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*The CAD data for this series is being revised. This will be available as soon as modifications are complete.
[Features]
· Ideal for LCD glass, coating processes, transport of semiconductor manufacturing equipment.
· The flexible resin material adheres to the workpiece.
· Unlikely to make adhesion marks.
· Also improves the separation characteristic of the workpiece when the vacuum suction ends.
· You can replace the resin pad without spanners and hexagon wrenches to detach the main body.
· Simple and compact structure.
· A wide range of pad sizes, pad materials, and holder shapes are available.
· Pad holders have been added for applications requiring "no use of copper-based metal" and "reduced ozone concentrations."
· Copper-based metal is not used for metal parts. HNBR is used for sealing rubber material.
Japanese Only


| Model code | Pad O.D. ød | Spring force (N) | Connection config. code |
|---|---|---|---|
| VPF10Q[5][9] | 10 | 7.9 ~ 15.0 | -M4 |
| VPF20Q[5][9] | 20 | -M6 | |
| VPF30Q[5][9] | 30 |
Units: mm
*[5]: Replaced with Pad rubber material code. Refer to the catalog for details.
*[7]: Replaced with "-S3" for -S3 spec. (Copper alloy free material for metal parts and FKM or HNBR for sealing parts).
*Tightening torque of a pad holder fixing bulkhead nut is 4.5~6 N·m.
| Part Number |
|---|
| VPF30QM |
| Part Number | Standard Unit Price | Minimum order quantity | Volume Discount | Days to Ship | Usage Environment | Resin Type Material | Color | Outer Diameter d (φ) | Full length B (mm) |
|---|---|---|---|---|---|---|---|---|---|
MYR 406.83 | 1 Piece(s) | 9 Day(s) or more | Standard | POM | [White] White | 30 | 57.9 |
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| Pad Type | Standard / Swiveling / Holder Set | Pad Shape | Prevention of Adsorption Trace | Mounting Method | Pad Screw Fixed |
|---|---|---|---|---|---|
| Material | Resin | Height L1(mm) | 5.3 | Mounting Fitting | Spring Type |
| Springs Power(N) | 7.9~15.0 | Stroke(mm) | 6.8 | Vacuum Outlet Direction | Top |
| Mount Connection Screw | M14×1 | Vacuum Outlet Screw | M14×1 | Fall Prevention Valve | None |
| Direct Attached Filter | None | Swiveling angle | 16° |
Please check the type/dimensions/specifications of the part VPF30QM in the Vacuum Pad, Suction Mark Prevention Type, VPF series.
| Part Number |
|---|
| VPF10QK |
| VPF10QKE |
| VPF10QM |
| VPF20QK |
| VPF20QKE |
| VPF20QM |
| Part Number | Standard Unit Price | Minimum order quantity | Volume Discount | Days to Ship | Usage Environment | Resin Type Material | Color | Outer Diameter d (φ) | Full length B (mm) |
|---|---|---|---|---|---|---|---|---|---|
MYR 335.76 | 1 Piece(s) | 9 Day(s) or more | Standard | [PEEK] PEEK | [White] Natural | 10 | 57 | ||
MYR 376.27 | 1 Piece(s) | 9 Day(s) or more | Standard / Static electricity diffusion | [PEEK] Conductive PEEK | Black | 10 | 57 | ||
MYR 323.60 | 1 Piece(s) | 9 Day(s) or more | Standard | POM | [White] White | 10 | 57 | ||
MYR 398.59 | 1 Piece(s) | 9 Day(s) or more | Standard | [PEEK] PEEK | [White] Natural | 20 | 57.9 | ||
MYR 459.36 | 1 Piece(s) | 9 Day(s) or more | Standard / Static electricity diffusion | [PEEK] Conductive PEEK | Black | 20 | 57.9 | ||
MYR 366.19 | 1 Piece(s) | 9 Day(s) or more | Standard | POM | [White] White | 20 | 57.9 |

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