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Air Slide Table Clean / Low Dust Generation 13/20/22-MXQ Series (Part Numbers)

[13-Series, Clean Series]
・ It is suitable for clean environment.
・ It prevents dust generation in the cleanroom.
[20-Series Copper/Fluorine-Free Specifications]
・ Suitable for use in environments that dislike copper and fluorine materials.
・ External dimensions are the same as standard products.
[22-Series, Copper / Fluorine / Silicone-Free + Low Dust Generation]
・ It supports environments with restrictions on copper-based, fluorine-based, and silicone-based materials.
・ The structure is the same as the Clean Series. (Grease and packaging are different from the Clean Series)

(i)Caution

Refer to the manufacturer's catalog for specification and material details.
Product images may be representative images only. Please refer to the manufacturer's catalog for shape details.
CAD data is not available for some model numbers.

Part Number

Configured Part Number is shown.

Product TOP

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Part Number
20-MXQ6L-50
20-MXQ6L-50-A93V
20-MXQ6L-50-M9BWL
20-MXQ6L-50-M9NL
20-MXQ6L-50A
20-MXQ6L-50A-M9BL
20-MXQ6L-50AS
20-MXQ6L-50AS-M9B
20-MXQ6L-50AS-M9BWL
20-MXQ6L-50C-M9BL
20-MXQ6L-50CS-M9BVL
22-MXQ6-10
22-MXQ6-10-A93L
22-MXQ6-10-M9N
22-MXQ6-10-M9NWLS
22-MXQ6-10-M9NWS
22-MXQ6-10A-M9BL
22-MXQ6-10AS-M9N
22-MXQ6-10AS-M9NL
22-MXQ6-10CS
22-MXQ6-10CS-M9N
22-MXQ6-10CS-M9NZ
22-MXQ6-10CSP
22-MXQ6-10CSP-M9N
22-MXQ6-20
22-MXQ6-20-M9N
22-MXQ6-20-M9NW
22-MXQ6-20A-M9N
22-MXQ6-20AS
22-MXQ6-20CT-M9N
22-MXQ6-30
22-MXQ6-30-M9B
22-MXQ6-30-M9N
22-MXQ6-30A-M9B
22-MXQ6-30CS-M9N
22-MXQ6-40
22-MXQ6-50
22-MXQ6-50-M9BW
22-MXQ6-50-M9N
22-MXQ6-50A-M9NL
22-MXQ6-50AS-M9NL
22-MXQ6-50AT-M9NW
22-MXQ6-50C-M9B
22-MXQ6-50C-M9BL
22-MXQ6-50C-M9N
22-MXQ6-50CS-M9N
22-MXQ6-50CSP-M9N
22-MXQ6-50CSP-M9NZ
22-MXQ6L-10
22-MXQ6L-10-A93L
22-MXQ6L-10-M9NLS
22-MXQ6L-10-M9NWLS
22-MXQ6L-10A-M9BL
22-MXQ6L-10AS-M9NL
22-MXQ6L-10AT
22-MXQ6L-10AT-M9NV
22-MXQ6L-10CS
22-MXQ6L-10CS-M9N
22-MXQ6L-10CS-M9NZ
22-MXQ6L-10CSP-M9N
22-MXQ6L-20
22-MXQ6L-20-M9N
22-MXQ6L-20-M9NW
22-MXQ6L-20AS
22-MXQ6L-20AT-M9NV
22-MXQ6L-30
22-MXQ6L-30-M9NL
22-MXQ6L-50-M9BW
22-MXQ6L-50A-M9NL
22-MXQ6L-50C-M9B
22-MXQ6L-50CSP-M9N
22-MXQ6L-50CSP-M9NZ

Standard Unit Price	Minimum order quantity	Days to Ship	Cylinder I.D. (Ø)	Stroke (mm)	Table Size: Length L (mm)	Stroke (Range) (mm)	Max. Load Mass (Horizontal Mounting) (kg)	Table Size: Width W (mm)	Table Size Length (Range) (mm)	Table Size Width (Range) (mm)	Environment	Table Size Height (Range) (mm)	Table Size: Height H (mm)	Table Surface Treatment	Operating Pressure (MPa)	Max. Operating Pressure (MPa)	Min. Operating Pressure (MPa)	Table Parallelism (µm)	Piping Format	Port Screw Type	Adjuster Option	Function Option	Auto Switches	Lead Wire Length (m)	Lead Wire Connector	The number of the switches	Type	Stroke (mm)	Table size length (mm)	Table size width (mm)	Table size height	Table parallelism (µm)	Table Surface Treatment
MYR 1,823.41	1 Piece(s)	27 Day(s) or more	6	50	95	-	0.05~0.8	31	-	-	Copper-Free/Fluorine-Free	-	20	Electroless Nickel Plating	0.15 to 0.7	-	-	45	Symmetrical type	M screw	No adjuster	Standard	Without auto switch (built-in magnet)	None	None	None	Copper and Fluorine Unavailable Specifications	-	-	-	-	-	-
MYR 2,073.33	1 Piece(s)	27 Day(s) or more	6	50	95	-	0.05~0.8	31	-	-	Copper-Free/Fluorine-Free	-	20	Electroless Nickel Plating	0.15 to 0.7	-	-	45	Symmetrical type	M screw	No adjuster	Standard	A93V	0.5	None	2 pcs.	Copper and Fluorine Unavailable Specifications	-	-	-	-	-	-
MYR 2,139.16	1 Piece(s)	27 Day(s) or more	6	50	95	-	0.05~0.8	31	-	-	Copper-Free/Fluorine-Free	-	20	Electroless Nickel Plating	0.15 to 0.7	-	-	45	Symmetrical type	M screw	No adjuster	Standard	M9BW	3	None	2 pcs.	Copper and Fluorine Unavailable Specifications	-	-	-	-	-	-
MYR 2,125.95	1 Piece(s)	27 Day(s) or more	6	50	95	-	0.05~0.8	31	-	-	Copper-Free/Fluorine-Free	-	20	Electroless Nickel Plating	0.15 to 0.7	-	-	45	Symmetrical type	M screw	No adjuster	Standard	M9N	3	None	2 pcs.	Copper and Fluorine Unavailable Specifications	-	-	-	-	-	-
MYR 2,223.66	1 Piece(s)	27 Day(s) or more	6	50	95	-	0.05~0.8	31	-	-	Copper-Free/Fluorine-Free	-	20	Electroless Nickel Plating	0.15 to 0.7	-	-	45	Symmetrical type	M screw	Dual-end rubber stoppers	Standard	Without auto switch (built-in magnet)	None	None	None	Copper and Fluorine Unavailable Specifications	-	-	-	-	-	-
MYR 2,475.65	1 Piece(s)	27 Day(s) or more	6	50	95	-	0.05~0.8	31	-	-	Copper-Free/Fluorine-Free	-	20	Electroless Nickel Plating	0.15 to 0.7	-	-	45	Symmetrical type	M screw	Dual-end rubber stoppers	Standard	M9B	3	None	2 pcs.	Copper and Fluorine Unavailable Specifications	-	-	-	-	-	-
MYR 2,025.59	1 Piece(s)	27 Day(s) or more	6	50	95	-	0.05~0.8	31	-	-	Copper-Free/Fluorine-Free	-	20	Electroless Nickel Plating	0.15 to 0.7	-	-	45	Symmetrical type	M screw	Forward-end rubber stopper	Standard	Without auto switch (built-in magnet)	None	None	None	Copper and Fluorine Unavailable Specifications	-	-	-	-	-	-
MYR 2,295.70	1 Piece(s)	27 Day(s) or more	6	50	95	-	0.05~0.8	31	-	-	Copper-Free/Fluorine-Free	-	20	Electroless Nickel Plating	0.15 to 0.7	-	-	45	Symmetrical type	M screw	Forward-end rubber stopper	Standard	M9B	0.5	None	2 pcs.	Copper and Fluorine Unavailable Specifications	-	-	-	-	-	-
MYR 2,353.85	1 Piece(s)	27 Day(s) or more	6	50	95	-	0.05~0.8	31	-	-	Copper-Free/Fluorine-Free	-	20	Electroless Nickel Plating	0.15 to 0.7	-	-	45	Symmetrical type	M screw	Forward-end rubber stopper	Standard	M9BW	3	None	2 pcs.	Copper and Fluorine Unavailable Specifications	-	-	-	-	-	-
MYR 2,475.65	1 Piece(s)	27 Day(s) or more	6	50	95	-	0.05~0.8	31	-	-	Copper-Free/Fluorine-Free	-	20	Electroless Nickel Plating	0.15 to 0.7	-	-	45	Symmetrical type	M screw	Dual-end metal stoppers	Standard	M9B	3	None	2 pcs.	Copper and Fluorine Unavailable Specifications	-	-	-	-	-	-
MYR 2,369.76	1 Piece(s)	27 Day(s) or more	6	50	95	-	0.05~0.8	31	-	-	Copper-Free/Fluorine-Free	-	20	Electroless Nickel Plating	0.15 to 0.7	-	-	45	Symmetrical type	M screw	Forward-end metal stopper	Standard	M9BV	3	None	2 pcs.	Copper and Fluorine Unavailable Specifications	-	-	-	-	-	-
MYR 1,967.25	1 Piece(s)	27 Day(s) or more	6	10	-	-	0.05~0.8	27	-	-	Dust Proofing / Copper-Free/Fluorine-Free	-	20	Electroless Nickel Plating	0.15 to 0.7	-	-	25	Standard type	M screw	No adjuster	Standard	Without auto switch (built-in magnet)	None	None	None	Copper/fluorine/silicon-free + low dust generation	-	-	-	-	-	-
MYR 2,156.47	1 Piece(s)	27 Day(s) or more	6	10	-	-	0.05~0.8	27	-	-	Dust Proofing / Copper-Free/Fluorine-Free	-	20	Electroless Nickel Plating	0.15 to 0.7	-	-	25	Standard type	M screw	No adjuster	Standard	A93	3	None	2 pcs.	Copper/fluorine/silicon-free + low dust generation	-	-	-	-	-	-
MYR 2,235.29	1 Piece(s)	27 Day(s) or more	6	10	-	-	0.05~0.8	27	-	-	Dust Proofing / Copper-Free/Fluorine-Free	-	20	Electroless Nickel Plating	0.15 to 0.7	-	-	25	Standard type	M screw	No adjuster	Standard	M9N	0.5	None	2 pcs.	Copper/fluorine/silicon-free + low dust generation	-	-	-	-	-	-
MYR 2,124.95	1 Piece(s)	27 Day(s) or more	6	10	-	-	0.05~0.8	27	-	-	Dust Proofing / Copper-Free/Fluorine-Free	-	20	Electroless Nickel Plating	0.15 to 0.7	-	-	25	Standard type	M screw	No adjuster	Standard	M9NW	3	None	1 pcs.	Copper/fluorine/silicon-free + low dust generation	-	-	-	-	-	-
MYR 2,109.15	1 Piece(s)	27 Day(s) or more	6	10	-	-	0.05~0.8	27	-	-	Dust Proofing / Copper-Free/Fluorine-Free	-	20	Electroless Nickel Plating	0.15 to 0.7	-	-	25	Standard type	M screw	No adjuster	Standard	M9NW	0.5	None	1 pcs.	Copper/fluorine/silicon-free + low dust generation	-	-	-	-	-	-
MYR 2,542.78	1 Piece(s)	27 Day(s) or more	6	10	-	-	0.05~0.8	27	-	-	Dust Proofing / Copper-Free/Fluorine-Free	-	20	Electroless Nickel Plating	0.15 to 0.7	-	-	25	Standard type	M screw	Dual-end rubber stoppers	Standard	M9B	3	None	2 pcs.	Copper/fluorine/silicon-free + low dust generation	-	-	-	-	-	-
MYR 2,377.20	1 Piece(s)	27 Day(s) or more	6	10	-	-	0.05~0.8	27	-	-	Dust Proofing / Copper-Free/Fluorine-Free	-	20	Electroless Nickel Plating	0.15 to 0.7	-	-	25	Standard type	M screw	Forward-end rubber stopper	Standard	M9N	0.5	None	2 pcs.	Copper/fluorine/silicon-free + low dust generation	-	-	-	-	-	-
MYR 2,408.76	1 Piece(s)	27 Day(s) or more	6	10	-	-	0.05~0.8	27	-	-	Dust Proofing / Copper-Free/Fluorine-Free	-	20	Electroless Nickel Plating	0.15 to 0.7	-	-	25	Standard type	M screw	Forward-end rubber stopper	Standard	M9N	3	None	2 pcs.	Copper/fluorine/silicon-free + low dust generation	-	-	-	-	-	-
MYR 2,109.15	1 Piece(s)	27 Day(s) or more	6	10	-	-	0.05~0.8	27	-	-	Dust Proofing / Copper-Free/Fluorine-Free	-	20	Electroless Nickel Plating	0.15 to 0.7	-	-	25	Standard type	M screw	Forward-end metal stopper	Standard	Without auto switch (built-in magnet)	None	None	None	Copper/fluorine/silicon-free + low dust generation	-	-	-	-	-	-
MYR 2,377.20	1 Piece(s)	27 Day(s) or more	6	10	-	-	0.05~0.8	27	-	-	Dust Proofing / Copper-Free/Fluorine-Free	-	20	Electroless Nickel Plating	0.15 to 0.7	-	-	25	Standard type	M screw	Forward-end metal stopper	Standard	M9N	0.5	None	2 pcs.	Copper/fluorine/silicon-free + low dust generation	-	-	-	-	-	-
MYR 2,440.27	1 Piece(s)	27 Day(s) or more	6	10	-	-	0.05~0.8	27	-	-	Dust Proofing / Copper-Free/Fluorine-Free	-	20	Electroless Nickel Plating	0.15 to 0.7	-	-	25	Standard type	M screw	Forward-end metal stopper	Standard	M9N	5	None	2 pcs.	Copper/fluorine/silicon-free + low dust generation	-	-	-	-	-	-
MYR 2,282.61	1 Piece(s)	27 Day(s) or more	6	10	-	-	0.05~0.8	27	-	-	Dust Proofing / Copper-Free/Fluorine-Free	-	20	Electroless Nickel Plating	0.15 to 0.7	-	-	25	Standard type	M screw	Forward-end metal stopper	Axial direction piping type	Without auto switch (built-in magnet)	None	None	None	Copper/fluorine/silicon-free + low dust generation	-	-	-	-	-	-
MYR 2,550.66	1 Piece(s)	27 Day(s) or more	6	10	-	-	0.05~0.8	27	-	-	Dust Proofing / Copper-Free/Fluorine-Free	-	20	Electroless Nickel Plating	0.15 to 0.7	-	-	25	Standard type	M screw	Forward-end metal stopper	Axial direction piping type	M9N	0.5	None	2 pcs.	Copper/fluorine/silicon-free + low dust generation	-	-	-	-	-	-
MYR 2,062.08	1 Piece(s)	27 Day(s) or more	6	20	73	-	0.05~0.8	27	-	-	Dust Proofing / Copper-Free/Fluorine-Free	-	20	Electroless Nickel Plating	0.15 to 0.7	-	-	30	Standard type	M screw	No adjuster	Standard	Without auto switch (built-in magnet)	None	None	None	Copper/fluorine/silicon-free + low dust generation	-	-	-	-	-	-
MYR 2,369.32	1 Piece(s)	27 Day(s) or more	6	20	73	-	0.05~0.8	27	-	-	Dust Proofing / Copper-Free/Fluorine-Free	-	20	Electroless Nickel Plating	0.15 to 0.7	-	-	30	Standard type	M screw	No adjuster	Standard	M9N	0.5	None	2 pcs.	Copper/fluorine/silicon-free + low dust generation	-	-	-	-	-	-
MYR 2,385.12	1 Piece(s)	27 Day(s) or more	6	20	73	-	0.05~0.8	27	-	-	Dust Proofing / Copper-Free/Fluorine-Free	-	20	Electroless Nickel Plating	0.15 to 0.7	-	-	30	Standard type	M screw	No adjuster	Standard	M9NW	0.5	None	2 pcs.	Copper/fluorine/silicon-free + low dust generation	-	-	-	-	-	-
MYR 2,653.17	1 Piece(s)	27 Day(s) or more	6	20	73	-	0.05~0.8	27	-	-	Dust Proofing / Copper-Free/Fluorine-Free	-	20	Electroless Nickel Plating	0.15 to 0.7	-	-	30	Standard type	M screw	Dual-end rubber stoppers	Standard	M9N	0.5	None	2 pcs.	Copper/fluorine/silicon-free + low dust generation	-	-	-	-	-	-
MYR 2,204.18	1 Piece(s)	27 Day(s) or more	6	20	73	-	0.05~0.8	27	-	-	Dust Proofing / Copper-Free/Fluorine-Free	-	20	Electroless Nickel Plating	0.15 to 0.7	-	-	30	Standard type	M screw	Forward-end rubber stopper	Standard	Without auto switch (built-in magnet)	None	None	None	Copper/fluorine/silicon-free + low dust generation	-	-	-	-	-	-
MYR 2,511.22	1 Piece(s)	27 Day(s) or more	6	20	73	-	0.05~0.8	27	-	-	Dust Proofing / Copper-Free/Fluorine-Free	-	20	Electroless Nickel Plating	0.15 to 0.7	-	-	30	Standard type	M screw	Retraction end metal stopper	Standard	M9N	0.5	None	2 pcs.	Copper/fluorine/silicon-free + low dust generation	-	-	-	-	-	-
MYR 2,235.29	1 Piece(s)	27 Day(s) or more	6	30	83	-	0.05~0.8	27	-	-	Dust Proofing / Copper-Free/Fluorine-Free	-	20	Electroless Nickel Plating	0.15 to 0.7	-	-	35	Standard type	M screw	No adjuster	Standard	Without auto switch (built-in magnet)	None	None	None	Copper/fluorine/silicon-free + low dust generation	-	-	-	-	-	-
MYR 2,495.47	1 Piece(s)	27 Day(s) or more	6	30	83	-	0.05~0.8	27	-	-	Dust Proofing / Copper-Free/Fluorine-Free	-	20	Electroless Nickel Plating	0.15 to 0.7	-	-	35	Standard type	M screw	No adjuster	Standard	M9B	0.5	None	2 pcs.	Copper/fluorine/silicon-free + low dust generation	-	-	-	-	-	-
MYR 2,503.39	1 Piece(s)	27 Day(s) or more	6	30	83	-	0.05~0.8	27	-	-	Dust Proofing / Copper-Free/Fluorine-Free	-	20	Electroless Nickel Plating	0.15 to 0.7	-	-	35	Standard type	M screw	No adjuster	Standard	M9N	0.5	None	2 pcs.	Copper/fluorine/silicon-free + low dust generation	-	-	-	-	-	-
MYR 2,779.27	1 Piece(s)	27 Day(s) or more	6	30	83	-	0.05~0.8	27	-	-	Dust Proofing / Copper-Free/Fluorine-Free	-	20	Electroless Nickel Plating	0.15 to 0.7	-	-	35	Standard type	M screw	Dual-end rubber stoppers	Standard	M9B	0.5	None	2 pcs.	Copper/fluorine/silicon-free + low dust generation	-	-	-	-	-	-
MYR 2,645.30	1 Piece(s)	27 Day(s) or more	6	30	83	-	0.05~0.8	27	-	-	Dust Proofing / Copper-Free/Fluorine-Free	-	20	Electroless Nickel Plating	0.15 to 0.7	-	-	35	Standard type	M screw	Forward-end metal stopper	Standard	M9N	0.5	None	2 pcs.	Copper/fluorine/silicon-free + low dust generation	-	-	-	-	-	-
MYR 2,379.58	1 Piece(s)	27 Day(s) or more	6	40	101	-	0.05~0.8	27	-	-	Dust Proofing / Copper-Free/Fluorine-Free	-	20	Electroless Nickel Plating	0.15 to 0.7	-	-	40	Standard type	M screw	No adjuster	Standard	Without auto switch (built-in magnet)	None	None	None	Copper/fluorine/silicon-free + low dust generation	-	-	-	-	-	-
MYR 2,558.54	1 Piece(s)	27 Day(s) or more	6	50	111	-	0.05~0.8	27	-	-	Dust Proofing / Copper-Free/Fluorine-Free	-	20	Electroless Nickel Plating	0.15 to 0.7	-	-	45	Standard type	M screw	No adjuster	Standard	Without auto switch (built-in magnet)	None	None	None	Copper/fluorine/silicon-free + low dust generation	-	-	-	-	-	-
MYR 2,806.57	1 Piece(s)	27 Day(s) or more	6	50	111	-	0.05~0.8	27	-	-	Dust Proofing / Copper-Free/Fluorine-Free	-	20	Electroless Nickel Plating	0.15 to 0.7	-	-	45	Standard type	M screw	No adjuster	Standard	M9BW	0.5	None	2 pcs.	Copper/fluorine/silicon-free + low dust generation	-	-	-	-	-	-
MYR 2,826.59	1 Piece(s)	27 Day(s) or more	6	50	111	-	0.05~0.8	27	-	-	Dust Proofing / Copper-Free/Fluorine-Free	-	20	Electroless Nickel Plating	0.15 to 0.7	-	-	45	Standard type	M screw	No adjuster	Standard	M9N	0.5	None	2 pcs.	Copper/fluorine/silicon-free + low dust generation	-	-	-	-	-	-
MYR 3,141.96	1 Piece(s)	27 Day(s) or more	6	50	111	-	0.05~0.8	27	-	-	Dust Proofing / Copper-Free/Fluorine-Free	-	20	Electroless Nickel Plating	0.15 to 0.7	-	-	45	Standard type	M screw	Dual-end rubber stoppers	Standard	M9N	3	None	2 pcs.	Copper/fluorine/silicon-free + low dust generation	-	-	-	-	-	-
MYR 2,964.25	1 Piece(s)	27 Day(s) or more	6	50	111	-	0.05~0.8	27	-	-	Dust Proofing / Copper-Free/Fluorine-Free	-	20	Electroless Nickel Plating	0.15 to 0.7	-	-	45	Standard type	M screw	Forward-end rubber stopper	Standard	M9N	3	None	2 pcs.	Copper/fluorine/silicon-free + low dust generation	-	-	-	-	-	-
MYR 2,984.30	1 Piece(s)	27 Day(s) or more	6	50	111	-	0.05~0.8	27	-	-	Dust Proofing / Copper-Free/Fluorine-Free	-	20	Electroless Nickel Plating	0.15 to 0.7	-	-	45	Standard type	M screw	Reverse-end rubber stopper	Standard	M9NW	0.5	None	2 pcs.	Copper/fluorine/silicon-free + low dust generation	-	-	-	-	-	-
MYR 3,102.57	1 Piece(s)	27 Day(s) or more	6	50	111	-	0.05~0.8	27	-	-	Dust Proofing / Copper-Free/Fluorine-Free	-	20	Electroless Nickel Plating	0.15 to 0.7	-	-	45	Standard type	M screw	Dual-end metal stoppers	Standard	M9B	0.5	None	2 pcs.	Copper/fluorine/silicon-free + low dust generation	-	-	-	-	-	-
MYR 3,134.13	1 Piece(s)	27 Day(s) or more	6	50	111	-	0.05~0.8	27	-	-	Dust Proofing / Copper-Free/Fluorine-Free	-	20	Electroless Nickel Plating	0.15 to 0.7	-	-	45	Standard type	M screw	Dual-end metal stoppers	Standard	M9B	3	None	2 pcs.	Copper/fluorine/silicon-free + low dust generation	-	-	-	-	-	-
MYR 3,110.39	1 Piece(s)	27 Day(s) or more	6	50	111	-	0.05~0.8	27	-	-	Dust Proofing / Copper-Free/Fluorine-Free	-	20	Electroless Nickel Plating	0.15 to 0.7	-	-	45	Standard type	M screw	Dual-end metal stoppers	Standard	M9N	0.5	None	2 pcs.	Copper/fluorine/silicon-free + low dust generation	-	-	-	-	-	-
MYR 2,968.49	1 Piece(s)	27 Day(s) or more	6	50	111	-	0.05~0.8	27	-	-	Dust Proofing / Copper-Free/Fluorine-Free	-	20	Electroless Nickel Plating	0.15 to 0.7	-	-	45	Standard type	M screw	Forward-end metal stopper	Standard	M9N	0.5	None	2 pcs.	Copper/fluorine/silicon-free + low dust generation	-	-	-	-	-	-
MYR 3,141.96	1 Piece(s)	27 Day(s) or more	6	50	111	-	0.05~0.8	27	-	-	Dust Proofing / Copper-Free/Fluorine-Free	-	20	Electroless Nickel Plating	0.15 to 0.7	-	-	45	Standard type	M screw	Forward-end metal stopper	Axial direction piping type	M9N	0.5	None	2 pcs.	Copper/fluorine/silicon-free + low dust generation	-	-	-	-	-	-
MYR 3,205.08	1 Piece(s)	27 Day(s) or more	6	50	111	-	0.05~0.8	27	-	-	Dust Proofing / Copper-Free/Fluorine-Free	-	20	Electroless Nickel Plating	0.15 to 0.7	-	-	45	Standard type	M screw	Forward-end metal stopper	Axial direction piping type	M9N	5	None	2 pcs.	Copper/fluorine/silicon-free + low dust generation	-	-	-	-	-	-
MYR 1,983.05	1 Piece(s)	27 Day(s) or more	6	10	-	-	0.05~0.8	27	-	-	Dust Proofing / Copper-Free/Fluorine-Free	-	20	Electroless Nickel Plating	0.15 to 0.7	-	-	25	Symmetrical type	M screw	No adjuster	Standard	Without auto switch (built-in magnet)	None	None	None	Copper/fluorine/silicon-free + low dust generation	-	-	-	-	-	-
MYR 2,172.27	1 Piece(s)	27 Day(s) or more	6	10	-	-	0.05~0.8	27	-	-	Dust Proofing / Copper-Free/Fluorine-Free	-	20	Electroless Nickel Plating	0.15 to 0.7	-	-	25	Symmetrical type	M screw	No adjuster	Standard	A93	3	None	2 pcs.	Copper/fluorine/silicon-free + low dust generation	-	-	-	-	-	-
MYR 2,094.35	1 Piece(s)	27 Day(s) or more	6	10	-	-	0.05~0.8	27	-	-	Dust Proofing / Copper-Free/Fluorine-Free	-	20	Electroless Nickel Plating	0.15 to 0.7	-	-	25	Symmetrical type	M screw	No adjuster	Standard	M9N	3	None	1 pcs.	Copper/fluorine/silicon-free + low dust generation	-	-	-	-	-	-
MYR 2,140.66	1 Piece(s)	27 Day(s) or more	6	10	-	-	0.05~0.8	27	-	-	Dust Proofing / Copper-Free/Fluorine-Free	-	20	Electroless Nickel Plating	0.15 to 0.7	-	-	25	Symmetrical type	M screw	No adjuster	Standard	M9NW	3	None	1 pcs.	Copper/fluorine/silicon-free + low dust generation	-	-	-	-	-	-
MYR 2,558.54	1 Piece(s)	27 Day(s) or more	6	10	-	-	0.05~0.8	27	-	-	Dust Proofing / Copper-Free/Fluorine-Free	-	20	Electroless Nickel Plating	0.15 to 0.7	-	-	25	Symmetrical type	M screw	Dual-end rubber stoppers	Standard	M9B	3	None	2 pcs.	Copper/fluorine/silicon-free + low dust generation	-	-	-	-	-	-
MYR 2,424.51	1 Piece(s)	27 Day(s) or more	6	10	-	-	0.05~0.8	27	-	-	Dust Proofing / Copper-Free/Fluorine-Free	-	20	Electroless Nickel Plating	0.15 to 0.7	-	-	25	Symmetrical type	M screw	Forward-end rubber stopper	Standard	M9N	3	None	2 pcs.	Copper/fluorine/silicon-free + low dust generation	-	-	-	-	-	-
MYR 2,124.95	1 Piece(s)	27 Day(s) or more	6	10	-	-	0.05~0.8	27	-	-	Dust Proofing / Copper-Free/Fluorine-Free	-	20	Electroless Nickel Plating	0.15 to 0.7	-	-	25	Symmetrical type	M screw	Reverse-end rubber stopper	Standard	Without auto switch (built-in magnet)	None	None	None	Copper/fluorine/silicon-free + low dust generation	-	-	-	-	-	-
MYR 2,424.51	1 Piece(s)	27 Day(s) or more	6	10	-	-	0.05~0.8	27	-	-	Dust Proofing / Copper-Free/Fluorine-Free	-	20	Electroless Nickel Plating	0.15 to 0.7	-	-	25	Symmetrical type	M screw	Reverse-end rubber stopper	Standard	M9NV	0.5	None	2 pcs.	Copper/fluorine/silicon-free + low dust generation	-	-	-	-	-	-
MYR 2,124.95	1 Piece(s)	27 Day(s) or more	6	10	-	-	0.05~0.8	27	-	-	Dust Proofing / Copper-Free/Fluorine-Free	-	20	Electroless Nickel Plating	0.15 to 0.7	-	-	25	Symmetrical type	M screw	Forward-end metal stopper	Standard	Without auto switch (built-in magnet)	None	None	None	Copper/fluorine/silicon-free + low dust generation	-	-	-	-	-	-
MYR 2,393.00	1 Piece(s)	27 Day(s) or more	6	10	-	-	0.05~0.8	27	-	-	Dust Proofing / Copper-Free/Fluorine-Free	-	20	Electroless Nickel Plating	0.15 to 0.7	-	-	25	Symmetrical type	M screw	Forward-end metal stopper	Standard	M9N	0.5	None	2 pcs.	Copper/fluorine/silicon-free + low dust generation	-	-	-	-	-	-
MYR 2,456.08	1 Piece(s)	27 Day(s) or more	6	10	-	-	0.05~0.8	27	-	-	Dust Proofing / Copper-Free/Fluorine-Free	-	20	Electroless Nickel Plating	0.15 to 0.7	-	-	25	Symmetrical type	M screw	Forward-end metal stopper	Standard	M9N	5	None	2 pcs.	Copper/fluorine/silicon-free + low dust generation	-	-	-	-	-	-
MYR 2,566.42	1 Piece(s)	27 Day(s) or more	6	10	-	-	0.05~0.8	27	-	-	Dust Proofing / Copper-Free/Fluorine-Free	-	20	Electroless Nickel Plating	0.15 to 0.7	-	-	25	Symmetrical type	M screw	Forward-end metal stopper	Axial direction piping type	M9N	0.5	None	2 pcs.	Copper/fluorine/silicon-free + low dust generation	-	-	-	-	-	-
MYR 2,077.79	1 Piece(s)	27 Day(s) or more	6	20	73	-	0.05~0.8	27	-	-	Dust Proofing / Copper-Free/Fluorine-Free	-	20	Electroless Nickel Plating	0.15 to 0.7	-	-	30	Symmetrical type	M screw	No adjuster	Standard	Without auto switch (built-in magnet)	None	None	None	Copper/fluorine/silicon-free + low dust generation	-	-	-	-	-	-
MYR 2,385.12	1 Piece(s)	27 Day(s) or more	6	20	73	-	0.05~0.8	27	-	-	Dust Proofing / Copper-Free/Fluorine-Free	-	20	Electroless Nickel Plating	0.15 to 0.7	-	-	30	Symmetrical type	M screw	No adjuster	Standard	M9N	0.5	None	2 pcs.	Copper/fluorine/silicon-free + low dust generation	-	-	-	-	-	-
MYR 2,400.83	1 Piece(s)	27 Day(s) or more	6	20	73	-	0.05~0.8	27	-	-	Dust Proofing / Copper-Free/Fluorine-Free	-	20	Electroless Nickel Plating	0.15 to 0.7	-	-	30	Symmetrical type	M screw	No adjuster	Standard	M9NW	0.5	None	2 pcs.	Copper/fluorine/silicon-free + low dust generation	-	-	-	-	-	-
MYR 2,219.89	1 Piece(s)	27 Day(s) or more	6	20	73	-	0.05~0.8	27	-	-	Dust Proofing / Copper-Free/Fluorine-Free	-	20	Electroless Nickel Plating	0.15 to 0.7	-	-	30	Symmetrical type	M screw	Forward-end rubber stopper	Standard	Without auto switch (built-in magnet)	None	None	None	Copper/fluorine/silicon-free + low dust generation	-	-	-	-	-	-
MYR 2,558.54	1 Piece(s)	27 Day(s) or more	6	20	73	-	0.05~0.8	27	-	-	Dust Proofing / Copper-Free/Fluorine-Free	-	20	Electroless Nickel Plating	0.15 to 0.7	-	-	30	Symmetrical type	M screw	Reverse-end rubber stopper	Standard	M9NV	0.5	None	2 pcs.	Copper/fluorine/silicon-free + low dust generation	-	-	-	-	-	-
MYR 2,251.10	1 Piece(s)	27 Day(s) or more	6	30	83	-	0.05~0.8	27	-	-	Dust Proofing / Copper-Free/Fluorine-Free	-	20	Electroless Nickel Plating	0.15 to 0.7	-	-	35	Symmetrical type	M screw	No adjuster	Standard	Without auto switch (built-in magnet)	None	None	None	Copper/fluorine/silicon-free + low dust generation	-	-	-	-	-	-
MYR 2,515.10	1 Piece(s)	27 Day(s) or more	6	30	83	-	0.05~0.8	27	-	-	Dust Proofing / Copper-Free/Fluorine-Free	-	20	Electroless Nickel Plating	0.15 to 0.7	-	-	35	Symmetrical type	M screw	No adjuster	Standard	M9N	3	None	2 pcs.	Copper/fluorine/silicon-free + low dust generation	-	-	-	-	-	-
MYR 2,822.28	1 Piece(s)	27 Day(s) or more	6	50	111	-	0.05~0.8	27	-	-	Dust Proofing / Copper-Free/Fluorine-Free	-	20	Electroless Nickel Plating	0.15 to 0.7	-	-	45	Symmetrical type	M screw	No adjuster	Standard	M9BW	0.5	None	2 pcs.	Copper/fluorine/silicon-free + low dust generation	-	-	-	-	-	-
MYR 3,157.71	1 Piece(s)	27 Day(s) or more	6	50	111	-	0.05~0.8	27	-	-	Dust Proofing / Copper-Free/Fluorine-Free	-	20	Electroless Nickel Plating	0.15 to 0.7	-	-	45	Symmetrical type	M screw	Dual-end rubber stoppers	Standard	M9N	3	None	2 pcs.	Copper/fluorine/silicon-free + low dust generation	-	-	-	-	-	-
MYR 3,118.32	1 Piece(s)	27 Day(s) or more	6	50	111	-	0.05~0.8	27	-	-	Dust Proofing / Copper-Free/Fluorine-Free	-	20	Electroless Nickel Plating	0.15 to 0.7	-	-	45	Symmetrical type	M screw	Dual-end metal stoppers	Standard	M9B	0.5	None	2 pcs.	Copper/fluorine/silicon-free + low dust generation	-	-	-	-	-	-
MYR 3,157.71	1 Piece(s)	27 Day(s) or more	6	50	111	-	0.05~0.8	27	-	-	Dust Proofing / Copper-Free/Fluorine-Free	-	20	Electroless Nickel Plating	0.15 to 0.7	-	-	45	Symmetrical type	M screw	Forward-end metal stopper	Axial direction piping type	M9N	0.5	None	2 pcs.	Copper/fluorine/silicon-free + low dust generation	-	-	-	-	-	-
MYR 3,220.78	1 Piece(s)	27 Day(s) or more	6	50	111	-	0.05~0.8	27	-	-	Dust Proofing / Copper-Free/Fluorine-Free	-	20	Electroless Nickel Plating	0.15 to 0.7	-	-	45	Symmetrical type	M screw	Forward-end metal stopper	Axial direction piping type	M9N	5	None	2 pcs.	Copper/fluorine/silicon-free + low dust generation	-	-	-	-	-	-

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Basic Information

Type	L-Shaped Table Type	Table Material	Aluminum	Guide Type	Linear guide type
Made-to-order	None

Configure

972 Part Numbers

View Part Numbers

Configure Remaining Specifications

Completed

Specification/Dimensions

Cylinder I.D.(Ø)
6

8

12

16

20

25
Clear
Stroke(mm)
10

20

30

40

50

75

100

125

150
Clear
Table Size: Length L(mm)
47

52

57

62

67

70

73

75

76

80

83

85

88

90

94

95

98

101

102

104

107

108

111

112

115

117

118

121

122

124

128

131

132

133

135

141

144

147.5

156

157.5

159

168

175

176

181

181.5

192

199

200

206.5

219

220

224

225

244

245.5

249

253

273

277

281

298

298.5

305

323.5
Clear
Stroke (Range)(mm)
～30

31～50

51～100

101～250
Clear
Table Size: Width W(mm)
27

31

32

36

39

46

49

58

60

70

74

84
Clear
Table Size Length (Range)(mm)
50.1～100.0

100.1～150.0

150.1～200.0

200.1～300.0

300.1～
Clear
Table Size Width (Range)(mm)
25.1～50.0

50.1～75.0

75.1～100.0
Clear
Environment
- Dust Proofing
- Copper-Free/Fluorine-Free
- Cleanroom
Clear
Table Size Height (Range)(mm)
20.1～30.0

30.1～40.0

40.1～50.0

50.1～75.0
Clear
Table Size: Height H(mm)
20

23

30

37

46

55
Clear
Table Surface Treatment
- Electroless Nickel Plating
Clear
Operating Pressure(MPa)
0.15 to 0.7
Clear
Table Parallelism(µm)
25

30

35

40

45

50

55

60

65

70

75

80

95

105

115

125
Clear
Piping Format
Standard type

Symmetrical type
Clear
Port Screw Type
- G
- M screw
- NPT
- Rc
Clear
Adjuster Option
- Both-end absorber
- Dual-end absorber
- Dual-end metal stoppers
- Dual-end rubber stoppers
- Extension end absorber + retraction end rubber stopper
- Extension end metal stopper + retraction end absorber
- Extension end metal stopper + retraction end rubber stopper
- Extension end rubber stopper + retraction end absorber
- Extension end rubber stopper + retraction end metal stopper
- Forward-end absorber
- Forward-end metal stopper
- Forward-end rubber stopper
- No adjuster
- Retraction end metal stopper
- Reverse-end absorber
- Reverse-end rubber stopper
- Rubber Stopper at Extension End
- Rubber Stopper at Retraction End
- Without adjuster
Clear
Function Option
- Axial direction piping type
- Standard
- With buffer
- With buffer + with end lock
- With buffer / axial piping type
- With end lock
Clear
Auto Switches
F8B

F9G

M9B

M9BA

M9BV

M9BW

M9BWV

M9N

M9NV

M9NW

M9NWV

M9P

M9PV

M9PW

M9PWV

A90

A90V

A93

A93V

A96

A96V

Without auto switch (built-in magnet)
Clear
Lead Wire Length(m)
- 0.5
- 1
- 3
- 5
- None
Clear
Lead Wire Connector
- M12 4‑pin
- None
Clear
The number of the switches
- 1 pcs.
- 2
- 2 pcs.
- 3 pcs.
- 4 pcs.
- 9 pcs.
- None
Clear
Type
- Clean series
- Copper and Fluorine Unavailable Specifications
- Copper/fluorine/silicon-free + low dust generation
Clear
Stroke(mm)
20

30

40

50

75

100

125

150
Clear
Table size length(mm)
75

102

104

112

133

144

156

168

181

273

305
Clear
Table size width(mm)
32

39

46

49

60

70

84
Clear
Table size height
23

30

37

46

55
Clear
Table parallelism(µm)
30

35

40

45

50

55

65

70

75

115

125
Clear
Table Surface Treatment
- electroless nickel plating
Clear
type
- 13-MXQ
- 20-MXQ
- 22-MXQ
Clear
Max. Load Mass (Horizontal Mounting)(kg)
0.05~0.8

1~4.9

5~9.2
Clear
CAD
- 2D
- 3D
Clear

Days to Ship

All

3 Day(s) or Less

11 Day(s) or Less

14 Day(s) or Less

27 Day(s) or Less

43 Day(s) or Less
Clear

Specify Alterations

The specifications and dimensions of some parts may not be fully covered. For exact details, refer to manufacturer catalogs .

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Air Slide Table Clean / Low Dust Generation 13/20/22-MXQ Series (Part Numbers)

(i)Caution

Basic Information

Configure

Specification/Dimensions

Cylinder I.D.(Ø)

Stroke(mm)

Table Size: Length L(mm)

Stroke (Range)(mm)

Table Size: Width W(mm)

Table Size Length (Range)(mm)

Table Size Width (Range)(mm)

Environment

Table Size Height (Range)(mm)

Table Size: Height H(mm)

Table Surface Treatment

Operating Pressure(MPa)

Table Parallelism(µm)

Piping Format

Port Screw Type

Adjuster Option

Function Option

Auto Switches

Lead Wire Length(m)

Lead Wire Connector

The number of the switches

Type

Stroke(mm)

Table size length(mm)

Table size width(mm)

Table size height

Table parallelism(µm)

Table Surface Treatment

type

Max. Load Mass (Horizontal Mounting)(kg)

CAD

Days to Ship

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