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300 mm Wafer Compatible, Parallel Seal Type Slit Valve XGTP Series

300 mm Wafer Compatible, Parallel Seal Type Slit Valve XGTP Series

Parallel seal type slit valve XGTP series.
[Features]
・ Long lifespan: 3 million uses (At normal temperature)
・ Dust generation amount: Reduced to 1/5 or less
・ 22% reduction in air consumption
・ Easy bellows replacement
・ The gate can be replaced from the top
・ Mechanical end lock mechanism adopted

(i)Caution

  • Refer to the manufacturer's catalog for specification and material details.
  • The product images are representative only. Please refer to the manufacturer's catalog for shape details.

PDF

Part Number

Configured Part Number is shown.

 
Part Number
XGT300-2-5S
XGT300-9-7S
XGT300-9-9S
XGT300-9-10S
XGT300-9-11S
XGTP300-2-1S
XGTP300-20AS
XGTP311-50336-1
XGTP311-50336-1A
XGTP311-50336-1AN
XGTP311-50336-1C
XGTP311-50336-1F
XGTP311-50336-1N
XGTP311-50336-2
XGTP311-50336-2A
XGTP311-50336-2AN
XGTP311-50336-2FN
XGTP312-50336-1
XGTP312-50336-1A
XGTP312-50336-1AN
XGTP312-50336-1C
XGTP312-50336-1CN
XGTP312-50336-1F
XGTP312-50336-1FN
XGTP312-50336-1N
XGTP312-50336-2
XGTP312-50336-2A
XGTP312-50336-2AN
XGTP312-50336-2C
XGTP312-50336-2F
XGTP312-50336-2FN
XGTP313-50336-1
XGTP313-50336-1A
XGTP313-50336-1AN
XGTP313-50336-1C
XGTP313-50336-1F
XGTP313-50336-1N
XGTP313-50336-2A
XGTP313-50336-2AN
XGTP313-50336-2C
Part NumberStandard Unit PriceMinimum order quantityVolume DiscountDays to ShipSize Types of Related components Connector type Specifications Valve Model Material Auto switch End Lock

MYR 173.56

1 Piece(s) 27 Day(s) or more -Fixing bolt---SUS316--

MYR 530.50

1 Piece(s) 27 Day(s) or more -O-ring (Bonnet assembly)---FKM--

MYR 498.24

1 Piece(s) 27 Day(s) or more -O-ring (Gate part)---FKM--

MYR 530.50

1 Piece(s) 27 Day(s) or more -O-ring (Body opening surface)---FKM--

MYR 5,869.39

1 Piece(s) 27 Day(s) or more -O-ring (Gate part)---Kalrez 4079--

MYR 2,052.09

1 Piece(s) 27 Day(s) or more -Gate---A6063--

MYR 8,785.03

1 Piece(s) 27 Day(s) or more -Bellows---AM350--

MYR 28,006.24

1 Piece(s) 27 Day(s) or more Height 50 × width 366 mm (Open window)Slit valveNoneLong lifespan of 3 million uses (At normal temperature)Insert type (Without body)FKM (Gate part seal)NoneOPEN/CLOSE end lock

MYR 28,234.80

1 Piece(s) 27 Day(s) or more Height 50 × width 366 mm (Open window)Slit valveNoneLong lifespan of 3 million uses (At normal temperature)Insert type (Without body)FKM (Gate part seal)D-A93OPEN/CLOSE end lock

MYR 28,077.19

1 Piece(s) 27 Day(s) or more Height 50 × width 366 mm (Open window)Slit valveNoneLong lifespan of 3 million uses (At normal temperature)Insert type (Without body)FKM (Gate part seal)D-A93None

MYR 28,530.90

1 Piece(s) 27 Day(s) or more Height 50 × width 366 mm (Open window)Slit valveMulti connector (AMP)Long lifespan of 3 million uses (At normal temperature)Insert type (Without body)FKM (Gate part seal)D-A93OPEN/CLOSE end lock

MYR 28,530.90

1 Piece(s) 27 Day(s) or more Height 50 × width 366 mm (Open window)Slit valveD-sub connectorLong lifespan of 3 million uses (At normal temperature)Insert type (Without body)FKM (Gate part seal)D-A93OPEN/CLOSE end lock

MYR 27,848.53

1 Piece(s) 27 Day(s) or more Height 50 × width 366 mm (Open window)Slit valveNoneLong lifespan of 3 million uses (At normal temperature)Insert type (Without body)FKM (Gate part seal)NoneNone

MYR 33,178.11

1 Piece(s) 27 Day(s) or more Height 50 × width 366 mm (Open window)Slit valveNoneLong lifespan of 3 million uses (At normal temperature)Insert type (Without body)Kalrez 4079 (Gate part seal)NoneOPEN/CLOSE end lock

MYR 33,406.77

1 Piece(s) 27 Day(s) or more Height 50 × width 366 mm (Open window)Slit valveNoneLong lifespan of 3 million uses (At normal temperature)Insert type (Without body)Kalrez 4079 (Gate part seal)D-A93OPEN/CLOSE end lock

MYR 33,249.06

1 Piece(s) 27 Day(s) or more Height 50 × width 366 mm (Open window)Slit valveNoneLong lifespan of 3 million uses (At normal temperature)Insert type (Without body)Kalrez 4079 (Gate part seal)D-A93None

MYR 33,545.05

1 Piece(s) 27 Day(s) or more Height 50 × width 366 mm (Open window)Slit valveD-sub connectorLong lifespan of 3 million uses (At normal temperature)Insert type (Without body)Kalrez 4079 (Gate part seal)D-A93None

MYR 37,782.36

1 Piece(s) 27 Day(s) or more Height 50 × width 366 mm (Open window)Slit valveNoneLong lifespan of 3 million uses (At normal temperature)Cassette type (Standard body)FKM (Gate part seal)NoneOPEN/CLOSE end lock

MYR 38,011.02

1 Piece(s) 27 Day(s) or more Height 50 × width 366 mm (Open window)Slit valveNoneLong lifespan of 3 million uses (At normal temperature)Cassette type (Standard body)FKM (Gate part seal)D-A93OPEN/CLOSE end lock

MYR 37,853.31

1 Piece(s) 27 Day(s) or more Height 50 × width 366 mm (Open window)Slit valveNoneLong lifespan of 3 million uses (At normal temperature)Cassette type (Standard body)FKM (Gate part seal)D-A93None

MYR 38,307.01

1 Piece(s) 27 Day(s) or more Height 50 × width 366 mm (Open window)Slit valveMulti connector (AMP)Long lifespan of 3 million uses (At normal temperature)Cassette type (Standard body)FKM (Gate part seal)D-A93OPEN/CLOSE end lock

MYR 38,149.31

1 Piece(s) 27 Day(s) or more Height 50 × width 366 mm (Open window)Slit valveMulti connector (AMP)Long lifespan of 3 million uses (At normal temperature)Cassette type (Standard body)FKM (Gate part seal)D-A93None

MYR 38,307.01

1 Piece(s) 27 Day(s) or more Height 50 × width 366 mm (Open window)Slit valveD-sub connectorLong lifespan of 3 million uses (At normal temperature)Cassette type (Standard body)FKM (Gate part seal)D-A93OPEN/CLOSE end lock

MYR 38,149.31

1 Piece(s) 27 Day(s) or more Height 50 × width 366 mm (Open window)Slit valveD-sub connectorLong lifespan of 3 million uses (At normal temperature)Cassette type (Standard body)FKM (Gate part seal)D-A93None

MYR 37,624.65

1 Piece(s) 27 Day(s) or more Height 50 × width 366 mm (Open window)Slit valveNoneLong lifespan of 3 million uses (At normal temperature)Cassette type (Standard body)FKM (Gate part seal)NoneNone

MYR 42,954.28

1 Piece(s) 27 Day(s) or more Height 50 × width 366 mm (Open window)Slit valveNoneLong lifespan of 3 million uses (At normal temperature)Cassette type (Standard body)Kalrez 4079 (Gate part seal)NoneOPEN/CLOSE end lock

MYR 43,182.93

1 Piece(s) 27 Day(s) or more Height 50 × width 366 mm (Open window)Slit valveNoneLong lifespan of 3 million uses (At normal temperature)Cassette type (Standard body)Kalrez 4079 (Gate part seal)D-A93OPEN/CLOSE end lock

MYR 43,025.23

1 Piece(s) 27 Day(s) or more Height 50 × width 366 mm (Open window)Slit valveNoneLong lifespan of 3 million uses (At normal temperature)Cassette type (Standard body)Kalrez 4079 (Gate part seal)D-A93None

MYR 43,478.93

1 Piece(s) 27 Day(s) or more Height 50 × width 366 mm (Open window)Slit valveMulti connector (AMP)Long lifespan of 3 million uses (At normal temperature)Cassette type (Standard body)Kalrez 4079 (Gate part seal)D-A93OPEN/CLOSE end lock

MYR 43,478.93

1 Piece(s) 27 Day(s) or more Height 50 × width 366 mm (Open window)Slit valveD-sub connectorLong lifespan of 3 million uses (At normal temperature)Cassette type (Standard body)Kalrez 4079 (Gate part seal)D-A93OPEN/CLOSE end lock

MYR 43,321.22

1 Piece(s) 27 Day(s) or more Height 50 × width 366 mm (Open window)Slit valveD-sub connectorLong lifespan of 3 million uses (At normal temperature)Cassette type (Standard body)Kalrez 4079 (Gate part seal)D-A93None

MYR 37,782.36

1 Piece(s) 27 Day(s) or more Height 50 × width 366 mm (Open window)Slit valveNoneLong lifespan of 3 million uses (At normal temperature)Cassette type (Half-MESK body)FKM (Gate part seal)NoneOPEN/CLOSE end lock

MYR 38,011.02

1 Piece(s) 27 Day(s) or more Height 50 × width 366 mm (Open window)Slit valveNoneLong lifespan of 3 million uses (At normal temperature)Cassette type (Half-MESK body)FKM (Gate part seal)D-A93OPEN/CLOSE end lock

MYR 37,853.31

1 Piece(s) 27 Day(s) or more Height 50 × width 366 mm (Open window)Slit valveNoneLong lifespan of 3 million uses (At normal temperature)Cassette type (Half-MESK body)FKM (Gate part seal)D-A93None

MYR 38,307.01

1 Piece(s) 27 Day(s) or more Height 50 × width 366 mm (Open window)Slit valveMulti connector (AMP)Long lifespan of 3 million uses (At normal temperature)Cassette type (Half-MESK body)FKM (Gate part seal)D-A93OPEN/CLOSE end lock

MYR 38,307.01

1 Piece(s) 27 Day(s) or more Height 50 × width 366 mm (Open window)Slit valveD-sub connectorLong lifespan of 3 million uses (At normal temperature)Cassette type (Half-MESK body)FKM (Gate part seal)D-A93OPEN/CLOSE end lock

MYR 37,624.65

1 Piece(s) 27 Day(s) or more Height 50 × width 366 mm (Open window)Slit valveNoneLong lifespan of 3 million uses (At normal temperature)Cassette type (Half-MESK body)FKM (Gate part seal)NoneNone

MYR 43,182.93

1 Piece(s) 27 Day(s) or more Height 50 × width 366 mm (Open window)Slit valveNoneLong lifespan of 3 million uses (At normal temperature)Cassette type (Half-MESK body)Kalrez 4079 (Gate part seal)D-A93OPEN/CLOSE end lock

MYR 43,025.23

1 Piece(s) 27 Day(s) or more Height 50 × width 366 mm (Open window)Slit valveNoneLong lifespan of 3 million uses (At normal temperature)Cassette type (Half-MESK body)Kalrez 4079 (Gate part seal)D-A93None

MYR 43,478.93

1 Piece(s) 27 Day(s) or more Height 50 × width 366 mm (Open window)Slit valveMulti connector (AMP)Long lifespan of 3 million uses (At normal temperature)Cassette type (Half-MESK body)Kalrez 4079 (Gate part seal)D-A93OPEN/CLOSE end lock

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