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Circulating Fluid Temperature Controller, Refrigeration Thermo-Chiller, Fluorinated Liquid Type, HRZ Series (Part Numbers)
[Features]
・ Many achievements in semiconductor process equipment with high temperature stability, wide temperature range, failure diagnosis, external communication, etc.
・ Compliant with various safety standards
・ UL, SEMI standard compliant, CE marking
(i)Caution
- Refer to the manufacturer's catalog for specification and material details.
- The product images are representative only. Please refer to the manufacturer's catalog for shape details.
- CAD data is not available for some model numbers.
Japanese Only
Part Number
Configured Part Number is shown.
Basic Information
| Cooling method | Water-cooled refrigeration type |
|---|
Specification/Dimensions
-
Cooling capacity
- 1 kW
- 2 kW
- 4 kW
- 8 kW
-
Optional specifications
- Analog communication
- Analog communication, NPT fitting
- Analog communication, NPT fitting, automatic circulation fluid collection function
- Analog communication, automatic circulation fluid collection function
- Device net communication
- Device net communication, NPT fitting
- Device net communication, NPT fitting, automatic circulation fluid collection function
- Device net communication, automatic circulation fluid collection function
- Device net communication, fixed SI unit
- NPT fitting
- NPT fitting, automatic circulation fluid collection function
- None
- SI unit fixed
-
Setting Temperature Range
- -20 to 40℃
- -20 to 90℃
- 20 to 90℃
-
type
- HRZ-H
- HRZ-L
- HRZ-W
-
CAD
- 2D
- 3D
Days to Ship
-
- All
- 21 Day(s) or Less
Specify Alterations
- The specifications and dimensions of some parts may not be fully covered. For exact details, refer to manufacturer catalogs .
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- Peltier Type Circulating Fluid Temperature Controller, Thermo Controller (Water-Cooled) HEC-W Series
- Circulating Fluid Temperature Controller Thermo-Chiller Rack Mount Single-Phase 100/115 V AC / 200 to 230 V AC HRR
- Circulating Fluid Temperature Controller, Thermo-Chiller, Inverter Type, Air-Cooled, 200 V / 400 V Specification, HRSH090 Series
- Circulating Fluid Temperature Controller, Water-Cooled Thermo-Chiller, Fluorinated Liquid Type, HRW Series
- Circulating Fluid Temperature Controller, Thermo-Chiller, Standard Type, Air-Cooled, 460 V Specification, HRS200 Series
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