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Vacuum Pad, Standard Small Type, VPMA, Barb Fitting Type (Part Numbers)

Vacuum Pad, Standard Small Type, VPMA, Barb Fitting Type

Small vacuum pad ideal for use in semiconductor manufacturing equipment. *CAD data currently being revised for this series. This will be available as soon as modifications are complete.

[Features]
· Containers of different shapes are available, including the general type which is ideal for flat work surfaces (ones that are rigid enough not to flap), the deep type ideal for round fruits (apples, etc.) and balls, and the small type ideal for small works and for use at semiconductor manufacturing facilities.
· A wide range of pad sizes, pad materials, and holder shapes are available.
· Pad holders have been added for applications requiring copper-based metal not to be used and as part of efforts to reduce ozone concentrations.
· Copper-based metal is not used for metal parts. HNBR is used for sealing rubber material.

PDF

Japanese Only

Dimensions

Vacuum Pad, Standard Small Type, VPMA, Barb Fitting Type
Vacuum Pad, Standard Small Type, VPMA, Barb Fitting Type
Vacuum Pad, Standard Small Type, VPMA, Barb Fitting Type
Vacuum Pad, Standard Small Type, VPMA, Barb Fitting Type

Standard table

Model codeTube I.D.
øD
Pad O.D.
ød
Thread
M
BLCHex.
H
Connection
config. code
VPMA0.7RM[5]-3B[9]20.7M4×0.518466-T4
VPMA0.7RM[5]-4B[9]2.5M5×0.51977
VPMA1RM[5]-3B[9]21M4×0.51866
VPMA1RM[5]-4B[9]2.5M5×0.51977
VPMA1.5RM[5]-3B[9]21.5M4×0.51866
VPMA1.5RM[5]-4B[9]2.5M5×0.51977
VPMA2RM[5]-3B[9]22M4×0.51866
VPMA2RM[5]-4B[9]2.5M5×0.51977
VPMA3RM[5]-3B[9]23M4×0.51866
VPMA3RM[5]-4B[9]2.5M5×0.51977
VPMA4RM[5]-3B[9]24M4×0.51866
VPMA4RM[5]-4B[9]2.5M5×0.51977
VPMA6R[5]-3B[9]26M4×0.523766-T8
VPMA6R[5]-4B[9]2.5M5×0.5247
VPMA8R[5]-3B[9]28M4×0.521.55.56
VPMA8R[5]-4B[9]2.5M5×0.522.57
VPMA10R[5]-3B[9]210M6×0.7528868-M4
VPMA10R[5]-4B[9]2.5297
VPMA15R(A)[5]-3B[9]21529(30)9(10)6
VPMA15R(A)[5]-4B[9]2.530(31)7
VPMA20R(A)[5]-4B[9]2.520M10×136.6(37.6)10(11)712-M6
VPMA20R(A)[5]-6B[9]4
VPMA25R(A)[5]-4B[9]2.52537.6(38.6)11(12)
VPMA25R(A)[5]-6B[9]4
VPMA30R(A)[5]-4B[9]2.53037.6(40.6)11(14)
VPMA30R(A)[5]-6B[9]4
VPMA40R(A)[5]-4B[9]2.54040.6(44.1)14(17.5)
VPMA40R(A)[5]-6B[9]4
VPMA50R(A)[5]-4B[9]2.55041.6(44.6)15(18)
VPMA50R(A)[5]-6B[9]4

Units: mm

*Value in ( ) is the dimension of a deep type pad.
*[5]: Replaced with Pad rubber material code. Refer to the catalog for details.
*[9]: Replaced with "-S3" for -S3 spec. (Copper alloy free material for metal parts and FKM or HNBR for sealing parts).
*Pad material N, NE, and G are not suitable for use under ozone environment.
*Tightening torque of a pad holder fixing bulkhead nut is as below.
     ▪Pad dia.: ø0.7~ø8 mm: Thread size M4×0.5 ▶ 1~1.2 N·m, M5×0.5 ▶ 1.5~2 N·m.
     ▪Pad dia.: ø10, ø15 mm ▶ 2~3 N·m.
     ▪Pad dia.: ø20~ø50 mm ▶ 5~7 N·m

Part Number
VPMA8RS-3B
VPMA8RS-4B
VPMA8RSE-3B
VPMA8RSE-4B
VPMA8RU-3B
VPMA8RU-4B
VPMA10RF-3B
VPMA10RF-4B
VPMA10RG-3B
VPMA10RG-4B
VPMA10RN-3B
VPMA10RN-4B
VPMA10RS-3B
VPMA10RS-4B
VPMA10RSE-3B
VPMA10RSE-4B
VPMA10RU-3B
VPMA10RU-4B
VPMA15AF-3B
VPMA15AF-4B
VPMA15AG-3B
VPMA15AG-4B
VPMA15AN-3B
VPMA15AN-4B
VPMA15AS-3B
VPMA15AS-4B
VPMA15AU-3B
VPMA15AU-4B
VPMA15RF-3B
VPMA15RF-4B
VPMA15RG-3B
VPMA15RG-4B
VPMA15RN-3B
VPMA15RN-4B
VPMA15RS-3B
VPMA15RS-4B
VPMA15RSE-3B
VPMA15RSE-4B
VPMA15RU-3B
VPMA15RU-4B
VPMA20AF-4B
VPMA20AF-6B
VPMA20AG-4B
VPMA20AG-6B
VPMA20AN-4B
VPMA20AN-6B
VPMA20AS-4B
VPMA20AS-6B
VPMA20AU-4B
VPMA20AU-6B
VPMA20RF-4B
VPMA20RF-6B
VPMA20RG-4B
VPMA20RG-6B
VPMA20RN-4B
VPMA20RN-6B
VPMA20RS-4B
VPMA20RS-6B
VPMA20RSE-4B
VPMA20RSE-6B
VPMA20RU-4B
VPMA20RU-6B
VPMA25AF-4B
VPMA25AF-6B
VPMA25AG-4B
VPMA25AG-6B
VPMA25AN-4B
VPMA25AN-6B
VPMA25AS-4B
VPMA25AS-6B
VPMA25AU-4B
VPMA25AU-6B
VPMA25RF-4B
VPMA25RF-6B
VPMA25RG-4B
VPMA25RG-6B
VPMA25RN-4B
VPMA25RN-6B
VPMA25RS-4B
VPMA25RS-6B
VPMA25RSE-4B
VPMA25RSE-6B
VPMA25RU-4B
VPMA25RU-6B
VPMA30AF-4B
VPMA30AF-6B
VPMA30AG-4B
VPMA30AG-6B
VPMA30AN-4B
VPMA30AN-6B
Part NumberStandard Unit PriceMinimum order quantityVolume DiscountDays to ShipRoHSPad Shape Mounting Method Rubber Type Material Usage Environment Color Outer Diameter d
(φ)
Height L1
(mm)
Full length B
(mm)
Mount Connection Screw Vacuum Outlet Tube Outer Diameter
(φ)

MYR 54.17

1 Piece(s) 9 Day(s) or more -SmallRecessed Type[Silicon Rubber] Silicone RubberStandard[White] White85.521.5M43

MYR 54.17

1 Piece(s) 9 Day(s) or more -SmallRecessed Type[Silicon Rubber] Silicone RubberStandard[White] White85.522.5M54

MYR 54.17

1 Piece(s) 9 Day(s) or more -SmallRecessed Type[Silicon Rubber] Silicone Rubber +CarbonStandard / Static electricity diffusionBlack85.521.5M43

MYR 54.17

1 Piece(s) 9 Day(s) or more -SmallRecessed Type[Silicon Rubber] Silicone Rubber +CarbonStandard / Static electricity diffusionBlack85.522.5M54

MYR 65.03

1 Piece(s) 9 Day(s) or more -SmallRecessed TypeUrethane RubberStandardBlue85.521.5M43

MYR 65.03

1 Piece(s) 9 Day(s) or more -SmallRecessed TypeUrethane RubberStandardBlue85.522.5M54

MYR 90.75

1 Piece(s) 9 Day(s) or more -SmallPad Screw FixedFluorine RubberStandardGray10828M63

MYR 90.75

1 Piece(s) 9 Day(s) or more -SmallPad Screw FixedFluorine RubberStandardGray10829M64

MYR 59.99

1 Piece(s) 9 Day(s) or more -SmallPad Screw FixedNBR which conforms to Food Sanitation LawStandardGray10828M63

MYR 59.99

1 Piece(s) 9 Day(s) or more -SmallPad Screw FixedNBR which conforms to Food Sanitation LawStandardGray10829M64

MYR 57.08

1 Piece(s) 9 Day(s) or more -SmallPad Screw Fixed[Nitrile Rubber] Nitrile RubberStandardBlack10828M63

MYR 57.08

1 Piece(s) 9 Day(s) or more -SmallPad Screw Fixed[Nitrile Rubber] Nitrile RubberStandardBlack10829M64

MYR 62.51

1 Piece(s) 9 Day(s) or more -SmallPad Screw Fixed[Silicon Rubber] Silicone RubberStandard[White] White10828M63

MYR 62.51

1 Piece(s) 9 Day(s) or more -SmallPad Screw Fixed[Silicon Rubber] Silicone RubberStandard[White] White10829M64

MYR 62.51

1 Piece(s) 9 Day(s) or more -SmallPad Screw Fixed[Silicon Rubber] Silicone Rubber +CarbonStandard / Static electricity diffusionBlack10828M63

MYR 62.51

1 Piece(s) 9 Day(s) or more -SmallPad Screw Fixed[Silicon Rubber] Silicone Rubber +CarbonStandard / Static electricity diffusionBlack10829M64

MYR 73.37

1 Piece(s) 9 Day(s) or more -SmallPad Screw FixedUrethane RubberStandardBlue10828M63

MYR 73.37

1 Piece(s) 9 Day(s) or more -SmallPad Screw FixedUrethane RubberStandardBlue10829M64

MYR 98.70

1 Piece(s) 9 Day(s) or more -Deep TypePad Screw FixedFluorine RubberStandardGray151030M63

MYR 98.70

1 Piece(s) 9 Day(s) or more -Deep TypePad Screw FixedFluorine RubberStandardGray151031M64

MYR 61.80

1 Piece(s) 9 Day(s) or more -Deep TypePad Screw FixedNBR which conforms to Food Sanitation LawStandardGray151030M63

MYR 61.80

1 Piece(s) 9 Day(s) or more -Deep TypePad Screw FixedNBR which conforms to Food Sanitation LawStandardGray151031M64

MYR 58.89

1 Piece(s) 9 Day(s) or more -Deep TypePad Screw Fixed[Nitrile Rubber] Nitrile RubberStandardBlack151030M63

MYR 58.89

1 Piece(s) 9 Day(s) or more -Deep TypePad Screw Fixed[Nitrile Rubber] Nitrile RubberStandardBlack151031M64

MYR 64.32

1 Piece(s) 9 Day(s) or more -Deep TypePad Screw Fixed[Silicon Rubber] Silicone RubberStandard[White] White151030M63

MYR 64.32

1 Piece(s) 9 Day(s) or more -Deep TypePad Screw Fixed[Silicon Rubber] Silicone RubberStandard[White] White151031M64

MYR 76.98

1 Piece(s) 9 Day(s) or more -Deep TypePad Screw FixedUrethane RubberStandardBlue151030M63

MYR 76.98

1 Piece(s) 9 Day(s) or more -Deep TypePad Screw FixedUrethane RubberStandardBlue151031M64

MYR 98.70

1 Piece(s) 9 Day(s) or more -SmallPad Screw FixedFluorine RubberStandardGray15929M63

MYR 98.70

1 Piece(s) 9 Day(s) or more -SmallPad Screw FixedFluorine RubberStandardGray15930M64

MYR 61.80

1 Piece(s) 9 Day(s) or more -SmallPad Screw FixedNBR which conforms to Food Sanitation LawStandardGray15929M63

MYR 61.80

1 Piece(s) 9 Day(s) or more -SmallPad Screw FixedNBR which conforms to Food Sanitation LawStandardGray15930M64

MYR 58.89

1 Piece(s) 9 Day(s) or more -SmallPad Screw Fixed[Nitrile Rubber] Nitrile RubberStandardBlack15929M63

MYR 58.89

1 Piece(s) 9 Day(s) or more -SmallPad Screw Fixed[Nitrile Rubber] Nitrile RubberStandardBlack15930M64

MYR 64.32

1 Piece(s) 9 Day(s) or more -SmallPad Screw Fixed[Silicon Rubber] Silicone RubberStandard[White] White15929M63

MYR 64.32

1 Piece(s) 9 Day(s) or more -SmallPad Screw Fixed[Silicon Rubber] Silicone RubberStandard[White] White15930M64

MYR 64.32

1 Piece(s) 9 Day(s) or more -SmallPad Screw Fixed[Silicon Rubber] Silicone Rubber +CarbonStandard / Static electricity diffusionBlack15929M63

MYR 64.32

1 Piece(s) 9 Day(s) or more -SmallPad Screw Fixed[Silicon Rubber] Silicone Rubber +CarbonStandard / Static electricity diffusionBlack15930M64

MYR 76.98

1 Piece(s) 9 Day(s) or more -SmallPad Screw FixedUrethane RubberStandardBlue15929M63

MYR 76.98

1 Piece(s) 9 Day(s) or more -SmallPad Screw FixedUrethane RubberStandardBlue15930M64

MYR 104.13

1 Piece(s) 9 Day(s) or more -Deep TypePad Screw FixedFluorine RubberStandardGray201137.6M104

MYR 104.13

1 Piece(s) 9 Day(s) or more -Deep TypePad Screw FixedFluorine RubberStandardGray201137.6M106

MYR 67.23

1 Piece(s) 9 Day(s) or more -Deep TypePad Screw FixedNBR which conforms to Food Sanitation LawStandardGray201137.6M104

MYR 67.23

1 Piece(s) 9 Day(s) or more -Deep TypePad Screw FixedNBR which conforms to Food Sanitation LawStandardGray201137.6M106

MYR 64.32

1 Piece(s) 9 Day(s) or more -Deep TypePad Screw Fixed[Nitrile Rubber] Nitrile RubberStandardBlack201137.6M104

MYR 64.32

1 Piece(s) 9 Day(s) or more -Deep TypePad Screw Fixed[Nitrile Rubber] Nitrile RubberStandardBlack201137.6M106

MYR 69.75

1 Piece(s) 9 Day(s) or more -Deep TypePad Screw Fixed[Silicon Rubber] Silicone RubberStandard[White] White201137.6M104

MYR 69.75

1 Piece(s) 9 Day(s) or more -Deep TypePad Screw Fixed[Silicon Rubber] Silicone RubberStandard[White] White201137.6M106

MYR 82.41

1 Piece(s) 9 Day(s) or more -Deep TypePad Screw FixedUrethane RubberStandardBlue201137.6M104

MYR 82.41

1 Piece(s) 9 Day(s) or more -Deep TypePad Screw FixedUrethane RubberStandardBlue201137.6M106

MYR 104.13

1 Piece(s) 9 Day(s) or more -SmallPad Screw FixedFluorine RubberStandardGray201036.6M104

MYR 104.13

1 Piece(s) 9 Day(s) or more -SmallPad Screw FixedFluorine RubberStandardGray201036.6M106

MYR 67.23

1 Piece(s) 9 Day(s) or more -SmallPad Screw FixedNBR which conforms to Food Sanitation LawStandardGray201036.6M104

MYR 67.23

1 Piece(s) 9 Day(s) or more -SmallPad Screw FixedNBR which conforms to Food Sanitation LawStandardGray201036.6M106

MYR 64.32

1 Piece(s) 9 Day(s) or more -SmallPad Screw Fixed[Nitrile Rubber] Nitrile RubberStandardBlack201036.6M104

MYR 64.32

1 Piece(s) 9 Day(s) or more -SmallPad Screw Fixed[Nitrile Rubber] Nitrile RubberStandardBlack201036.6M106

MYR 69.75

1 Piece(s) 9 Day(s) or more -SmallPad Screw Fixed[Silicon Rubber] Silicone RubberStandard[White] White201036.6M104

MYR 69.75

1 Piece(s) 9 Day(s) or more -SmallPad Screw Fixed[Silicon Rubber] Silicone RubberStandard[White] White201036.6M106

MYR 71.56

1 Piece(s) 9 Day(s) or more -SmallPad Screw Fixed[Silicon Rubber] Silicone Rubber +CarbonStandard / Static electricity diffusionBlack201036.6M104

MYR 71.56

1 Piece(s) 9 Day(s) or more -SmallPad Screw Fixed[Silicon Rubber] Silicone Rubber +CarbonStandard / Static electricity diffusionBlack201036.6M106

MYR 82.41

1 Piece(s) 9 Day(s) or more -SmallPad Screw FixedUrethane RubberStandardBlue201036.6M104

MYR 82.41

1 Piece(s) 9 Day(s) or more -SmallPad Screw FixedUrethane RubberStandardBlue201036.6M106

MYR 104.13

1 Piece(s) 9 Day(s) or more -Deep TypePad Screw FixedFluorine RubberStandardGray251238.6M104

MYR 104.13

1 Piece(s) 9 Day(s) or more -Deep TypePad Screw FixedFluorine RubberStandardGray251238.6M106

MYR 67.23

1 Piece(s) 9 Day(s) or more -Deep TypePad Screw FixedNBR which conforms to Food Sanitation LawStandardGray251238.6M104

MYR 67.23

1 Piece(s) 9 Day(s) or more -Deep TypePad Screw FixedNBR which conforms to Food Sanitation LawStandardGray251238.6M106

MYR 64.32

1 Piece(s) 9 Day(s) or more -Deep TypePad Screw Fixed[Nitrile Rubber] Nitrile RubberStandardBlack251238.6M104

MYR 64.32

1 Piece(s) 9 Day(s) or more -Deep TypePad Screw Fixed[Nitrile Rubber] Nitrile RubberStandardBlack251238.6M106

MYR 69.75

1 Piece(s) 9 Day(s) or more -Deep TypePad Screw Fixed[Silicon Rubber] Silicone RubberStandard[White] White251238.6M104

MYR 69.75

1 Piece(s) 9 Day(s) or more -Deep TypePad Screw Fixed[Silicon Rubber] Silicone RubberStandard[White] White251238.6M106

MYR 82.41

1 Piece(s) 9 Day(s) or more -Deep TypePad Screw FixedUrethane RubberStandardBlue251238.6M104

MYR 82.41

1 Piece(s) 9 Day(s) or more -Deep TypePad Screw FixedUrethane RubberStandardBlue251238.6M106

MYR 104.13

1 Piece(s) 9 Day(s) or more -SmallPad Screw FixedFluorine RubberStandardGray251137.6M104

MYR 104.13

1 Piece(s) 9 Day(s) or more 10SmallPad Screw FixedFluorine RubberStandardGray251137.6M106

MYR 67.23

1 Piece(s) 9 Day(s) or more -SmallPad Screw FixedNBR which conforms to Food Sanitation LawStandardGray251137.6M104

MYR 67.23

1 Piece(s) 9 Day(s) or more -SmallPad Screw FixedNBR which conforms to Food Sanitation LawStandardGray251137.6M106

MYR 64.32

1 Piece(s) 9 Day(s) or more -SmallPad Screw Fixed[Nitrile Rubber] Nitrile RubberStandardBlack251137.6M104

MYR 64.32

1 Piece(s) 9 Day(s) or more -SmallPad Screw Fixed[Nitrile Rubber] Nitrile RubberStandardBlack251137.6M106

MYR 69.75

1 Piece(s) 9 Day(s) or more -SmallPad Screw Fixed[Silicon Rubber] Silicone RubberStandard[White] White251137.6M104

MYR 69.75

1 Piece(s) 9 Day(s) or more 10SmallPad Screw Fixed[Silicon Rubber] Silicone RubberStandard[White] White251137.6M106

MYR 73.37

1 Piece(s) 9 Day(s) or more -SmallPad Screw Fixed[Silicon Rubber] Silicone Rubber +CarbonStandard / Static electricity diffusionBlack251137.6M104

MYR 73.37

1 Piece(s) 9 Day(s) or more -SmallPad Screw Fixed[Silicon Rubber] Silicone Rubber +CarbonStandard / Static electricity diffusionBlack251137.6M106

MYR 82.41

1 Piece(s) 9 Day(s) or more -SmallPad Screw FixedUrethane RubberStandardBlue251137.6M104

MYR 82.41

1 Piece(s) 9 Day(s) or more -SmallPad Screw FixedUrethane RubberStandardBlue251137.6M106

MYR 104.13

1 Piece(s) 9 Day(s) or more -Deep TypePad Screw FixedFluorine RubberStandardGray301440.6M104

MYR 104.13

1 Piece(s) 9 Day(s) or more -Deep TypePad Screw FixedFluorine RubberStandardGray301440.6M106

MYR 69.04

1 Piece(s) 9 Day(s) or more -Deep TypePad Screw FixedNBR which conforms to Food Sanitation LawStandardGray301440.6M104

MYR 69.04

1 Piece(s) 9 Day(s) or more -Deep TypePad Screw FixedNBR which conforms to Food Sanitation LawStandardGray301440.6M106

MYR 66.13

1 Piece(s) 9 Day(s) or more -Deep TypePad Screw Fixed[Nitrile Rubber] Nitrile RubberStandardBlack301440.6M104

MYR 66.13

1 Piece(s) 9 Day(s) or more -Deep TypePad Screw Fixed[Nitrile Rubber] Nitrile RubberStandardBlack301440.6M106

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Basic Information

Pad Type Standard / Holder Set Material Rubber-based Mounting Fitting Fixed Type
Vacuum Outlet Direction Top Fall Prevention Valve None Direct Attached Filter None
Metal parts material Standard Specifications

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