and Fluorine Unavailable Specifications | ||
MYR 495.33 | 1 Piece(s) | 9 Day(s) or more | Maximum flow rate 140 L/min (ANR) | One-Touch Fitting Type Elbow | ⌀6 | ⌀6 | Standard connections | No | - | Elbow | Elbow | With bracket | Copper and Fluorine Unavailable Specifications | ||
MYR 519.75 | 1 Piece(s) | 27 Day(s) or more | Maximum flow rate 140 L/min (ANR) | One-Touch Fitting Type Elbow | ⌀6 | ⌀6 | Standard connections | Gauge nut assembly | - | Elbow | Elbow | With bracket | Copper and Fluorine Unavailable Specifications | ||
MYR 995.65 | 1 Piece(s) | 23 Day(s) or more | Maximum flow rate 140 L/min (ANR) | One-Touch Fitting Type Elbow | ⌀6 | ⌀6 | Standard connections | With digital pressure switch | NPN open collector 2 outputs | Elbow | Elbow | With bracket | Copper and Fluorine Unavailable Specifications | ||
MYR 995.65 | 1 Piece(s) | 23 Day(s) or more | Maximum flow rate 140 L/min (ANR) | One-Touch Fitting Type Elbow | ⌀6 | ⌀6 | Standard connections | With digital pressure switch | NPN open collector 1 output | Elbow | Elbow | With bracket | Copper and Fluorine Unavailable Specifications | ||
MYR 519.05 | 1 Piece(s) | 23 Day(s) or more | Maximum flow rate 140 L/min (ANR) | One-Touch Fitting Type Elbow | ⌀6 | ⌀6 | Standard connections | Gauge nut assembly | - | Elbow | Elbow | No | Copper and Fluorine Unavailable Specifications | ||
MYR 519.05 | 1 Piece(s) | 27 Day(s) or more | Maximum flow rate 240 L/min (ANR) | Standard | ⌀6 | ⌀6 | Standard connections | No | - | Straight | Straight | No | Copper and Fluorine Unavailable Specifications | ||
MYR 530.50 | 1 Piece(s) | 27 Day(s) or more | Maximum flow rate 240 L/min (ANR) | Standard | ⌀6 | ⌀6 | Standard connections | No | - | Straight | Straight | With bracket | Copper and Fluorine Unavailable Specifications | ||
MYR 995.65 | 1 Piece(s) | 27 Day(s) or more | Maximum flow rate 240 L/min (ANR) | Standard | ⌀6 | ⌀6 | Standard connections | With digital pressure switch | NPN open collector 1 output | Straight | Straight | With bracket | Copper and Fluorine Unavailable Specifications | ||
MYR 977.68 | 1 Piece(s) | 27 Day(s) or more | Maximum flow rate 240 L/min (ANR) | Standard | ⌀6 | ⌀6 | Standard connections | With digital pressure switch | NPN open collector 1 output | Straight | Straight | No | Copper and Fluorine Unavailable Specifications | ||
MYR 534.76 | 1 Piece(s) | 27 Day(s) or more | Maximum flow rate 240 L/min (ANR) | One-Touch Fitting Type Elbow | ⌀6 | ⌀6 | Standard connections | No | - | Elbow | Elbow | No | Copper and Fluorine Unavailable Specifications | ||
MYR 546.26 | 1 Piece(s) | 23 Day(s) or more | Maximum flow rate 240 L/min (ANR) | One-Touch Fitting Type Elbow | ⌀6 | ⌀6 | Standard connections | No | - | Elbow | Elbow | With bracket | Copper and Fluorine Unavailable Specifications | ||
MYR 540.28 | 1 Piece(s) | 27 Day(s) or more | Maximum flow rate 240 L/min (ANR) | One-Touch Fitting Type Elbow | ⌀6 | ⌀6 | Standard connections | Gauge nut assembly | - | Elbow | Elbow | With bracket | Copper and Fluorine Unavailable Specifications |
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Basic Information
| Type | Vacuum Regulator | Control Method | Directly Operated | Supply Side, Connection Type | One-Touch Plumbing |
|---|---|---|---|---|---|
| Control Side, Connection Type | One-Touch Plumbing | Set Pressure Range(kPa) | -100::-1.3 | Customized specifications | No |
Specification/Dimensions
-
Applicable Fluid(l/min)
-
Shape
- Standard
- One-Touch Fitting Type Elbow
-
Control Side, Connecting Tube Diameter
- ⌀6
- ⌀8
- ⌀10
- ⌀1/4"
- ⌀5/16"
- ⌀3/8"
-
Piping specifications
- Single-sided connection specification
- Standard connections
-
Accessories
-
Monitor output
- NPN open collector 1 output
- PNP open collector 1 output
- NPN open collector 2 outputs
- PNP open collector 2 outputs
-
Supply side fitting shape
- Elbow
- Straight
-
Control side fitting shape
- Elbow
- Straight
-
Bracket
- No
- With bottom bracket
- With bracket
-
Type
- Clean series
- Copper and Fluorine Unavailable Specifications
-
type
- 10-IRV□
- 20-IRV□
-
Supply Side, Connecting Tube Diameter
- ⌀6
- ⌀8
- ⌀5/16"
- ⌀3/8"
- ⌀10
- ⌀1/4"
Days to Ship
-
- All
- 9 Day(s) or Less
- 14 Day(s) or Less
- 23 Day(s) or Less
- 27 Day(s) or Less
Specify Alterations
- The specifications and dimensions of some parts may not be fully covered. For exact details, refer to manufacturer catalogs .
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