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*CAD data currently being revised for this series. This will be available as soon as modifications are complete.
[Features]
· Ideal for LCD glass, coating processes, transport of semiconductor manufacturing equipment.
· The resin material with flexibility adheres work.
· Unlikely to make adhesion marks.
· Separation characteristic of the item at the time of vacuum breakage will increase.
· Resin pad can be replaced without tools for detaching the main body.
· Simple and compact structure.
· Pad holders have been added for applications requiring copper-based metal not to be used and as part of efforts to reduce ozone concentrations.
· Copper-based metal is not used for metal parts. HNBR is used for sealing rubber material.
Japanese Only
Part Number
Configured Part Number is shown.


| Model code | Pad O.D. ød | Tube O.D. øD | E | Tube end C | Connection config. code |
|---|---|---|---|---|---|
| VPMB10Q[5]-3J | 10 | 3 | 17.5 | 10.9 | -M4 |
| VPMB10Q[5]-4J[9] | 4 | ||||
| VPMB20Q[5]-3J | 20 | 3 | -M6 | ||
| VPMB20Q[5]-4J[9] | 4 | ||||
| VPMB30Q[5]-3J | 30 | 3 | |||
| VPMB30Q[5]-4J[9] | 4 |
Units: mm
*[5]: Replaced with Pad rubber material code. Refer to the catalog for details.
*[9]: Replaced with "-S3" for -S3 spec. (Copper alloy free material for metal parts and FKM or HNBR for sealing parts).
| Part Number |
|---|
| VPMB10QK-3J |
| VPMB10QK-4J |
| VPMB10QKE-3J |
| VPMB10QKE-4J |
| VPMB10QM-3J |
| VPMB10QM-4J |
| VPMB20QK-4J |
| VPMB20QKE-4J |
| VPMB20QM-4J |
| VPMB30QK-4J |
| VPMB30QKE-4J |
| VPMB30QM-4J |
| Part Number | Standard Unit Price | Minimum order quantity | Volume Discount | Days to Ship | Usage Environment | Resin Type Material | Color | Outer Diameter d (φ) | Full length B (mm) | Vacuum Outlet Tube Outer Diameter (φ) |
|---|---|---|---|---|---|---|---|---|---|---|
MYR 244.57 | 1 Piece(s) | 9 Day(s) or more | Standard | [PEEK] PEEK | - | 10 | 33 | 3 | ||
MYR 245.99 | 1 Piece(s) | 9 Day(s) or more | Standard | [PEEK] PEEK | - | 10 | 33 | 4 | ||
MYR 280.77 | 1 Piece(s) | 9 Day(s) or more | Standard / Static electricity diffusion | [PEEK] Conductive PEEK | Black | 10 | 33 | 3 | ||
MYR 282.18 | 1 Piece(s) | 9 Day(s) or more | Standard / Static electricity diffusion | [PEEK] Conductive PEEK | Black | 10 | 33 | 4 | ||
MYR 233.72 | 1 Piece(s) | 9 Day(s) or more | Standard | POM | [White] White | 10 | 33 | 3 | ||
MYR 235.13 | 1 Piece(s) | 9 Day(s) or more | Standard | POM | [White] White | 10 | 33 | 4 | ||
MYR 303.90 | 1 Piece(s) | 9 Day(s) or more | Standard | [PEEK] PEEK | - | 20 | 34.9 | 4 | ||
MYR 358.19 | 1 Piece(s) | 9 Day(s) or more | Standard / Static electricity diffusion | [PEEK] Conductive PEEK | Black | 20 | 34.9 | 4 | ||
MYR 274.94 | 1 Piece(s) | 9 Day(s) or more | Standard | POM | [White] White | 20 | 34.9 | 4 | ||
MYR 358.19 | 1 Piece(s) | 9 Day(s) or more | Standard | [PEEK] PEEK | - | 30 | 34.9 | 4 | ||
MYR 430.58 | 1 Piece(s) | 9 Day(s) or more | Standard / Static electricity diffusion | [PEEK] Conductive PEEK | Black | 30 | 34.9 | 4 | ||
MYR 311.14 | 1 Piece(s) | 9 Day(s) or more | Standard | POM | [White] White | 30 | 34.9 | 4 |
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| Pad Type | Standard / Holder Set | Pad Shape | Prevention of Adsorption Trace | Mounting Method | Pad Screw Fixed |
|---|---|---|---|---|---|
| Material | Resin | Height L1(mm) | 5.3 | Mounting Fitting | Fixed Type |
| Stroke(mm) | 1 | Vacuum Outlet Direction | Horizontal | Mount Connection Screw | M5 × 0.8 |
| Fall Prevention Valve | None | Direct Attached Filter | None | Metal parts material | Standard Specifications |
| Swiveling angle | 16° |

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