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Direct heat exchanger with circulating water in the factory.
[Features]
・ For temperature control in a temperature range that does not require a refrigerator
・ Many achievements in semiconductor process equipment with high temperature stability, wide temperature range, failure diagnosis, external communication, etc.
・ UL, SEMI standard compliant, CE marking
・ Inverter type selectable
Part Number
Configured Part Number is shown.
HRW030-H1-C
| Setting Temperature Range | 20 to 90℃ |
|---|
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